• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.54-57
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• 2001

We studied the characteristics of polishing pad, which can apply STI-CMP process for global planarization of multilevel interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was defected less than 2 on JRlll pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and devise yield.

• Bulletin of the Korean Chemical Society
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• v.23 no.5
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• pp.749-757
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• 2002

Chiral oxazolidin-2-one is easily prepared from D-mannitol and demonstrated to undergo highly diastereoselective alkylation reactions via lithium imide Z-enolates of its N-acyl derivatives to afford ${\alpha}-branched$ products. Evans syn and non-Evans sy n aldol products were also selectively obtained using this new auxiliary in high diastereomeric purity by simply changing the stoichiometry of TiCl4 and the nature of the amine base. Also, this new auxiliary is employed in diastereoselective Staudinger-type ${\beta}-lactam$ syntheses. Using 2-chloro-1-methylpyridinium iodide as the dehydrating agent, the reaction of auxiliary tethered acetic acid with trans imines gave the desired ${\beta}-lactams$ with cis-selectivity.

• IEMEK Journal of Embedded Systems and Applications
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• v.11 no.5
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• pp.299-304
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• 2016

As public interest in air quality and environment problem is increasing, many researches are being carried out the gas measurement system. Especially, Non-dispersive infrared (NDIR) measurements using Beer-Lambert gas sensing principle with very high selectivity and long life time are noted for reliable method. It is possible to detect various gases such as carbon dioxide (CO2), carbon monoxide (CO), and nitrogen dioxide (NO2), but many researches are mostly concentrated on CO2 sensor. The multi-gas measuring instrument is high price and unwieldy, therefore it is not suitable for wide area required numerous instrument. So we study the NDIR multi-gas measurement system for air quality based on wireless sensor network, and experiment the realized measurement system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.206-209
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• 2002

The fixed abrasive pad(FAP) has been introduced in chemical mechanical polishing(CMP) field recently. In comparison with the general CMP which uses the slurry including abrasives, FAP takes advantage of planarity. resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of $Al_2$O$_3$-FAP using hydrophilic polymers with swelling characteristic in water and explains the self.texturing phenomenon. It also focuses on the chemical effects on tungsten film and the FAP is evaluated on the removal rate as a function of chemicals such as oxidizer, catalyst, and acid. The removal rate is achieved up to 1000A1min as about 70 percents of the general one. In the future. the research has a plan of the advanced FAP and chemicals in tungsten CMP considering micro-scratch, life-time, and within wafer non-uniformity.

• Journal of Sensor Science and Technology
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• v.33 no.5
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• pp.255-258
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• 2024

Exhaled breath analysis has emerged as a non-invasive and cost-effective approach in medical diagnostics, particularly for detecting biomarkers such as acetone. This study presents the synthesis and characterization of Cr-doped ε-WO₃ spheres designed to improve gas-sensing performance. These spheres were synthesized via ultrasonic spray pyrolysis, resulting in a material with a complex composition exhibiting high sensitivity and selectivity towards acetone over ethanol (response ratio = 13.2 at 325℃). The enhanced acetone sensitivity of the Cr-doped WO₃ sensor is attributed to the strong interaction between the spontaneous electric dipole moment of ε-WO₃ and the significant dipole moment of acetone. This sensor can detect exhaled acetone, facilitating effective monitoring of a ketogenic diet.

• Membrane Journal
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• v.21 no.1
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• pp.62-71
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• 2011

Highly enriched oxygen is used in energy-efficient combustion due to decreased non-flammable nitrogen, while high purity nitrogen is used for explosion proof in the LNG ships and keeping the freshness of green stuffs. Membrane technology can be used in these $O_2$ and $N_2$ generation with low energy consumption. In this study, PES was used as a membrane material and 1-methyl-2-pyrollidone (NMP) and acetone were employed as a good solvent and nonsolvent addictive (swelling agent to PES), respectively. Dope solutions were prepared by changing the content of acetone (0, 6.5, 15, 25, 31.5 wt%) in 37 wt% PES solutions. Hollow fiber spinning was performed at 0~10 cm of air-gap distances for each dope solution. $O_2/N_2$ selectivity and permeability were investigated by comparing of hollow fibers coated or not by silicons. $O_2/N_2$ selectivity increased and permeance of $O_2$ and $N_2$ decreased with increasing air-gap height independently of acetone addictions. Optimized PES hollow fibers were obtained with 37/6.5/56.5 wt% PES/acetone/NMP dope solution and 10 cm air-gap, which showed 7.3 of $O_2/N_2$ selectivity and 4.3 GPU of $O_2$ permeability after silicon coating.

