• 제목/요약/키워드: Negative ion

검색결과 579건 처리시간 0.034초

이온 플레이팅에서 기판 BIAS 전위와 이온 에너지 분포와의 상관관계 연구 (A Study on the Relationships between Substrate Bias Potential and Ion Energy Distributions)

  • 성열문;신중홍;손제봉;조정수;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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    • pp.472-474
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    • 1995
  • A Sputter ion Plating(SIP) system with a r.f. coil electrode and the Facing Target Sputter(FTS) source was designed for high-quality thin film formation. The rf discharge was combined with DC facing target sputtering in order to enhance ionization degree of a sputtered atoms. The energy of ions incident on the substrate depended on the health potential of DC biased substrate. The mean impact ion energy increased with negative bias voltage and rf power. The adhesive force of the TiN film formed was in the range of 30$\sim$50N, and markedly influenced by substrate bias voltage.

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Deposition and characterization of compositional gradient CrNx coatings prepared by arc ion plating

  • Zhang, Min;Kim, Kwang-Ho
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 춘계학술대회 논문집
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    • pp.177-181
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    • 2009
  • Compositional gradient CrNx coatings were fabricated using arc ion plating in Ar/$N_2$ gaseous mixture by gradually increasing $N_2$ flux rate from 0 to 120 SCCM. The effect of negative substrate bias on the film microstructure and mechanical properties were systematically investigated with XRD, GDOES, and SEM. The results show that substrate bias has an important influence on film growth and microstructure of gradient CrNx coatings. The coatings mainly crystallized in the mixture of hexagonal $Cr_{2}N$ and fcc CrN phases. By increasing substrate bias, film microstructure evolved from an apparent columnar structure to an equiaxed one. With increasing substrate bias, deposition rate first increased, and then decreased. The maximum of deposition rate was 15 nm/min obtained at a bias of -50V.

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리튬 이온 커패시터에서 마이크로파 조사에 의한 팽창 흑연의 전기화학적 특성 (Electrochemical Characteristics of Expanded Graphite by Microwave Irradiation in Lithium Ion Battery)

  • Seol, Sun-hwa;Park, Soo-gil;KIM, Han-Ju;Kim, Hong-il
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2014년도 추계학술대회 논문집
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    • pp.167-167
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    • 2014
  • Graphite is used as a negative electrode active material of Lithium ion capacitor (LIC). At the cathod, electrostatic reaction of EDLC is a very high reaction rate compared to a oxidaion reduction reaction. When the graphite was expanded that the length between the sheet, the intercalation of lithium ions is smoothed. And thus, the power density increases. By measuring the XRD, it was confirmed that the increase in interlayer spacing of graphite. And by measuring an electrochemical reactionin Lithium Ion Battery (LIB), it was confirmed the tendency of power density is improved.

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Polarization Behavior of Li4Ti5O12 Negative Electrode for Lithiumion Batteries

  • Ryu, Ji-Heon
    • Journal of Electrochemical Science and Technology
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    • 제2권3호
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    • pp.136-142
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    • 2011
  • $Li_4Ti_5O_{12}$ is prepared through a solid-state reaction between $Li_2CO_3$ and anatase $TiO_2$ for applications in lithium-ion batteries. The rate capability is measured and the electrode polarization is analyzed through the galvanostatic intermittent titration technique (GITT). The rate characteristics and electrode polarization are highly sensitive to the amount of carbon loading. Polarization of the $Li_4Ti_5O_{12}$ electrode continuously increases as the reaction proceeds in both the charge and discharge processes. This relation indicates that both electron conduction and lithium diffusion are significant factors in the polarization of the electrode. The transition metal (Cu, Ni, Fe) ion added during the synthesis of $Li_4Ti_5O_{12}$ for improving the electrical conductivity also greatly enhances the rate capability.

