• 반도체디스플레이기술학회지
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• 제17권4호
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• pp.11-15
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• 2018

The parts of equipment for semiconductor are protected by anodic aluminum oxide film to prevent corrosion. This study investigated contamination particle and cracking behavior of anodic oxidation in sulfuric acid containing cerium salt. The insulating properties of the sample were evaluated by measuring the breakdown voltage. It was confirmed that the breakdown voltage was about 50% higher when the cerium salt was added, and that the breakdown voltage after the heat treatment was 55% and 35% higher at $300^{\circ}C$ and $400^{\circ}C$, respectively. After heating at $300^{\circ}C$ and $400^{\circ}C$, cracks were observed in non cerium and cerium 3mM, and more cracks occur at $400^{\circ}C$ than at $30^{\circ}C$. The amount of contamination particles generated in the plasma is about 45% less than that of non-cerium specimens.

• Applied Science and Convergence Technology
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• 제23권5호
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• pp.248-253
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• 2014

Air Gap Membrane Distillation (AGMD) is one of several technologies that can be used to solve problems fresh water availability. AGMD exhibits several advantages, including low conductive heat loss and higher thermal efficiency, due to the presence of an air gap between the membrane and condensation wall. A previous study by Bhardwaj found that the condensation surface properties (materials and contact angle) affected the total collected fresh water in the solar distillation process. However, the process condition differences between solar distillation and AGMD might result in different condensation phenomena. In contrast, N. Miljkovic showed that a hydrophobic surface has higher condensation heat transfer. Moreover, to the best of our knowledge, there is no study that investigates the effect of condensation surface properties in AGMD to overall process performance (i.e. flux and thermal efficiency). Thus, in this study, we treated the AGMD condensation surface to make it hydrophobic or hydrophilic. The condensation surface could be made hydrophilic by immersing and boiling plate in deionized (DI) water, which caused the formation of hydrophilic aluminum hydroxide (AlOOH) nanostructures. Afterwards, the treated plate was coated using hexamethyldisiloxane (HMDSO) through plasma-enhanced chemical vapor deposition (PECVD). The result indicated that condensation surface properties do not affect the permeate flux or thermal efficiency significantly. In general, the permeate flux and thermal efficiency for the treated plates were lower than those of the non-treated plate (pristine). However, at a 1 mm and 3 mm air gap, the treated plate outperformed the non-treated plate (pristine) in terms of permeate flux. Therefore, although surface wettability effect was not significant, it still provided a little influence.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.183-189
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• 2007

대표적인 수은 발생원인 도시폐기물 소각로와 화력 발전소 등지에서 배출되는 원소수은($Hg^0$)은 산화수은($Hg^{2+}$) 및 입자상 수은($Hg^p$)과 달리 기존의 대기오염 방지시설로 제거하기 난해한 편이다. 그로 인해 원소수은의 효율적 제거에 대한 많은 연구가 진행중이며, 이 연구에서는 저온 플라즈마(non-thermal plasma)의 하나인 유전체 장벽 방전(dielectric barrier discharge: DBD) 공정을 이용하여 원소수은 산화에 관한 실험을 수행하였다. 실험 결과, 공기 상의 DBD 공정에서는 생성되는 산소 원자와 오존에 의해서 원소수은이 산화수은으로 전환됨을 알 수 있었으며, 원소수은의 산화율을 결정하는 주된 변수는 반응기에 주입되는 에너지 밀도임을 확인할 수 있었다.

• 산업식품공학
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• 제14권3호
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• pp.202-207
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• 2010