• Membrane Journal
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• v.13 no.4
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• pp.246-256
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• 2003

For the olefin recovery from polyolefin off-gas, the permeation behaviors of olefins and nitrogen were investigated through three kinds of PDMS membranes - cross-linked PDMS membranes, a polysiloxaneimide membrane, and oligo-PDMS modified PDMS membranes. Their pure gas permeabilities were measured as a function of operation temperature(-20 to $50^{\circ}C$) and pressure(1 to 25 atm) with ethylene($C_2\;H_4$), propylene($C_3\;H_6$), butylene($C_4\;H_8$), and nitrogen($N_2$) gases. The permeabilities of olefins and nitrogen highly depended upon the nature of PDMS membranes. Among these membranes, cross-linked PDMS membranes showed stable and high olefin/nitrogen selectivities over a wide operation pressure range and further study in various test conditions. Their permeability of olefin and nitrogen were governed by the condensation temperature(solubility selectivity) and plasticization, not the order of the size(diffusivity selectivity) of gases, which matched well with the general permeation behavior of rubbery polymeric membranes for condensable and non-condensable gases. With increasing feed pressure or decreasing feed temperature, the permeabilities of more condensible olefins increase highly, presumably due to high solubility and plasticization, but that of non-condensible nitrogen decreases slightly and thus, the selectivities of olefin/nitrogen increase highly.

• Membrane Journal
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• v.26 no.1
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• pp.76-85
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• 2016

Fabrication of polysulfone (PSf) hollow fiber membranes was investigated for the separation of $N_2/NF_3$ gas mixtures, which are emitted from the display and the semiconductor industries. A combination of the non-solvent induced phase separation (NIPS) and the vapor-induced phase separation (VIPS) technique was applied to develop high flux hollow fiber membranes. Thin polymer layers were further coated onto the surface of the hollow fiber membranes by using polydimethylsiloxiane (PDMS) or Teflon AF1600(R), which contributes to improve the $N_2/NF_3$ selectivity. The $N_2/NF_3$ separation performances of our PSf hollow fiber membranes were determined by the intrinsic properties of coating materials. Especially, the PSf hollow fiber membrane coated with Teflon AF 1600(R) exhibited a higher $N_2/NF_3$ selectivity (> 14) with a slightly lower $N_2$ permeance (4.5 GPU), as compared to the commercial PSf counterparts. This feature provides a good potential as a membrane structure to separate $N_2/NF_3$.

• Membrane Journal
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• v.17 no.4
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• pp.338-344
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• 2007

Electro-electrodialysis of hydriodic acid with HI molality of ca. 9.5 $mol/kg-H_2O$ was examined in the presence of iodine using a commercial cation exchange membrane, CMB, as a separator. For the increase of the selectivity of proton permeation, the membrane was radiation-treated by accelerated electron radiation. The membrane properties (area resistance, ion exchange capacity, water content) of the radiation-treated membranes were measured. The area resistance in 2 $mol/dm^3$ KCl solution, ion exchange capacity and water content of the radiation-treated membranes at each dose rate dad almost the same value as that of the non-treated membrane (original of CMB membrane). Electro-electrodialysis of hydriodic acid with HI molality of ca. 9.5 $mol/kg-H_2O$ was examined at $75^{\circ}C$ with 9.6 $A/dm^2$. The radiation-treated cation exchange membrane by accelerated electron radiation had higher selectivity of the proton permeation by cross-linking structure of polymer than that of the non-treated membrane.

• ETRI Journal
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• v.30 no.3
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• pp.383-393
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• 2008

The etching mechanism of $ZrO_2$ thin films and etch selectivity over some materials in both $BCl_3$/Ar and $BCl_3/CHF_3$/Ar plasmas are investigated using a combination of experimental and modeling methods. To obtain the data on plasma composition and fluxes of active species, global (0-dimensional) plasma models are developed with Langmuir probe diagnostics data. In $BCl_3$/Ar plasma, changes in gas mixing ratio result in non-linear changes of both densities and fluxes for Cl, $BCl_2$, and ${BCl_2}^+$. In this work, it is shown that the non-monotonic behavior of the $ZrO_2$ etch rate as a function of the $BCl_3$/Ar mixing ratio could be related to the ion-assisted etch mechanism and the ion-flux-limited etch regime. The addition of up to 33% $CHF_3$ to the $BCl_3$-rich $BCl_3$Ar plasma does not influence the $ZrO_2$ etch rate, but it non-monotonically changes the etch rates of both Si and $SiO_2$. The last effect can probably be associated with the corresponding behavior of the F atom density.