• Applied Science and Convergence Technology
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• 제23권2호
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• pp.97-102
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• 2014

A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $5{\times}10^{-3}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.

• 한국산학기술학회논문지
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• 제14권9호
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• pp.4178-4184
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• 2013

최근 나노임프린트 리소그래피 공정이 마이크로/나노 스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 최근 나노임프린트 기술은 공정의 고속화 및 대면적화를 통한 대량생산 기술로의 전환을 목표로 하고 있다. 자외선경화 방식의 나노임프린트의 경우 상온 및 저압의 장점과 함께 비진공 환경에서 공정이 가능하다면 진공챔버 및 고압 스테이지 등과 같은 고가의 장비가 필요 없게 됨으로써 설비비용을 낮추고 공정시간을 단축하는데 큰 기여를 할 수 있다. 그러나 비진공 환경에서는 기포결함이 종종 발생하게 된다. 본 연구에서는 비진공 환경에서의 자외선경화 방식의 나노임프린트 공정 중 레지스트의 액적도포 방법에 따른 기포형성을 연구하였다. 액적의 양과 액적의 수를 달리하여 도포한 레지스트에 대하여 충전 후 기포결함 발생을 분석하였다.

• 한국항공우주학회지
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• 제43권7호
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• pp.635-640
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• 2015

본 논문에서는 형상기억합금 구동기를 이용한 소형위성용 비폭발식 분리장치를 소개한다. 앞선 연구결과를 바탕으로 분리장치의 부품의 교체를 통하여 제안된 분리장치의 신뢰성을 향상시킴으로써 고사전하중(preload) 하에서도 구동이 가능하도록 하였다. 또한 충격 실험을 통하여 비폭발식분리장치의 장점인 저충격 발생을 확인하였고, 발사환경 및 우주 환경실험을 통하여 안정적으로 작동하는 것을 검증하였다. 결론적으로 본 연구에서는 충격실험, 진동실험 및 열진공실험 후 고사전하중에서 저충격을 발생시키며 안정적으로 작동 가능한 비폭발식 분리장치를 개발하였다.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.309-316
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• 2014

A large particle accelerator requires an ultrahigh vacuum (UHV) system of average pressure under $1{\times}10^{-7}$ Pa for mitigating the impact of beam scattering from the residual gas molecules. The surface inside the beam ducts should be controlled with an extremely low thermal outgassing rate under $1{\times}10^{-9}Pa{\cdot}m^3/(s{\cdot}m^2)$ for the sake of the insufficient pumping speed. To fulfil the requirements, the aluminum alloys were adopted as the materials of the beam ducts for large accelerator that thanks to the good features of higher thermal conductivity, non-radioactivity, non-magnetism, precise machining capability, et al. To put the aluminum into the large accelerator vacuum systems, several key technologies have been developed will be introduced. The concepts contain the precise computer numerical control (CNC) machining process for the large aluminum ducts and parts in pure alcohol and in an oil-free environment, surface cleaning with ozonized water, stringent welding process control manually or automatically to form a large sector of aluminum ducts, ex-situ baking process to reach UHV and sealed for transportation and installation, UHV pumping with the sputtering ion pumps and the non-evaporable getters (NEG), et al. The developed UHV technologies have been applied to the 3 GeV Taiwan Photon Source (TPS) and revealed good results as the expectation. The problems of leakage encountered during the assembling were most associated with the vacuum baking which result in the consequent trouble shootings and more times of baking. Then the installation of the well-sealed UHV systems is recommended.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.101-102
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• 2008

SF6 widely used as insulating gas is rising as the environment problem. For decreasing this greenhouse gas, electrical breakdown characteristics of vacuum with air are studied in non-uniform field. The gap of needle to plane was 0.5mm. The pressure of vacuum the range of 10^-4${\sim}$10^-5torr. The diameter of a plane made of the stainless steel is 150mm. As a result of the experiment, the breakdown voltage is increased about degree of vacuum increased. The electrode material influenced breakdown voltage in vacuum.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.366-367
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• 2008

SF6 widely used as insulating gas is rising as the environment problem. For decreasing this greenhouse gas, electrical breakdown characteristics of vacuum with air are studied in non-uniform field. The gap of needle to plane was 0.5mm, 0.8mm. The pressure of vacuum the range of 10^-4-10^-5torr. The diameter of a plane made of the stainless steel is150mm. As a result of the experiment, the breakdown voltage is increased about electrode gap distance increased. The electrode material influenced breakdown voltage in vacuum.

