• 한국재료학회지
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• 제31권12호
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• pp.697-703
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• 2021

Aluminum nitride having a dense hexagonal structure is used as a high-temperature material because of its excellent heat resistance and high mechanical strength; its excellent piezoelectric properties are also attracting attention. The structure and residual stress of AlN thin films formed on glass substrate using TFT sputtering system are examined by XRD. The deposition conditions are nitrogen gas pressures of 1 × 10^-2, 6 × 10^-3, and 3 × 10^-3, substrate temperature of 523 K, and sputtering time of 120 min. The structure of the AlN thin film is columnar, having a c-axis, i.e., a <00·1> orientation, which is the normal direction of the glass substrate. An X-ray stress measurement method for crystalline thin films with orientation properties such as columnar structure is proposed and applied to the residual stress measurement of AlN thin films with orientation <00·1>. Strength of diffraction lines other than 00·2 diffraction is very weak. As a result of stress measurement using AlN powder sample as a comparative standard sample, tensile residual stress is obtained when the nitrogen gas pressure is low, but the gas pressure increases as the residual stress is shifts toward compression. At low gas pressure, the unit cell expands due to the incorporation of excess nitrogen atoms.

• 한국추진공학회지
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• 제21권2호
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• pp.41-47
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• 2017

모사추진제로 초저온 액체질소와 기체 질소를 사용하여 핀틀의 개도 및 모사추진제 공급 조건이 초저온 분무에 끼치는 영향을 정성적으로 연구하였다. 액체 공급압력을 고정하고, 핀틀의 개도와 기체 질소의 공급 압력을 변화시켜 실험을 진행하였다. 이미지 가시화는 CCD 카메라를 이용한 Shadowgraph 기법이 사용되었으며, 이미지 후처리를 통해 실험 조건에 따른 분무의 차이를 비교하였다. 액체 질소 단독 분사의 경우 개도가 늘어날 때, 분사속도가 줄어들고 챔버에서의 벤트 압력은 커져 액체질소 시트가 중앙으로 모이는 현상이 관측되었다. 액체질소/기체질소 분무의 경우 이미지 후처리를 통해 서로 실험 조건이 다르지만 Shadowgraph 이미지가 유사하게 나타나는 경우도 분석할 수 있음을 보였다.

• 한국전기전자재료학회논문지
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• 제15권6호
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• pp.551-557
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.

• Applied Science and Convergence Technology
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• 제24권5호
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• pp.132-135
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• 2015

Schematic of RAON vacuum system is introduced. Vacuum test for superconducting cavity with liquid nitrogen is performed. Schematic plan for RAON vacuum system is introduced and vacuum control system for superconducting cavity test is constructed. Vacuum pressure of cavity is shown as a function of pumping time. The temperature of cavity is shown as a function of cooling time. Outgassing species from cavity is also detected. Detailed experimental procedure is presented to test the cavity vacuum with liquid nitrogen.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.586-589
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• 2002

The Ultra Violet(UV) emission characteristics of Neon + Nitrogen gas-mixture discharge was investigated in AC plasma display panel. The firing voltage of Ne+$N_2$ gas-mixture discharge increased with increasing nitrogen concentration. The UV intensity emitted from the gas discharge also increased with increasing nitrogen concentration. The UV efficiency increase with increasing $N_2$ partial pressure at low $N_2$ concentration, and then UV efficiency is saturated at high $N_2$ concentration.

• 한국주조공학회지
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• 제4권4호
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• pp.30-33
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• 1984

Nitrogen solubility in liquid Fe and Fe-C alloys has been measured by the levitation melting method under 1 atm $N_2$ pressure. Experiments were carried out at the temperature range of $1774-2097^{\circ}K$ and carbon content of 0-5.06wt%. The nitrogen solubilities measured in pure Fe and Fe-C alloys were $log(wt%N)_{Fe}=-424/T-1.129$ and $log(wt%N)_{Fe-C}=-[424/T+1.129+(%C)/19.14{5447/T-0.612}+(%C)^2/19.14$ 2478/T-1.265].

• 한국초전도ㆍ저온공학회논문지
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• 제20권3호
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• pp.28-33
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• 2018

With the continuous performance improvement and commercialization of HTS wires, there have been many efforts to commercialize HTS power cables recently. Unlike conventional power cables, a cryogenic cooling system is required for a HTS power cable and a cryogenic pump is one of the essential components to circulate subcooled liquid nitrogen and cool the HTS power cable. Especially, the development of a reliable and high-efficiency cryogenic pump is an important issue for the commercialization of HTS power cables of several kilometers or more. In this study, we designed and fabricated a cryogenic pump for subcooled liquid nitrogen with a mass flow rate of 1.2 kg/s, a differential pressure of 5 bar, and evaluated the hydraulic performance of the pump. Impeller design was conducted to meet the target design performance with 1 D analysis model and CFD analysis. The pump performance parameters such as pressure heads, mass flow rates, and efficiencies in accordance with rotating speeds were assessed using a laboratory's performance evaluation system.

• 한국진공학회지
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• 제17권6호
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• pp.487-494
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• 2008

준 2차원 수치적 모델을 사용하여 침-평판(point-plane)형의 전극 사이에 있는 중간 압력 질소의 방전에 대한 시뮬레이션을 수행하였다. 이 모델에서는 전자와 이온에 대한 연속방정식을 풀어 시. 공간적으로 변하는 전하분포를 계산하고, 공간 전하 분포의 변화에 따라 결정되는 전기장은 푸아송 방정식을 풀어 얻는다. 연속 방정식은 FCT (Flux-corrected transport) 알고리즘과 FEM (Finite Element Method) 방법을 적용하여 수치적으로 다루어 졌다. 50Torr 압력에서의 질소 방전에 대한 시뮬레이션 결과는 중간 압력 질소 방전의 물리적 특성에 관한 상세한 이해를 제공한다. 또 계산 결과와 실험 결과[1]와의 비교는 정성적으로 잘 일치하는 것을 보여 준다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.469-473
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• 2009

The supersonic gas ejector, as gas dynamic appliance, has been applied for a long time because of simplicity and reliability. However, for the prediction of ejector performances with given parameters, that is, working gas pressure and the nozzle shape, it is necessary to raise accuracy of modelling for properties of ejector gas flow. The purpose of the represented work is to compare one-dimensional modelling and numerical results with experimental results. The ejector with a conic nozzle has been designed and tested (Mach number at the nozzle exit section was 3.31, the nozzle throat diameter - 6 mm). Working gas - nitrogen, was brought from system of gas bottles. Diameter of the mixture chamber at the nozzle exit section was limited by condensation temperature of nitrogen and equaled 20 mm. The one-dimensional theory predicted the minimal starting pressure equaled 8.18 bar (absolute) and 0.051 bar in the vacuum chamber. Accordingly the minimal starting pressure was 9.055 bar and 0.057 in the vacuum chamber bar have been fixed in experiment.

• 한국표면공학회지
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• 제29권5호
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• pp.498-504
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• 1996

The synthesis of carbon nitride thin films with high nitrgen concentration was accomplished by reactive supttering at relatively high working pressure. In conventional reactive sputter-deposition of carbon nitride films, working pressure was 0.3-5Pa and the ratio of nitrogen to carbon(N/C ratio) in the films was less than 0.5. In this study, amorphous carbon nitride films with the N/C ratio $\tickapprox$ 1.0 were prepared on Si(100). substrates at higher pressure, 20-60 Pa. Structural analyses with Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy revealed that the films prepared consisted of triazine-like plain network.