$SF_6$ 가스 방전 특성의 유한요소해석 (A finite Element Analysis on the discharge characteristics of $SF_6$ gas)

  • 최승길;심재학;강형부
    • 한국전기전자재료학회논문지
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    • 제13권3호
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    • pp.265-272
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    • 2000
  • In this paper the corona discharge in SF$_{6}$ gas used as insulating material in lots o high voltage equipment, is simulated by finite element method with Flux-Corrected Transport(FCT) method. By application of proposed method the negative corona discharge characteristics in needle to plane electrode is analyzed with time step. For the accuracy of analysis the secondary electron emission by photon and ion are also considered as well as the accuracy of analysis the secondary electron emission by photon and ion are also considered as well as townsend first ionization and electron attachment. The calculated results show that the electric field intensity between anode and ion group is decreased as times go-by according to field distortion by those space charge. Accordingly the electron density is decreased strongly by the attatchment effect of SF6 gas so that the corona discharge becomes extinguished abruptly.y.

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Study of silicon deep via etching mechanism using in-situ temperature monitoring of silicon exposed to $SF_6/O_2$ plasma discharge

  • 임영대;이승환;유원종;정오진;이한춘
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 추계학술대회 초록집
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    • pp.116-117
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    • 2009
  • 식각 공정변화 즉 상부 ICP 파워, 반응기 압력, 실리콘 기판 온도변화에 따른 실리콘 딥 비어 (deep via) 의 형상 변화 메커니즘을 연구하였다. 메커니즘을 연구하기 위해 $SF_6/O_2$ 플라즈마에 노출된 실리콘 기판의 공정변화에 따른 표면 온도변화를 실시간으로 측정하여 플라즈마 내 positive ions의 거동을 분석하였다. 실리콘 기판의 표면온도를 상승시키는 주된 요인은 positive ions임을 확인할 수 있었으며 이는 기판에 적용된 negative voltage로 인하여 나타난 이온포격이 그 원인임을 알 수 있었다. 상대적으로 radical은 실리콘 표면온도 상승에 큰 역할을 하지 못하였다. 기판 표면온도가 상승 할수록 실리콘 딥 비어 구조에 undercut, local bowing과 같은 측벽 식각이 활성화됨을 확인할 수 있었으며 이는 기판에 들어오는 positive ions가 측벽식각을 유도하는 것으로 해석할 수 있었다.

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Electrochemical Studies on Ion Recognition of Alkali Metal Cations by 18-crown-6 in Methanol

  • Chi-Woo Lee;Chang-Hyeong Lee;Doo-Soon Shin;Si-Joong Kim
    • Bulletin of the Korean Chemical Society
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    • 제12권5호
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    • pp.487-490
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    • 1991
  • Electrochemical studies of alkali metal cations $(Na^+, K^+, Rb^+, Cs^+)$ were performed in methanolic solutions of 18-crown-6 and tetrabutylammonium salts at dropping mercury electrodes (DME) and thin mercury film electrodes (TMFE). All the cations investigated were reduced reversibly at DME in the absence and presence of 18-crown-6, and in the latter the limiting currents were decreased and the reduction potentials shifted to the negative direction. The reduction potentials of the metal ions (0.2 mM) in the presence of the crown (10 mM) were - 2.14 $(Na^+)$, - 2.26 $(K^+)$, - 2.20 $(Rb^+) and - 2.14 $(Cs^+)$ V vs. SCE, respectively. The measured potentials were rationalized with ion recognition of the cations by the crown. Electroreduction at TMFE were highly irreversible. A new representation method of ion recognition is presented. In aqueous solutions, electroreduction of the alkali metal ions were characterized by adsorption.

