Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Fully CMOS-compatible Process Integration of Thin film Inductor with a Sputtered Bottom NiFe Core

스퍼터링 방법으로 증착된 하층 NiFe 코어를 갖는 박막인덕터의 CMOS 집적화 공정

  • 박일용 (한국전자통신연구원 반도체?원천기술연구소) ;
  • 김상기 (한국전자통신연구원 반도체?원천기술연구소) ;
  • 구진근 (한국전자통신연구원 반도체?원천기술연구소) ;
  • 노태문 (한국전자통신연구원 반도체?원천기술연구소) ;
  • 이대우 (한국전자통신연구원 반도체?원천기술연구소) ;
  • 김종대 (한국전자통신연구원 반도체?원천기술연구소)
  • Published : 2003.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

A double spiral thin-film inductor with a NiFe magnetic core is integrated with DC-DC converter IC. The NiFe core is deposited on a polyimide film as the thinckness of NiFe is 2.5~3.5 ${\mu}$m. Then, copper conductor line is deposited on the NiFe core with double spiral structure. Process integration is performed by sequential processes of etching the polyimide film deposited both top and bottom of the NiFe core and electroplation copper conductor line from exposed metal pad of the DC-DC converter IC. Process integration is simplified by elimination planarization process for top core because the proposed thin-film inductor has a bottom NiFe core only. Inductor of the fabricated monolithic DC-DC converter IC is 0.53 ${\mu}$H when the area of converter IC and thin-film inductor are 5X5$\textrm{mm}^2$ and 3.5X2.5$\textrm{mm}^2$, respectively. The efficiency is 72% when input voltage and output voltage are 3.5 V and 6 V, respectively at the operation frequency of 8 MHz.

Keywords

References

  1. IEEE Trans. on Magnetics v.30 no.2 A magnetic thin film inductor and its application to a MHz switching dc de converter Toshiro Sato;Hiroshi Tomita;Atsuhito Sawabe;Tetsuo Inoue;Tetsuhiko Mizoguchi;Masashi Sahashi https://doi.org/10.1109/20.312261
  2. International Telecommunications Energy Conference 5 MHz switching micro DC DC converter using planar inductor T. Sato;T. Inoue;H. Tomita;K. Nishijima;Y. Tokai;M. Nameki;N. Saito;T. Mizoguchi
  3. IEEE Trans. on Power Electronics v.11 no.2 A comparison of two micromachined inductors (Bar and Meander-type) for fully integrated boost DC/DC power converters Chong H. Ahn;Mark G. Allen https://doi.org/10.1109/63.486171
  4. Power Electronics Specialists Conference High power density MHz switching monolithic DC-DC converter with thin film inductor Yasushi Katayama;Satoshi Sugahara;Haruo Nakazawa;Masaharu Edo
  5. IEEE Trans. on Magnetics v.35 no.5 Fabrication of double rectangular type FeTaN film inductors Dong-Hoon Shin;Chung-Sik Kim;Jong-Han Jeong;Seoung-Eui Nam;Hyoung June Kim https://doi.org/10.1109/20.800573
  6. 전기전자재료학회논문지 v.13 no.10 솔레노이드 RF 칩 인덕터에 대한 연구 김재욱;윤의중;정영창;홍철호
  7. 전기전자재료학회논문지 v.15 no.2 자성 박막의 습식 식각 특성 변요한;정지원 https://doi.org/10.4313/JKEM.2002.15.2.105