• 제목/요약/키워드: Ni master

검색결과 33건 처리시간 0.03초

LIGA 공정을 이용한 평면형 광소자용 Ni 마스터 제작 (Fabrication of Ni master for the replication of planar optical devices by LIGA process)

  • 김진태;정명영
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.945-949
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    • 2003
  • LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

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50nm급 패턴 니켈 스탬퍼 제작에 관한 연구 (A Study on the Fabrication of Ni Stamper for 50nm Class of Patterns)

  • 유영은;오승훈;이관희;김선경;윤재성;최두선
    • 한국금형공학회:학술대회논문집
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    • 한국금형공학회 2008년도 하계 학술대회
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    • pp.35-38
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    • 2008
  • A pattern master and a Ni stamper for 50nm class of patterns are fabricated through e-beam lithography and Ni electroforming process. A model pattern set is designed, which is based on unit patterns of 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The e-beam process is optimized to fabricate designed patterns with some parameters including dose, accelerating voltage, focal distance and developing time. For Ni electroforming to fabricate Ni stamper, a seed layer, a conducting layer, is deposited first on the pattern master fabricated by an e-beam lithography process. Ni, Ti/Ni and Cr are first tested to find optimal seed layer process. Currently the best result is obtained when adopting Cr deposited to be 100nm thick with continuous tilting motion of the master substrate during the deposition process.

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마이크로몰딩의 이형성 향상을 위한 소수성 Self-assembled Monolayer(SAM) 코팅 (Hydrophobic Self-assembled Monolayer(SAM) Coating for Enhanced Demolding Performance in Micromolding)

  • 박상하;한승오;박종연;문성욱;박정호
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제51권4호
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    • pp.175-183
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    • 2002
  • In this paper, the surface modification effect of self-assembled monolayer(SAM) of 1-dodecanethiol [$CH_3$($CH_2$)$_{11}$SH] used as an anti-adhesive film in micromolding process was studied. Monolayers of 1-dodecanethiol[$CH_3$(CH$_2$)$_{11}$SH] were obtained by immersing a metal place in pure 1-dodecanethiol. SAM film on the nickel plate has been examined by using X-ray photoelectron spectroscopy(XPS). The focus has been placed on S-Ni bonding. From the XPS analysis, sulfur atoms were detected from the SAM film as a chemical composition of S-Ni. In order to measure an adhesion force of the SAM-coated nickel surface, atomic force microscopy(AFM) was used in force-distance mode, which whows the micro-adhesive force on solid surface. It was shown that adhesion forces measured from the SAM-coated nickel surface and the Ni surface without SAM coating were 3.52nN and 5.32nN, respectively. In order to investigate the effect of SAM coating on the surface foughness the replica in demolding process, hot embossing experiments were performed using a SAM-coated nickel master and a nickel master without SAM coating. Surface roughness of replica from the SAM-coated master showed 25nm and that of replica from master without SAM coating was 35nm. The smoother surface roughness of the replica from the SAM-coated, master is believed to result from reduction in the adhesion forces.ces.

백색금 합금용 모합금의 실리콘 함량에 따른 물성변화 (Properties of the Master Alloys for White Gold Products with Silicon Contents)

  • 송정호;노윤영;이현우;최민경;송오성
    • 한국재료학회지
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    • 제25권2호
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    • pp.90-94
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    • 2015
  • We prepared 8 samples of non-silver and silver-added master alloys containing silicon to confirm the existence of nickel-silicides. We then prepared products made of 14K and 18K white gold by using the prepared master alloys containing 0.25, 0.35, and 0.50 wt% silicon to check for nickel release. We then employed the EN 1811 testing standard to investigate the nickel release of the white gold products, and we also confirmed the color of the white gold products with an UV-VIS-NIR-color meter. We observed $NiSi_x$ residue in all master alloys containing more than 0.50 wt% Si with EDS-nitric acid etching. For the white gold products, we could not confirm the existence of $NiSi_x$ through XRD after aqua-regia etching. In the EN 1811 test, only the white gold products with 0.25 wt% silicon master alloys successfully passed the nickel release regulations. Moreover, we confirmed that our white gold products showed excellent Lab indices as compared to those of commercial white gold ones, and the silver-added master alloys offered a larger L index. Our results indicate that employing 0.25 wt% silicon master alloys might be suitable for white gold products without nickel-silicide defects and nickel release problems.

