• Title/Summary/Keyword: Nanometer

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Preparation of Anodic Alumina Nanotemplate and its Applications (양극산화 알루미나 나노 템플레이트의 제조 및 응용)

  • Jeong, Soo-Hwan;Jung, Seung-Ho;Lee, Kun-Hong
    • Applied Chemistry for Engineering
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    • v.16 no.4
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    • pp.461-473
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    • 2005
  • Nanotechnology has attracted great attention as one of essential fields in modern science. In particular, the fabrication of nanostructures with nanometer dimension in size is the starting point and essential part of nanotechnology research. Anodic aluminum oxide (AAO) nanotemplate technique has many merits including ease of fabrication, low cost process, and nanotemplate fabrication in large area. Moreover, AAO nanotemplate technique can realize self-ordered hexagonal pore structure with extremely high aspect ratio which is difficult to achieve with conventional lithographic techniques. Simple control of pore dimensions such as diameter, length, and density by varying anodizing condition would be advantageous, too. AAO nanotemplate has been the topic of intensive investigations for the past decade due to above strong points, and the application to various fields of nanotechnology is expected. In this review paper, the fabrication and application of AAO nanotemplate are introduced.

Electrodeposition for the Fabrication of Copper Interconnection in Semiconductor Devices (반도체 소자용 구리 배선 형성을 위한 전해 도금)

  • Kim, Myung Jun;Kim, Jae Jeong
    • Korean Chemical Engineering Research
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    • v.52 no.1
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    • pp.26-39
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    • 2014
  • Cu interconnection in electronic devices is fabricated via damascene process including Cu electrodeposition. In this review, Cu electrodeposition and superfilling for fabricating Cu interconnection are introduced. Superfilling results from the influences of organic additives in the electrolyte for Cu electrodeposition, and this is enabled by the local enhancement of Cu electrodeposition at the bottom of filling feature formed on the wafer through manipulating the surface coverage of organic additives. The dimension of metal interconnection has been constantly reduced to increase the integrity of electronic devices, and the width of interconnection reaches the range of few tens of nanometer. This size reduction raises the issues, which are the deterioration of electrical property and the reliability of Cu interconnection, and the difficulty of Cu superfilling. The various researches on the development of organic additives for the modification of Cu microstructure, the application of pulse and pulse-reverse electrodeposition, Cu-based alloy superfilling for improvement of reliability, and the enhancement of superfilling phenomenon to overcome the current problems are addressed in this review.

Fabrication of Nano-sized ZnO Colloids from Spray Combustion Synthesis (SCS) (분무연소합성(SCS)법에 의한 나노크기 산화아연(ZnO) 콜로이드의 제조)

  • Lee, Sang-Jin;Lee, Sang-Won;Jun, Byung-Sei
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.76-80
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    • 2004
  • Nano-sized ZnO colloids were prepared by use of spray combustion method. for combustion reaction, $Zn(NO_3)_2{\cdot}6H_2O$ and $CH_6N_4O$ were employed as an oxidizer and a fuel. Exothermic peak was shown at $230^{\circ}C$ by DTA/TGA, and it was considered as a combustion reaction followed by ignition of the precursor mixture. In case of spray combustion method, because insufficient contents of molecules and radicals generated from precursor droplets may lead an incomplete igmition, the ignition temperature of combustion chamber was chosen at $500^{\circ}C$. For diminishing aerosol coagulation, the droplet number concentration was reduced by filter media. The fluid was laminar with 2.5 seconds of aerosol residence time. The synthesized colloids had spherical shape with 180 nanometer size, and the crystalline phase was ZnO with hexagonal structure.

