• 한국자기학회지
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• 제15권4호
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• pp.241-245
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• 2005

CoFeNi 합금은 HDD, MEMS 분야에서 head core 재료로 쓰이는 permalloy(FeNi)합금보다 뛰어난 우수한 자기적 특성을 가진 재료로써 최근 많이 연구되어지고 있다. CoFeNi 합금의 조성과 전기도금 시 전류조건에 따른 미세구조와 결정학적 특성이 자기 특성에 미치는 영향을 조사하였으며, 높은 포화자화와 낮은 보자력을 갖는 CoFeNi 삼원계 합금을 전기도금 방식으로 제조하는데 성공하였다. 포화자화 1.9 T, 보자력 0.16 A/m를 갖는 대표적인 CoFeNi film의 조성은 $Co_{30}\;Fe_{34}\;Ni_{36}(at\%)$이며, 미세결정립과 ffc-bcc 상의 혼재가 낮은 보자력을 갖는 요인임을 XRD, TEM의 결과로부터 확인 하였다.

• 한국전기전자재료학회논문지
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• 제16권2호
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• pp.138-143
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• 2003

A double spiral thin-film inductor with a NiFe magnetic core is integrated with DC-DC converter IC. The NiFe core is deposited on a polyimide film as the thinckness of NiFe is 2.5~3.5 ${\mu}$m. Then, copper conductor line is deposited on the NiFe core with double spiral structure. Process integration is performed by sequential processes of etching the polyimide film deposited both top and bottom of the NiFe core and electroplation copper conductor line from exposed metal pad of the DC-DC converter IC. Process integration is simplified by elimination planarization process for top core because the proposed thin-film inductor has a bottom NiFe core only. Inductor of the fabricated monolithic DC-DC converter IC is 0.53 ${\mu}$H when the area of converter IC and thin-film inductor are 5X5$\textrm{mm}^2$ and 3.5X2.5$\textrm{mm}^2$, respectively. The efficiency is 72% when input voltage and output voltage are 3.5 V and 6 V, respectively at the operation frequency of 8 MHz.

• 한국자기학회지
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• 제16권5호
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• pp.249-254
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• 2006

CoFeNi 합금은 HDD, MEMS 분야에서 head core 재료로 쓰이는 permalloy(FeNi)합금보다 뛰어난 우수한 자기적 특성을 가진 재료로써 최근 많이 연구되어지고 있다. 전기도금된 CoFeNi합금 박막의 열처리에 따른 미세구조 변화와 결정학적 특성이 자기특성에 미치는 영향을 조사하였다. 삼원계 합금을 열처리하면 전기도금 시 결정의 크기와 결정구조의 변화가 자기특성에 영향을 미친다. 이를 조사하여 열처리를 통하여 얻어지는 CoFeNi계 박막의 자기 특성을 향상시키고자 하였고, $300{\sim}400^{\circ}C$까지 열처리를 함으로써 보자력을 최소화하고 포화자화 값을 증가시켰다. 포화자화 값의 증가는 bcc상의 생성으로 야기되는 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.71-71
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• 2009

This paper describes a simple, on-chip CMOS compatible the thin-film inductor applied for the dc-dc converters. A fully CMOS-compatible thin-film inductor with a bottom NiFe core is integrated with the DC-DC converter circuit on the same chip. By eliminating ineffective top magnetic layer, very simple process integration was achieved. Fabricated monolithic thin film inductor showed fairly high inductance of 2.2 ${\mu}H$ and Q factor of 11.2 at 5MHz. When the DC-DC converter operated at $V_{in}=3.3V$ and 5MHz frequency, it showed output voltage $V_{out}=8.0V$, and corresponding power efficiency was 85%.

• 한국자기학회지
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• 제12권6호
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• pp.218-223
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• 2002

가슨 분무법으로 제조한 High-Flux형 $Ni_{x}Fe_{100-x}$(x=40~50, wt.%) 퍼멀로이 분말 및 압분 코아의 자기적 특성을 조사하였다. 포화자화는 45%Ni조성에서 최대 값을 보이며 이보다 보 함량이 낮아지면 인바 효과의 작용에 의해 급격하게 감소하였다. 압분 코아의 투자율은 Ni 농도가 낮아지면 현저히 증가하는 바 이는 자기변형의 감소에 기인하는 것으로 사료되었으며, 자심손실은 Ni=45%에서 가장 낮은 값을 나타내었다. Ni농도가 50%에서 45%로 낮아짐에 따라 자심손실이 감소하는 주원인은 전기 비저항의 증대에 따른 와전류 손실의 감소에 있는 것으로 생각되었다. Ni=45% 분말 합금으로 만든 압분 코아는 Ni=50%의 경우보다 더 우수한 투자율의 주파수 의존성, 큰 Q 값, 그리고 더 나은 직류 바이어스 특성을 나타내어 상용 High-Flux 코아(50%Ni-50%Fe)에 비해 더 좋은 압분 자심 재료가 될 수 있음을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권11호
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• pp.555-561
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• 2001

