Improvement of characteristics and dependence on underlayer substrate temperature of CoCrTa/Ti double layer (CoCrTa/Ti 이층막의 하지층기판온도의존성 및 특성개선)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2000.11a
- /
- pp.492-495
- /
- 2000