The Fabrication and Magnetoresistance of Nanometer-sized Spin Device Driven by Current Perpendicular to the Plane (수직전류 인가형 나노 스핀소자의 제조 및 자기저항 특성)

  • Chun, M.G.;Lee, H.J.;Jeung, W.Y.;Kim, K.Y.;Kim, C.G.
    • Journal of the Korean Magnetics Society
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    • v.15 no.2
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    • pp.61-66
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    • 2005
  • In order to make submicron cell for spin-injection device, lift-off method using Pt stencil and wet etching was chosen. This approach allows batch fabrication of stencil substrate with electron-beam lithography. It simplifies the process between magnetic film stack deposition and final device testing, thus enabling rapid turnaround in sample fabrication. Submicron junctions with size of $200nm{\times}300nm$ and $500nm{\times}500nm$ 500 nm and pseudo spin valve structure of $CoFe(30{\AA})/Cu(100{\AA})/CoFe(120{\AA}$) was deposited into the nanojunctions. MR ratio was 0.8 and $1.1{\%}$, respectively and spin transfer effect was confirmed with critical current of $7.65{\times}10^7A/cm^2$.

Spatial Distributions of Alloying Elements Obtained from Atom Probe Tomography of the Amorphous Ribbon Fe75C11Si2B8Cr4

  • Shin, Jinkyung;Yi, Seonghoon;Pradeep, Konda Gokuldoss;Choi, Pyuck-Pa;Raabe, Dierk
    • Korean Journal of Materials Research
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    • v.23 no.3
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    • pp.190-193
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    • 2013
  • Spatial distributions of alloying elements of an Fe-based amorphous ribbon with a nominal composition of $Fe_{75}C_{11}Si_2B_8Cr_4$ were analyzed through the atom probe tomography method. The amorphous ribbon was prepared through the melt spinning method. The macroscopic amorphous natures were confirmed using an X-ray diffractometer (XRD) and a differential scanning calorimeter (DSC). Atom Probe (Cameca LEAP 3000X HR) analyses were carried out in pulsed voltage mode at a specimen base temperature of about 60 K, a pulse to base voltage ratio of 15 %, and a pulse frequency of 200 kHz. The target detection rate was set to 5 ions per 1000 pulses. Based on a statistical analyses of the data obtained from the volume of $59{\times}59{\times}33nm^3$, homogeneous distributions of alloying elements in nano-scales were concluded. Even with high carbon and strong carbide forming element contents, nano-scale segregation zones of alloying elements were not detected within the Fe-based amorphous ribbon. However, the existence of small sub-nanometer scale clusters due to short range ordering cannot be completely excluded.

Organic-Inorganic Nanocomposites of Polystyrene with Polyhedral Oligomeric Silsesquioxane (실세스키옥세인을 사용한 폴리스티렌 나노복합재료)

  • Kim Kyung-Min
    • Polymer(Korea)
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    • v.30 no.5
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    • pp.380-384
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    • 2006
  • Polyhedral oligomeric silsesquioxanes (POSS) were used as starting materials for the preparation of hybrid materials with polystyrene (PS). Optically transparent hybrids were obtained in a wide range of weight ratios when phenyl groups were introduced to each corner of the silsesquioxane. In contrast, as cyclohexyl groups were introduced, the obtained hybrid materials with PS resulted in turbid films. The aromatic (${\pi}-{\pi}$) interaction was confirmed to be a quite effective tool for the synthesis of organic-Inorganic polymer hybrids with POSS. The obtained homogeneous and transparent hybrid films could be dissolved in solvents and East again without any separation. The homogeneity of polymer hybrids with POSS was supported by the result of scanning electron microscopy (SEM), X-ray diffraction (XRD), and differential scanning calorimetry (DSC), which demonstrated a nanometer-level integration of PS and POSS.

Micro-gap DBD Plasma and Its Applications

  • Zhang, Zhitao;Liu, Cheng;Bai, Mindi;Yang, Bo;Mao, Chengqi
    • Journal of the Speleological Society of Korea
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    • no.76
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    • pp.37-42
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    • 2006
  • The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