레진모형 근관에서 Ni-Ti 파일로 근관성형 후 거타퍼챠콘의 근관내 삽입깊이에 대한 연구 (A STUDY OF INSERTION DEPTH OF GUTTA PERCHA CONES AFTER SHAPING BY NI-TI ROTARY FILES IN SIMULATED CANALS)

  • 조현구;황윤찬;황인남;오원만
    • Restorative Dentistry and Endodontics
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    • 제32권6호
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    • pp.550-558
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    • 2007
  • 본 연구는 레진모형 만곡근관에서 여러 가지 엔진구동형 Ni-Ti 파일로 근관성형 후, 같은 경사도를 가진 수종의 거타퍼챠콘을 적용시 근관내 삽입깊이에 대해 비교, 분석해보고자 시행하였다. 레진 모형근관으로 J자의 근관형태가 재현된 ENDO-TRAINING BLOCK 50개를 사용하여 각각 10개씩 1) ProFile .04 taper #25, 2) ProFile .06 taper #25, 3) ProTaper F2, 4) HEROShaper .04 taper #25, 5) HEROShaper .06 taper #25 파일로 최종 근관성형 하였다. 거타퍼챠콘은 META (META Biomed, Korea), Sure-Endo(SUREDENT, Korea) 그리고 DiaDent(DiaDent Group International Inc., Canada)의 .04 및 .06 경사도의 콘을 사용하였으며 선택된 거타퍼챠콘의 직경 및 경사도를 측정하였다. ProFile과 HEROShaper로 성형한 레진블록에는사용된 Ni-Ti 파일의 경사도에 맞는 제조회사별 .04및 .06경사도의 거타퍼챠콘을 10개씩 근관에 적용하였으며, ProTaper로 성형한 레진블록에는 경사도와 무관하게 제조회사별 .04 및 .06 경사도의 거타퍼챠콘을 10개씩 적용하였다. 거타퍼챠콘을 근관내 적용한 상태에서 스캐너를 이용하여 이미지를 얻은 후 이미지 분석 프로그램을 사용하여 근첨에서 거타퍼챠콘 첨부까지의 거리를 측정하였고 다음의 결과를 얻었다. HEROShaper를 이용하여 근관성형 한 경우 ProFile 및 ProTaper보다 거타퍼챠콘의 근관내 적합성이 우수하게 나타났으며, 근관성형시 .04 taper HEROShaper로 근관성형 후에는 META 거타퍼챠콘 및 Sure-Endo 거타퍼챠콘을, .06 taper HEROShaper로 근관성형 후에는 DiaDent 거타퍼챠콘을 마스터콘으로 사용시 근관내 적합성이 우수하게 나타났다. 따라서 근관성형 후 사용한 Ni-Ti 파일과 같은 경사도를 가진 거타퍼챠콘이 근관에 알맞게 위치되는 것은 아니며 근관충전시 적절한 마스터콘의 선택이 필요함을 시사한다.

금속 몰드와 전기도금을 이용한 금속 메쉬 제조 (Fabrication of metal mesh sheets using metal mold and electoplating)

  • 이주열;이상열;김만
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.171-171
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    • 2016
  • Metal mesh는 ITO를 대체한 물질의 85%를 차지하는 신소재로서 저비용 고전도도를 갖고 있어 그 활용도가 높으며, Metal mesh를 활용한 투명 LED 디스플레이는 기존 ITO 투명 디스플레이보다 유지보수가 용이하고, 자원절약뿐만 아니라 경제적이다. 따라서 본 연구는 Metal mesh가 경제적인 활용 및 시장 확대가 가능할 수 있도록 연구하는데 목적이 있다. 본 연구는 Metal mesh를 공정 상 더 쉽게 생산 가능하게 하는 Metal master를 제작하였다. 마스터의 제작 시 문제가 되는 경도를 해결하기 위해 도금액을 개발하여 적용시켰고 노광시간, 선폭, 현상시간의 조절을 통해 상호간의 영향 관계를 규명하고 최적조건을 찾아 Photolithography공정에 적용하였다. 또한 미세패턴 형성의 최적조건을 찾고 니켈 전기도금을 진행하였다. Metal mesh의 문제점인 Visibility, Moire 현상을 해결하기 위해 Metal master의 선폭을 $2.5{\mu}m$까지 낮췄으며, 그 결과, 선폭 $2.5{\mu}m$, 깊이 $8{\mu}m$, 두께 $100{\mu}m$의 Ni master를 제작하였다. 이 마스터를 이용하여 도금부터 전사하는 단계까지 도금공정의 전반적인 내용을 다루었다.

