• 제목/요약/키워드: NbC

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고밀도 플라즈마 식각에 의한 CoTb과 CoZrNb 박막의 식각 특성 (Etch Characteristics of CoTb and CoZrNb Thin Films by High Density Plasma Etching)

  • 신별;박익현;정지원
    • Korean Chemical Engineering Research
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    • 제43권4호
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    • pp.531-536
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    • 2005
  • 포토리지스트 마스크로 패턴된 CoTb 및 CoZrNb 자성 박막에 대한 유도 결합 플라즈마 반응성 이온 식각이 $Cl_2/Ar$$C_2F_6/Ar$ 가스를 이용하여 진행되었고 식각 속도와 식각 프로파일 측면에서 조사되었다. $Cl_2$$C_2F_6$ 가스의 농도가 증가함에 따라서 자성 박막들의 식각 속도는 감소하였고 식각 경사는 낮아졌다. 자성 박막들의 식각 가스로서 $Cl_2/Ar$이 빠른 식각 속도와 가파른 식각 경사를 얻는데 있어서 $C_2F_6/Ar$ 보다 더 효과적이었다. Coil rf power의 증가는 플라즈마 내의 Ar 이온과 라디칼의 밀도를 증가시키고 dc bias voltage의 증가는 기판으로 스퍼터되는 Ar 이온의 에너지를 증가시키기 때문에 coil rf power와 dc bias voltage가 증가할수록 식각 속도와 식각 경사는 증가하였지만 패턴의 측면에서 재증착이 일어났다. 자성 박막들의 적층으로 형성된 magnetic tunnel junction stack에 고밀도 플라즈마 반응성 이온 식각을 적용하여, 높은 식각 경사와 재증착이 없는 깨끗한 식각 프로파일을 얻었다.

Development of Optical Signal Transmission for the KSTAR Project Pertaining to Instrumentation and Control of the Neutral Beam Test Stand at KAERI

  • Jung, Ki-Sok;Oh, Byung-Hoon
    • KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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    • 제5B권3호
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    • pp.289-295
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    • 2005
  • Instrumentation and Control (I&C) of the Neutral Beam Test Stand (NB- TS) Facility at the Korea Atomic Energy Research Institute (KAERI) for the Korea Superconducting Tokamak Advanced Research (KSTAR) project has been underway since the start of the project to answer the diverse requests arising from the various facets of the development and construction phases of the project. Optical signal transmission constitutes a significant portion of I&C works and has been performed for the entirety of the project. During the NB- TS construction and related experiments, significant achievements to a more accurate as well as more refined optical signal transmissions have been made. Examples of those I&C works that utilized the optical signal transmission are the Langmuir probe signal transmission, gradient grid current signal transmission, gas flow control and signal transmission, ion source temperature measurement, beam line component temperature monitoring, and coolant flow signal transmission, etc. These optical signal transition provisions are now performing part of the indispensable functions for the proper operation of the NB- TS facility. Attained experience and expertise are expected to be well applied to the upcoming main neutral beam injection (NBI) system construction for the KSTAR project.

연주롤용 육성용접 재료의 고온마모 및 부식특성에 미치는 Nb, V의 영향 (The Effects of Nb, V on the High Temperature Wear and Corrosion of the Overlaying Materials for Continuous Casting Rolls)

  • 김창규;황동수;윤재홍;강창룡;곽희환
    • 동력기계공학회지
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    • 제8권3호
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    • pp.30-35
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    • 2004
  • In the steel making industries, the continuous casting process has been applied to the number of company because of its economical benefit. Casting rolls are utilized for frictional drive and transport of solidifying slap. Dimensional tolerances, mechanical stability and surface condition of the cast roll can affect both the surface and internal quality of the product being cast. To overcome these problems, the industry is accelerating on the rate of technology improvements. Samples were overlaid on the S45C steel by submerged arc welding process. And the hardness, wear, electrochemical corrosion and oxidation tests were carried out. Test results were that all these materials were satisfying basic requirements of caster rolls. By these results, the addition of 0.1%Nb and 0.15%V increase mechanical properties and tempering resistance by its superior carbide forming characteristics in low carbon $12{\sim}13%Cr$ martensitic stainless steels.