In this paper, the low power (1.5 W) solenoid-type magnetic thin-film transformers utilizing a $Ni_{81}Fe_{19)$ core material were designed and fabricated for 5 MHz-drive DC-DC converter application. The $20\mum$ thick copper films were used as the coils. The transformers fabricated in this work have the sizes of $3.08 mm\times25.5 mm\; and\; 6.15 mm\times12.75 mm.$ The optimum design of solenoid-type magnetic thin film transformers was performed utilizing the conventional equations, a Maxwell computer simulator (Ansoft HFSS V7.0 for PC), and parameters obtained from the magnetic properties of NiFe magnetic core materials. frequency characteristics of inductance, dc resistance (R), coupling factor (k) and gain of developed transformers were measured using HP4194A impedance and gain-phase analyzer. The fabricated transformers with the size of $6.15 mm\time12.75 mm$ exhibit the inductance of $0.83 \muH$, the dc resistance of $2.3\Omega$$\Omega$, the k of 0.91 and the gain of -1 dB at 5 MHz, which show the comparable results to those reported in the recent literatures. The measured high-frequency characteristics for the fabricated transformers agreed well with those obtained by theoretical calculations .

• ETRI Journal
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• 제25권4호
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• pp.270-273
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• 2003

This paper presents a simple process to integrate thin-film inductors with a bottom NiFe magnetic core. NiFe thin films with a thickness of 2 to 3${\mu}m$ were deposited by sputtering. A polyimide buffer layer and shadow mask were used to relax the stress of the NiFe films. The fabricated double spiral thin-film inductor showed an inductance of 0.49${\mu}H$ and a Q factor of 4.8 at 8 MHz. The DC-DC converter with the monolithically integrated thin-film inductor showed comparable performances to those with sandwiched magnetic layers. We simplified the integration process by eliminating the planarization process for the top magnetic core. The efficiency of the DC-DC converter with the monolithic thin-film inductor was 72% when the input voltage and output voltage were 3.5 V and 6 V, respectively, at an operating frequency of 8 MHz.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.225-225
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• 2010

In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The $Ni_{81}Fe_{19}$ (at%) alloy was selected as a high-frequency($\geq$ MHz) magnetic thin film core material and deposited on various substrates (bare Si, $SiO_2$ coated Si) using a high vacuum RF magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of solenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoft HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance ($Q{\geq}60$, $L\;=\;1{\mu}H$, efficiency${\geq}90%$), high-frequency (${\geq}5MHz$), and solenoid-type magnetic thin film inductors was designed successfully.

• Journal of Magnetics
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• 제16권4호
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• pp.435-439
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• 2011

In this work, we prepared Fe-Ni alloy nanopowders by wire electrical explosion in deionized water and ethanol. Particles size and morphology of the as-synthesized nanoparticles prepared in water and ethanol were observed by transmission electron microscopy. In both cases, the as-synthesized nanoparticles were in nearly spherical shape and their size distribution was broad. The particles prepared in the water were in core-shell structure due to the oxidation of Fe element. X-ray diffraction was used to analyze the phase of the nanopowders. It showed that the nanopowders prepared in water had ${\gamma}$-Fe-Ni solid solution and FeO phase. The samples obtained in ethanol were in two phases of Fe-Ni solid solution, ${\gamma}$-Fe-Ni and ${\alpha}$-Fe-Ni. Bulk samples were made from the as-synthesized nanopowders by spark plasma sintering at $1000^{\circ}C$ for 10 min. Structure of the bulk sample was observed by scanning electron microscope. Magnetic properties of the as-synthesized nanopowders and the bulk samples were investigated by vibrating sample magnetometer. The hysteresis loop of the assynthesized nanopowders and the sintered bulk samples revealed a ferromagnetic characteristic.

• 한국전기전자재료학회논문지
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• 제14권1호
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• pp.74-83
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• 2001

In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The Ni$\sub$81/Fe$\sub$19/ (at%) alloy was selected as a high-frequency($\geq$MHz) magnetic thin film magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of dolenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoftt HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance (Q$\geq$60, L = 1${\mu}$H, efficiency $\geq$90%), high-frequency ($\geq$5MHz), and solenoid-type magnetic thin film inductors was designed successfully.