• 한국항공우주학회지
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• 제41권11호
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• pp.915-920
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• 2013

인공위성 내부 유닛들이 위성에 실장 되기 위해서는 각 위성 프로그램에서 요구하는 다양한 환경시험을 반드시 통과해야 한다. 최근 타 분야의 기술이 우주분야로 이전되면서 다양한 인공위성 탑재체들이 개발되고 있다. 하지만, 타분야 개발자의 경우 우주개발에 대한 경험 및 이해부족으로 발사 및 우주환경시험을 수행함에 있어 다양한 문제점을 접하게 된다. 본 기술논문에 위성개발 각 단계에서 수행되는 열시험의 개념을 서술하여 우주분야 기술개발을 처음으로 수행하는 개발자가 열시험을 준비하는데 실제적인 도움을 주고자 한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.155-156
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• 2006

UV-NIL is a promising technology for the fabrication of sub-100 nm features. Due to non-uniformity of the residual layer thickness (RLT) and a strong possibility of defects, many UV-NIL processes have been developed and some are commercially available at present, most are based on the 'step-and-repeat' nanoimprint technique, which employs a small-area stamp, much smaller than the substrate. This is mainly because, when a large-area stamp is used, it is difficult to obtain acceptable uniform residual layer thickness and/or to avoid defects such as air entrapment. As an attempt to enable UV_NIL with a large-area stamp for high throughput, we propose a new UV-NIL tool that is able to imprint 4 inch wafer in a low vacuum environment at a single step.

• Archives of Plastic Surgery
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• 제32권6호
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• pp.727-732
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• 2005

The treatment of wounds of the lower extremity caused by diabetes or vascular dysfunction remains a difficult problem for the plastic surgeon. The use of negative pressure in wound healing is a relatively new method to facilitate chronic wound healing by secondary healing. The use of vacuum-assisted closure(VAC) system is purposed to reduce local edema, increase regional blood flow, enhance epithelial migration, preserve a moist wound environment, reduce bacterial colonization, promote granulation tissue formation, and mechanically enhance wound closure. The VAC also can be used as a dressing for anchoring an applied split thickness skin graft. We reviewed the data from 20 consecutive patients with non-healing wound in lower extremity at Dong-A University from March 2002 to December 2004. We used the VAC in 20 patients and compared the results with the control group. In the VAC using group, mean application duration was about 3 weeks and dressing change was done every other day. The follow-up period of patients ranged from 3 months to 30 months with a mean of 17 months. The points of comparison with control group are wound size, granulation tissue proliferation rate, operation method, preoperative time, postoperative healing time, complication, and cost. With those points, we propose to approve the efficiency of the VAC in non-healing wound. As a result, the VAC used in non-healing wound decrease wound size, accelerate granulation tissue formation, do a wound closure with less invasive operation method, make less postoperative complication, can make operation time shorter. Therefore it is cost effect. Our results demonstrate the usefulness of VAC as an adjunct in management of chronic wounds with other extrinsic factors.

• 항공우주시스템공학회지
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• 제16권6호
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• pp.90-98
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• 2022

EO/IR 위성에 탑재된 적외선 센서(IR Sensor)는 궤도환경에서 임무기간 동안 복사 에너지에 대한 센서 출력의 변화가 발생한다. 고품질 영상을 획득하기 위해 출력을 교정할 수 있는 주기적인 교정이 필요하며, 센서의 주기적이고 정밀한 교정을 위해 탑재체 내부에 흑체 시스템이 적용하였다. 우주 환경에서 사용되는 모든 시스템은 궤도환경에서의 목표 성능을 검증하기 위해 지상에서의 성능시험이 요구되고 있다. 흑체 시스템은 운용환경에서 목표 온도 범위에서 대표추정온도 오차와 흑체 표면온도균일도 성능의 시험적 검증이 요구되고 있다. 본 연구에서는, 궤도환경으로 우주배경복사 냉각이 모사된 열진공 시험을 통해 제안된 흑체 시스템의 대표추정온도 오차 교정 및 성능 검증을 진행하였다.