저온에서 미생물을 사멸시킬 수 있는 비열살균기술로 감압 플라즈마를 활용하고자 생성기체별 감압 플라즈마 특성을 비교하고 Escherichia coli 살균효과를 조사하였다. 1 Torr이하로 감압시킨 상태에서 공기, 산소, 질소를 350 mL/min으로 공급하며 플라즈마를 발생시킨 결과 아크발생 없이 균일한 플라즈마가 생성되었다. 감압 플라즈마에 의한 온도 상승은 5분 처리 시 ${10^{\circ}C}$ 내외, 10분 처리 시 ${25^{\circ}C}$ 미만이었으며, 기체 종류별로는 공기, 산소, 질소 순으로 상승도가 낮았다. 감압 플라즈마 5분간 처리로 E. coli는 5 log 이상 감소하였으며, 이후 감소율이 둔화되어 10분간 처리 후 6-7 log 정도의 감소를 보였다. 감압 플라즈마에 의한 E. coli 살균패턴은 살균속도가 높은 초기와 낮은 후기로 구분되는 2단계 1차 반응으로 확인되었으며, 초기 살균속도상수($k_{1}$)는 공기, 산소, 질소 순으로 감소하였다. 감압 공기플라즈마 살균의 작은 D값 또한 식품 표면의 오염도를 낮추기 위한 비열살균기술로서의 가능성을 제시하였다.

• 한국대기환경학회지
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• 제19권3호
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• pp.315-323
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• 2003

The goal of this study if the optimization of discharge electrode for pulsed corona discharge reactor located in thermal power plant. For this purpose, we have performed experiments of NO$_{x}$ removal rate by exchange of discharge electrode diameter and arrangement of discharge electrode in the non -thermal plasma reaction facility using a ethylene as additive. If the diameter and numbers of discharge electrode were larger, the NO$_{x}$ removal rate was higher. From these results, if we optimized the shape and installed numbers of discharge electrode at the pilot plant, we could increase the NO$_{x}$ removal rate with less amount of additive than current amount.mount.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2232-2237
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• 2007

Steam reforming and catalytic reforming of $CH_4$ conversion to produce synthesis gas require both high temperatures and high pressure. Non-thermal plasma is considered to be a promising technology for the hydrogen rich gas production from methane. In this study, three phase AC GlidArc plasma system was employed to investigate the effects of gas composition, gas flow rate, catalyst reactor temperature and applied electric power on the $CH_4$ and $H_2$ yield and the product distribution. The studied system consisted of three electrode and it connected AC generate power system different voltages. In this study, air was used for the partial oxidation of methane. The results showed that increasing gas flow rate, catalyst reactor temperature, or electric power enhanced $CH_4$ conversion and $H_2$ concentration. The reference conditions were found at a $O_2$/C molar ratio of 0.45, a feed flow rate of 4.9 ${\ell}$/min, and input power of 1kW for the maximum conversions of $CH_4$ with a high selectivity of $H_2$ and a low reactor energy density.

• The Journal of Advanced Prosthodontics
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• 제7권3호
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• pp.249-256
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• 2015

PURPOSE. The aim of this study was to evaluate the effects of atmospheric plasma (APL) versus conventional surface treatments on the adhesion of self-adhesive resin cement to Ti-6Al-4V alloy. MATERIALS AND METHODS. Sixty plates of machined titanium (Ti) discs were divided into five groups (n=12): 1) Untreated (CNT); 2) Sandblasted (SAB); 3) Tribochemically treated (ROC); 4) Tungsten CarbideBur (TCB); 5) APL treated (APL). SEM analysis and surface roughness (Ra) measurements were performed. Self-adhesive resin cement was bonded to the Ti surfaces and shear bond strength (SBS) tests, Ra and failure mode examinations were carried out. Data were analyzed by one-way analysis of variance and chi-squared test. RESULTS. The lowest SBS value was obtained with CNT and was significantly different from all other groups except for APL. The ROC showed the highest SBS and Ra values of all the groups. CONCLUSION. It was concluded that the effect of APL on SBS and Ra was not sufficient and it may not be a potential for promoting adhesion to titanium.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2000년도 제21회 KOSCO SYMPOSIUM 논문집
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• pp.33-46
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• 2000

In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of NO-$NO_2$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $NO_2$ etc.) successively produced by hydrocarbon decomposition form the primary path of NO-$NO_2$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient NO-$NO_2$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2000년도 제20회 KOSCO SYMPOSIUM 논문집
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• pp.178-188
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• 2000

In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of $NO-NO_{2}$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $HO_{2}$ etc.) successively produced by hydrocarbon decomposition form the primary path of $NO-NO_{2}$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient $NO-NO_{2}$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.