형석단결정의 내부결함 및 그 영향에 관한 연구 (Astudy of internal defects and their effects in $CaF_2$ single crystals)

  • 서수형;주경;오근호
    • 한국결정성장학회지
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    • 제8권3호
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    • pp.419-423
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    • 1998
  • 형석$(CaF_2)$ 단결정 내부에 형성되는 다양한 결함에 대하여 현미경관찰, 성분분석 및 투과율분석을 하고 광투과에 미치는 영향을 고찰하였다. 내부 cavity의 종류로는 bubble과 결정면을 포함하는 공공형태의 negative crystals이 있으며, 특히 negative crystals이 결정에 고루 퍼져있는 경우, UV-Visible 파장영역에서 약 3%의 투과율 저하현상이 나타났다. 또한, 결정내부의 석출물은 주로 내부 cavite에 형성됨을 WDX 분석을 통하여 확인할 수 있었다. Violet colored 결정은 non-colored 결정에 비하여 전위밀도가 3배 정도 높았고, 성분분석 F이온이 적은 Ca와 F의 원자비가 나타내었다. 이러한 결과로 F이온의 부족으로 인하여 형성된 violet 색상이 발생되었음을 간접적으로 알 수 있었다.

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銅이온이 참개구리 幼生의 成長에 미치는 影響 (Influence of Cu(II) on the Growth of Korean Tadpole, Rana nigromaculata)

  • Park, Sang Ock;Sang Gi Kim;Soo Yeul Cho
    • The Korean Journal of Ecology
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    • 제7권4호
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    • pp.232-238
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    • 1984
  • The author hatched the eggs of Korean frog, Rana nigromaculata in natural water, and reared the tadpoles in natural water as control group and in seven copper ion groups contaminated by 0.1, 0.2, 0.3, 0.4, 0.5, 0.7, and 1.0 ppm of copper ion. The influences of copper ion on the growth of the tadpoles were analyzed, and the results were summarized as follows: 1) The copper ion inhibited the growth of the tadpole. 2) The tadpoles were not survived for 20 days in the copper ion of 0.4~0.5ppm, and in the 0.7ppm, the tadpoles were not survived for 1 day after hatch. 3) The critical lethal concentration of Korean tadpole is regarded as 0.6ppm of copper ion. 4) The growth of head with and body length show a convexin increase pattern. 5) In the growth quantity of head width and body length, that of natural water shows the most rapid increase pattern, and that of the copper ion groups 0.1, 0.2, and 0.3ppm follows in that order. 6) The coefficient of relative growth($\alpha$) of control group is the greatest value, and that of the copper ion groups of 0.1, 0.2, and 0.3ppm follows in that order. The natural water shows the positive allometry, the contaminated groups shows the negative allometry in the relative growth of the contaminated groups to the natural water. 7) Body length shows positive allometry in the relative growth to head width.

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산성이온수 농도제어를 위한 Microprocessor를 이용한 PWM 제어 (The PWM Control Which used Microprocessor for Intensity Control of Acid Ion Water)

  • 권윤중;남상엽
    • 전자공학회논문지
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    • 제50권7호
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    • pp.269-274
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    • 2013
  • 전해 산성이온수는 알칼리성 이온수에 비해 응용분야가 음용을 목적으로 하는 알칼리이온수와 많이 다르게 이용되고 있으며 ph 농도에 따라 강산성인 경우 잔류염소에 의한 살균 목적의 소독제로 사용되고, 중산성인 경우 세척과 세안으로 사용하고, 약산성인 경우 식재료와 혼합하여 요리에 널리 사용할 수 있다. 이런 산성이온수를 생성하기 위해서는 물을 전기분해 하여 사용하는데 전기분해 하는 과정에서 염소가스와 수산화나트륨 등의 물질로 살균력을 가지며, 전기분해시 +전극 쪽으로 -이온을 띤 염소, 인, 유황 등의 유기물이 모여져 산성이온수를 만든다. 또한 산성수와 알칼리수를 분리하기 위해서 격막을 사용했다. ph 농도변화의 구현방법은 Microprocessor를 이용하여 강산성에서 약산성 사이의 ph 농도를 PWM(pulse width modulation) 제어로 3종류의 PWM 전압을 전해조 전극에 인가하여 PWM제어에 의한 연속적으로 농도가 조절된 산성수가 생성되게 구현하였다.