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Cr이 첨가된 BiNbO$_4$유전체 세라믹스의 유전 특성 (The Dielectric Properties of the Cr added BiNbO$_4$Ceramics)

  • 심규진;박정흠;윤광희;윤현상;박용욱;박창엽
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.14-17
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    • 1995
  • In this study, fur the use of portable communication multilayer devices. 0.15wt% V$_2$O$\_$5/ added BiNbO$_4$which is low-fire microwave dielectric ceramic as able to co-fire with high conductors was made into specimens with the additions of Cr$_2$O$_3$0.04, 0.2, 0.4, 0.8, 1.2wt%. These specimens were sintered at 930, 960. 990, 1030$^{\circ}C$ respectively to make the microwave dielectric resonators. These resonators were investigated by measuring the structure and dielectric properties. The density of the specimens was increased by the amounts of the Cr$_2$O$_3$and increased by increasing the temperature. 0.8wt% Cr$_2$O$_3$added and sintered at 960$^{\circ}C$ specimen skewed 49 dielectric constant. Q$.$f values were increased by the amounts of Cr$_2$O$_3$. And Q value was deteriorated by the additions of Cr$_2$O$_3$at sufficiently sintered temperatures. Negative resonant temperature coefficients were moved to positive by the amounts of Cr$_2$O$_3$and returned negative again at 1.2wt%. Temperature characteristics were deteriorated at 1030$^{\circ}C$.

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LPE법에 의한 고품질 $Er:LiNbO_3$ 단결정 박막의 성장 (Growth of $Er:LiNbO_3$ single crystal thin film with high crystal quality by LPE method)

  • Shin, Tong-Il;Lee, Hyun;Shur, Joong-Won;Byungyou Hong;Yoon, Dae-Ho
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.305-320
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    • 1999
  • It was grown Er2O3 doped LiNbO3 single crystal thin films with high crystal quality by liquid phase epitaxial (LPE) method. Er2O3 was doped with a concentration of 1, 3, and 5 mol% respectively. After the growth of single crystal thin film, we examined the crystallinity and the lattice mismatch along the c-axis between the film and the substrate with the variation of Er2O3 dopant using X-ray double crystal technique. There were no lattice mismatches along the c-axis for the undoped and the films doped with 1 and 3 mol% of Er2O3. For 5 mol% of Er2O3 doped film, there was a lattice mismatch of 7.86x10-4nm along the c-axis.

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BiNbO$_{4}$ 세라믹스를 이용한 LC 필터에 관한 연구 (Expermintal Fabrication of LC Filter of BiNbO$_{4}$ ceramics)

  • 고상기;김경용;최환;박동철
    • 전자공학회논문지D
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    • 제35D권4호
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    • pp.9-17
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    • 1998
  • BiNbO$_{4}$ ceramics with 0.07wt% V$_{2}$O$_{5}$ and 0.03wt% CuO (BNC3V7) sintered at 900 .deg. C where it is possible for these to be co-fired with ag electronde. Dielectric constant of 44.3 TCF (Thermal Coefficient of resonance Frequency) of 2 ppm/.deg. C and Qxf value 22,000 GHz can be obtained from BNC3V7. the laminatedchip LC filter is indispensible to the minimaturization of PCS (Personal Communication System) terminals. Therefore, multilayer type BPF has been fabricated by screen-printing with silver electrode after tape casting. The simulated characteristics of the fabricated filters sintered at 900.deg. C werecomparedwith the designed ones. for Band Pass Filter widths was similar that ofdesigned ones. For Low Pass Filter (LPF), insertion loss value of band pass widths (2.4 dB) which is a few higher than that of designed (1dB), but characteristization of band pass widths was similar that of designed ones.s.of designed ones.s.

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Phenomenological Analysis of Piezoelectric Properties in 0.88Pb(Zn1/3Nb2/3)O3−0.12PbTiO3 Single Crystals with an Engineering Domain Configuration

  • Ha, Jong-Yoon;Kim, Jin-Sang;Jeong, Dae-Yong;Kim, Hyun-Jai;Yoon, Seok-Jin
    • 한국세라믹학회지
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    • 제45권3호
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    • pp.139-141
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    • 2008
  • The piezoelectric properties of tetragonal 0.88Pb$(Zn_{1/3}Nb_{2/3)O_3-0.12PbTiO_3$ single crystals are characterized along the <111> direction, which composed the engineering domain configuration in the tetragonal phase. The <111>-oriented crystal possessed smaller $d_{33}$ values compared to the crystal along the <001> spontaneous polarization direction. Based on phenomenological theory, it is shown that the engineering domain configuration does not enhance the piezoelectric constant in tetragonal 0.88Pb$(Zn_{1/3}Nb_{2/3)O_3-0.12PbTiO_3$ single crystals. In addition, the electrostrictive coefficients of $Q_{12}=-0.03706m^4/C^2,\;Q_{11}=0.10765m^4/C^2,\;and\;Q_{44}=0.02020m^4/C^2$ of tetragonal 0.88PZN-0.12PT single crystals were calculated.