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Ni-Mo-Cr계 저합금강의 천이온도영역에서의 파괴인성에 미치는 Ni 및 Cr 함량의 영향 (Effects of Ni and Cr Contents on the Fracture Toughness of Ni-Mo-Cr Low Alloy Steels in the Transition Temperature Region)

  • 이기형;박상규;김민철;이봉상;위당문
    • 대한금속재료학회지
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    • 제47권9호
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    • pp.533-541
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    • 2009
  • Materials used for a reactor pressure vessel(RPV) are required high strength and toughness, which determine the safety margin and life of a reactor. Ni-Mo-Cr low alloy steel shows better mechanical properties than existing RPV steels due to higher Ni and Cr contents compared to the existing RPV steels. The present study focuses on effects of Ni, Cr contents on the cleavage fracture toughness of Ni-Mo-Cr low alloy steels in the transition temperature region. The fracture toughness was characterized by a 3-point bend test of precracked Charpy V-notch(PCVN) specimens based on ASTM E1921-08. The test results indicated that the fracture toughness was considerably improved with an increase of Ni and Cr contents. Especially, control of Cr content was more effective in improving fracture toughness than manipulating Ni content, though Charpy impact toughness was changed more extensively by adjusting Ni content. These differences between changes in the fracture toughness and that in the impact toughness were derived from microstructural features, such as martensite lath size and carbide precipitation behavior.

Hot Embossing기술을 이용한 병렬 광접속용 고분자 광도파로 제작 (Fabrication of polymeric optical waveguides for parallel optical interconnection using hot embossing technique)

  • 최춘기;김병철;한상필;안승호;정명영
    • 한국광학회지
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    • 제13권3호
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    • pp.223-227
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    • 2002
  • 병렬 광접속용 다중모드 고분자 광도파로를 제작하였으며, 도파로 구조는 LIGA 공정에 의해 제작된 니켈 성형 마스터에 의해 hot embossing기술을 이용하여 성형하였다. 도파로 크기가 48$\times$47$\mu\textrm{m}$$^{2}$인 다중모드 광도파로를 단순 2단계 공정에 의해 제작하였으며, 0.85$\mu\textrm{m}$과 1.3$\mu\textrm{m}$ 파장대역에서 측정한 다중모드 광도파로의 도파손실은 각각 0.38dB/cm와 0.66dB/cm이었다.

벌크 비정질 Zr-Ti-Cu-Ni-Be 합금의 고온 소성 변형 특성 (High Temperature Plastic Deformation Behaviors of the Bulk Metallic Glass Zr-Ti-Cu-Ni-Be Alloy)

  • 이광석;하태권;안상호;장영원
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2001년도 추계학술대회 논문집
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    • pp.272-276
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    • 2001
  • Multicomponent $Zr_{41.2}Ti_{13.8}Cu_{12.5}Ni_{10}Be_{22.5}$ bulk matallic glass alloy shows good bulk glass forming ability due to its high resistance to crystallization in the undercooled liquid state.1) In this study, DSC and X-ray diffractometry have been performed to confirm the amorphous structure of the master $Zr_{41.2}Ti_{13.8}Cu_{12.5}Ni_{10}Be_{22.5}$ alloy. To investigate the mechanical properties and deformation behaviors of the bulk metallic $Zr_{41.2}Ti_{13.8}Cu_{12.5}Ni_{10}Be_{22.5}$ alloy, a series of compression tests has been carried out at the temperatures ranging from $351^{\circ}C$ to $461^{\circ}C$ and at the various initial strain rates from $2{\times}10^{-4}s^{-1}\;to\;2{\times}10^{-2}s^{-1}$. There are two types of nominal stress-strain curves. The one shows linear stress-strain relationship meaning fracture at maximum stress, the other shows plastic deformation including steady-state flow. Also DSC analysis for the compressed specimens has been performed to investigate the change of thermal stability and crystallization behavior for the various test conditions.

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