Preparation of SrBi$_{2}Ta_{2}O_{9}$ Ferroelectric Thin Films for Non-Volatile Memory by Sol-Gel Method
(Sol-Gel법에 의한 비휘발성 메모리용 SrBi$_{2}Ta_{2}O_{9}$ 강유전체 박막의 제작)
-
- Proceedings of the International Microelectronics And Packaging Society Conference
- /
- 1999.11a
- /
- pp.145-149
- /
- 1999