PLD 기법에 의한 $Na_0.5$$K_0.5$$NbO_3$ 휘발성 물질의 박막 제작 및 XRD에 의한 c축 배향성 확인에 관한 연구 (A Study on the Fabrication $Na_0.5$$K_0.5$$NbO_3$ Volatile Material Thin Film by Pulsed Laser Deposition and he Confirmation of C-axis Orientation by X-ray Diffraction)

  • 최원석;김장용;장철순;문병무
    • 한국전기전자재료학회논문지
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    • 제14권4호
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    • pp.269-273
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    • 2001
  • W fabricated thin film using Na$_{0.5}$K$_{0.5}$NbO$_3$ volatile material by pulsed laser deposition (PLD) and studied characterization from EM, XRD, P-E. The density and scale of droplet, which is the defect of PLD, was investigated by SEM but large droplet was not found. The degree of assemble oriented C-axis measured with X-ray diffraction suggests that this film oriented C-axis achieved by $\theta$-2$\theta$ scan and rocking curves shows good self-assemble phenomenon, finally $\phi$-scan does that all of the four directions of the lattice in film equals to those of substrate. P-E hysteresis loop shows residual remnant polarization or saturation polarization value, but it is applicable to memories.ies.

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$Ba_2NaNb_5O_{15}$에서의 Inocmmensurate상의 초공간 대칭성 (Superspace Symmetry of the Incommensurate Phase in Barium Sodium Niobate)

  • 김효진;이정용;주웅길
    • 한국결정학회지
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    • 제1권1호
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    • pp.1-7
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    • 1990
  • Incommensurate 구조에 기인한 회절점들의 체계적인 소멸칙 (extinction rule)의 분석을 통하여 Ba2NaNb5O15(BSN)에 나타나는 incommensurate상의 대칭성이 4차원 초공간군(superspace group) C에 속함을 알 수 있었다. Lock-in superstructure의 공간군은 Ima2(C초)임을 밝혀 내었으며, 그리고 BSH에서의 incommensurate상의 원인을 간략하게 논술하였다. 특히 HREM이 미지를 통하여 discommensuration이 존재함을 확인하였다. 덧붙여, BS각의 구조상 전이에 대하여 군론적 해석을 제시하였다.

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$0.99Pb(Mg_{1/3}Nb_{2/3})O_3-0.01Pb(Mn_{2/3}W_{1/3})O_3$계의 유전 및 전왜 특성에 미치는 과잉 MgO의 영향 (Effect of Excess MgO on Dielectric and Electrostrictive Properties of $0.99Pb(Mg_{1/3}Nb_{2/3})O_3-0.01Pb(Mn_{2/3}W_{1/3})O_3$)

  • 윤기현;김승연;남윤우;조용수;강동헌
    • 한국세라믹학회지
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    • 제30권8호
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    • pp.629-634
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    • 1993
  • Dielectric and electrostrictive properties of 0.99Pb(Mg1/3Nb2/3)O3-0.01Pb(Mn2/3W1/3)O3 system using KCl-NaCl salts have been investigated as a function of the amount of excess MgO. For the specimens calcined at $700^{\circ}C$ for 1h and then sintered at 115$0^{\circ}C$ for 4h, the perovskite phase and the relative density were about 98% and 95%, respectively. With the addition of excess MgO up to 10mol%, the dielectric constant and the electrostrictive strain increased due to the increase of density and grain size, and these properties were degraded by the further addition of excess MgO. For the 10mol% excess MgO added specimen, the maximum electrostrictive strain, Xmax, and the electrostrictive coefficient, Q11, were 4.5$\times$10-4, 3.5$\times$10-2m4/C2, respectively. These results were correlated with the property of PMW and microstructure.

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