• 한국생산제조학회지
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• 제21권2호
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• pp.311-315
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• 2012

Diaphragm type noncontact automatic control valve is a valve for controling acidic PR(Photo Resist) liquid used in the semiconductor process. PR is photosensitive liquid that changes phases depending on light transmittance. PR is very toxic and expensive; the purpose of this paper is to address methods that prevent loss due to leaks. The design of noncontact precise automatic control valve is expected to play an important role in controlling fluid flow, therefore influencing energy conservation and environmental improvement. In this paper, diaphragm type automatic control valve's part design, assembly and simulation are introduced. Also, through the analysis of fluid flow the valve's internal velocity, pressure, and turbulent intensity are interpreted. This paper proposes to contribute to the improvement of the valve's performance.

• 융복합기술연구소 논문집
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• 제6권2호
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• pp.1-7
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• 2016

The rotating electrodynamic wheels can produce three-axial forces on the conductive target. The forces are linked strongly each other, and their magnitudes depend on the rotating speed of the wheel. However, the wheels can be used effectively as an actuating principle for transfer system of conductive material. The conductive material is a pipe with a constant cross-section or a conductive plate. In this paper, a few applications using the electrodynamic wheels as transferring means are introduced including the full description of the real hardware implementation.

• 한국정밀공학회지
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• 제12권1호
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• pp.5-14
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• 1995

An optical measurement method of three dimensional surface profiles which is named the slit beam projection is suggested and practically implemented. This method is intended especially for noncontact and fast digitization of sculptured surfaces for CAD modeling and die manufacturing. Its basic principles are based on geometric optics. Deatiled optical principles and an sub-pixel image processing technique to enhance the measuring resolutions are described in this study. The measuring performances of the slit beam projection are presented and discussed to demonstrate that an actual measuring accuracy of below .+-. 0.2mm can be achived over the whole measuring range(500mm*300mm*200mm)

• 한국소음진동공학회논문집
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• 제19권4호
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• pp.418-424
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• 2009

This work is the attempt to give qualitative explanations to complex magnetic phenomena which are observed in the previously proposed magnetostrictive sensor capable of ultrasonic waves and rotational speed measurement. The law of approach is adopted as analysis tool in order to account for some extraordinary output patterns and proved to be effective. The distance between the anhysteretic curve current magnetic state and the variation of anhysteretic curve by stress mainly determine the sensor output shapes and their uniqueness. It is also experimentally verified that the precisely determined bias magnetic field strength can not only remove the unusual output parts but also maximize its sensitivity.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.214-214
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• 2000

This paper deals with the non contact optical sensor to measure the shape of transparent plates such as glass panel of LCD(Liquid Crystal Display). The conventional methods to obtain the shape or thickness of a transparent plates are contact type sensor such as LVOT(Linear Variable Differential Transformer). Due to the contact between the tip of the sensor and the surface of objects, the tip is abraded. In addition, the high temperature glass casting makes the size of sensor body changed. These reasons makes the sensor degraded. In this paper, to overcome these problem, we proposed a low cost noncontact optical sensor this is composed of the Hologram laser unit of a CD-Pickup and a plastic lens. To evaluate the performance of the proposed optical sensor, a series of experiments were performed for various measurement condition. Based upon observation of the experimental result, the developed sensor shows good result for measuring the shape of transparent plates.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.127-131
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• 2003

Foil gas bearing is a noncontact bearing operated by coupled interaction between hydrodynamic pressure of viscous fluid and elastic deformation of foil structure. It has valuable advantages, such as low power loss, long life, oilless environment and low vibration, over conventional bearings for the high speed applications. A high speed BLDC motor adopting the foil bearing has been developed. It is designed to have 38㎾ power at 100,000 RPM for a cryogenic cooler whose operating fluid is neon. In this paper, structural development details especially for the foil gas bearing and rotordynamics are presented.

• 비파괴검사학회지
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• 제10권2호
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• pp.56-62
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• 1990

Surface Acoustic Waves(SAW) are generated on silicon wafer and $YZ-LiTaO_3$ substrate and are detected by noncontact method. As wave sources two kinds of transducers are used : the wedge-type of 20.0 MHz and fabricated Interdigital Transducer(IDT) of 20.8 MHz. SAW are modulated by the optical chopper frequency and are syncronized with a laser beam. In signal processing, intensity variations of light due to the intensity of SAW are analyzed using lock- in amplifier. From the results, corresponding to the applied input power, the intensity variations of a deflected light by corrugations on the substrates are increased and saturation phenomenon is observed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2005년도 춘계학술발표대회 개요집
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• pp.194-196
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• 2005

Ultrasonic guided waves are gaining increasing attention for the inspection of platelike and rodlike structures. At the same time, inspection methods that do not require contact with the test piece are being developed for advanced applications. This paper capitalizes on recent advances in the areas of guided wave ultrasonics and noncontact ultrasonics to demonstrate a superior method for the nondestructive detection of thinning defects simulating hidden corrosion in thin aluminum plates. The proposed approach uses EMAT(electro-magnetic acoustic transducer) for the noncontact generation and detection of guided plate waves. Interesting features in the dispersive behavior of selected guided modes are used for the detection of plate thinning. It is shown that mode cutoff measurements provide a qualitative detection of thinning defects. Measurement of the mode group velocity can be also used to quantify of thinning depth.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.281-282
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• 2006

This paper proposed a method of the camera calibration for noncontact measure of badly illumination. The method with a semi-automation camera calibration, The user designates minimum 4 points in calibration pattern. The Perspective transformation predicts the remaining point calibration pattern. It uses at input value of the Tsai and it searches a better point, When being smaller allowable error than until, it repeats and it puts out a good calibration result.