Laser Energy Density Dependence Characteristics of PLZT Thin Films prepared by a PLD for Memory Device (PLD법에 의한 고집적 DRAM용 PLZT 박막의 레이저 에너지 밀도에 따른 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.13 no.1
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- pp.60-65
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- 2000