• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.735-740
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• 2001

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.

• 한국정밀공학회지
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• 제23권12호
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• pp.80-87
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• 2006

Seals are usually made from elastomer, a kind of rubber, and it has the non-linearity and hyper-elasticity. U-type seals are used to prevent the leakage of internal fluid sealed in hydraulic actuator because they have more excellent performance than O-rings or rectangular seals. As a core part of hydraulic actuator, U-type seal gives much effect on performance and reliability of actuator. This study considers an NBR U-type seal under high pressure of a hydraulic actuator, and provides its deformation, stress-strain characteristic and contact force using the non-linear finite element analysis. Analysis results are compared with the experimental ones performed by the self-developed testing equipment. Verification result shows that this study presents a good application process for the effective design of U-type seals under high operation pressure.

• 한국정밀공학회지
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• 제27권6호
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• pp.39-46
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• 2010

Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.