Two-Dimensional Arrays of Gold Nanoparticles for Plasmonic Nanosensor

  • Sim, Brandon;Monjaraz, Fernando;Lee, Yong-Joong;Park, So-Yeun
    • Korean Journal of Materials Research
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    • v.21 no.10
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    • pp.525-531
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    • 2011
  • Two dimensional (2D) arrays of noble metal nanoparticles are widely used in the sensing of nanoscale biological and chemical events. Research in this area has sparked considerable interest in many fields owing to the novel optical properties, e.g., the localized surface plasmon resonance, of these metallic nanoarrays. In this paper, we report successes in fabricating 2D arrays of gold nano-islands using nanosphere lithography. The reproducibility and the effectiveness of the nano-patterning method are tested by means of spin coating and capillary force deposition. We found that the capillary force deposition method was more effective for nanospheres with diameters greater than 600 nm, whereas the spin coating method works better for nanospheres with diameters less than 600 nm. The optimal deposition parameters for both methods were reported, showing about 80% reproducibility. In addition, we characterize gold nano-island arrays both geometrically with AFM as well as optically with UV-VIS spectrometry. The AFM images revealed that the obtained nano-arrays formed a hexagonal pattern of truncated tetrahedron nano-islands. The experimental and theoretical values of the geometric parameters were compared. The 2D gold nano-arrays showed strong LSPR in the absorption spectra. As the nano-islands increased in size, the LSPR absorption bands became red-shifted. Linear dependence of the plasmon absorption maximum on the size of the gold nano-islands was identified through the increment in the plasmon absorption maximum rate for a one nanometer increase in the characteristic length of the nano-islands. We found that the 2D gold nano-arrays showed nearly seven-fold higher sensitivity of the absorption spectrum to the size of the nano-islands as compared to colloidal gold nano-particles.

Effect of 20 % EDTA Aqueous Solution on Defective Tubes (Alloy600) in High Temperature Chemical Cleaning Environments (고온화학세정환경에서 20 % EDTA 용액이 결함 전열관 (Alloy600)에 미치는 영향)

  • Kwon, Hyuk-chul
    • Corrosion Science and Technology
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    • v.15 no.2
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    • pp.84-91
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    • 2016
  • The transport and deposition of corrosion products in pressurized water nuclear reactor (PWR) steam generators have led to corrosion (SCC, denting etc.) problems. Lancing, mechanical cleaning and chemical cleaning have been used to reduce these problems. The methods of lancing and mechanical cleaning have limitations in removing corrosion products due to the structure of steam generator tubes. But high temperature chemical cleaning (HTCC) with EDTA is the most effective method to remove corrosion products regardless of the structure. However, EDTA in chemical cleaning aqueous solution and chemical cleaning environments affects the integrity of materials used in steam generators. The nuclear power plants have to perform the pre-test (also called as qualification test (QT)) that confirms the effect on the integrity of materials after HTCC. This is one of the series studies that assess the effect, and this study determines the effects of 20 % EDTA aqueous solution on defective tubes in high temperature chemical cleaning environments. The depth and magnitude of defects in steam generator (SG) tubes were measured by eddy current test (ECT) signals. Surface analysis and magnitude of defects were performed by using SEM/EDS. Corrosion rate was assessed by weight loss of specimens. The ECT signals (potential and depth %) of defective tubes increased marginally. But the lengths of defects, oxides on the surface and weights of specimens did not change. The average corrosion rate of standard corrosion specimens was negligible. But the surfaces on specimens showed traces of etching. The depth of etching showed a range on the nanometer. After comprehensive evaluation of all the results, it is concluded that 20 % EDTA aqueous solution in high temperature chemical cleaning environments does not have a negative effect on defective tubes.

Simulations of Self-Assembled Structures in Macromolecular Systems: from Atomistic Model to Mesoscopic Model (고분자 자기조립 구조의 전산 모사: 원자 모델로부터 메조 스케일 모델까지)

  • Huh, June;Jo, Won-Ho
    • Polymer(Korea)
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    • v.30 no.6
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    • pp.453-463
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    • 2006
  • Molecular simulation is an exceptionally useful method for predicting self-assembled structures in various macromolecular systems, enlightening the origins of many interesting molecular events such as protein folding, polymer micellization, and ordering of molten block copolymer. The length scales of those events ranges widely from sub-nanometer scale to micron-scale or to even larger, which is the main obstacle to simulate all the events in an ab initio principle. In order to detour this major obstacle in the molecular simulation approach, a molecular model can be rebuilt by sacrificing some unimportant molecular details, based on two different perspectives with respect to the resolution of model. These two perspectives are generally referred to as 'atomistic' and 'mesoscopit'. This paper reviews various simulation methods for macromolecular self-assembly in both atomistic and mesoscopic perspectives.