• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.1417-1422
• /
• 2003

An electrical cascade impactor is a multistage impaction device to separate airborne particles into aerodynamic size classes using electrical method. We designed a real-time three-stage electrical low-pressure impactor, which is proper to nanometer sized environmental aerosols. Performance evaluation was carried out for stage 1 and 2. The monodisperse liquid dioctyl sebacate (DOS) particles were generated using condensation-evaporation followed by electrostatic classification using DMA (differential mobility analizer) for particles with diameters in the range of $0.04{\sim}0.8{\mu}m$. The evaluation of the electrical impactor is based on the use of two electrometers, one connected to the impaction plate of the impactor, and the other to the faraday cage as backup filter. The results showed that the experimental 50% cutoff diameters in the operation pressure were 0.53 and $0.12{\mu}m$ for stage 1 and stage 2. The effect of operation pressure on the cutoff diameter and the steepness of collection effcieicy curves is investigated.

• Journal of the Korean Vacuum Society
• /
• v.20 no.5
• /
• pp.374-380
• /
• 2011

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and $SF_6$ as an additive gas under thermal chemical vapor deposition system. The characteristics (formation density and morphology) of as-grown carbon coils according to the injection stage of $SF_6$ gas incorporation were investigated. A continuous injecting of $SF_6$ gas flow could give rise to many types of carbon coils-related geometries, namely linear tub, micro-sized coil, nano-sized coil, and wave-like nano-sized coil. However, the limitation of the geometry as the nano-sized geometries of carbon coils could be achieved by the incorporation of $SF_6$ in a short time (1 min) during the initial deposition stage. A delayed injection of a short time $SF_6$ gas flow can deteriorate the limitation of the geometries. It confirms that the injection time and its starting point of $SF_6$ gas flow would be very important to determine the geometries of carbon coils.

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.1678-1683
• /
• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Although DBD high electron density and energy, its potential use as nano and sub-micron sized particle charging are not well known. Aim of this work is to determine design and operating parameters of a two-stage ESP with DBD. DBD and ESP are used as particle charger and precipitator, respectively. We measured particle precipitation efficiency of two-stage ESP and estimated ozone decomposition of both pelletized $MnO_2$ catalyst and pelletized activated carbon. To examine the particle precipitation efficiency, nano and sub-micron sized particles were generated by a tube furnace and an atomizer. AC voltage of $7{\sim}10$ kV(rms) and 60 Hz is used as DBD plasma source. DC -8 kV is applied to the ESP for particle precipitation. The overall particle collection efficiency for the two-stage ESP with DBD is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized $MnO_2$ catalyst or pelletized activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• Proceedings of the IEEK Conference
• /
• 2001.10a
• /
• pp.315-324
• /
• 2001

Mechanochemical effects that occurred in the fine grinding process of quartz particles using planetary ball mill was investigated. Quartz particles have been frequently utilized for optical materials, semiconductor molding materials. We determined that grinding for a long time can be create amorphous structures from the crystalline quartz by Mechanochemical effects. But, to be produced nano-composite particles that the critical grinding time reached for composite materials in a short time. Henceforth, a qualitative estimation must be conducted on the filler for EMC(Epoxy molding compound) materials. It can be produced mechanochemically treated composite materials and also an integrated grinding efficiency considering of the nano-composite amorphous structured particles. The mechanochemical characteristics were evaluated based on particle morphology, size distribution, specific surface area, density and the amount of amorphous phase materials into the particle surface. The grinding operation in the planetary ball mill can be classified into three stages. During the first stage, initial particle size was reduced for the increase of specific surface area. In the second stage, the specific surface areas increased in spite of the increase in particle size. The final stage as a critical grinding stage, the ground quartz was considered mechanochemically treated particles as a nano- composite amorphous structured particles. The development of amorphous phase on the particle surface was evaluated by X-ray diffractometry, thermal gravity analysis and IR spectrometer. The amount of amorphous phase of particles ground for 2048 minutes was 85.3% and 88.2% by X-ray analysis and thermal gravity analysis, respectively.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.12
• /
• pp.1828-1835
• /
• 2012

In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.

• Journal of Sensor Science and Technology
• /
• v.19 no.1
• /
• pp.25-30
• /
• 2010

This paper presents a low noise CMOS regulator for a low power capacitive sensor interface in a $0.5{\mu}m$ CMOS standard technology. Proposed LDO regulator circuit consist of a voltage reference block, an error amplifier and a new buffer between error amplifier and pass transistor for a good output stability. Conventional source follower buffer structure is simple, but has a narrow output swing and a low S/N ratio. In this paper, we use a 2-stage wide band OTA instead of source follower structure for a buffer. From SPICE simulation results, we got 0.8 % line regulation and 0.18 % load regulation.

• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.3
• /
• pp.27-32
• /
• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• Journal of the Korean institute of surface engineering
• /
• v.39 no.4
• /
• pp.160-165
• /
• 2006

Ni-SiC composite coating layers were prepared by electroplating method and their deposition rate, codeposition of SiC, morphology, surface roughness, hardness, wear and friction properties were investigated. It was found that the deposition rate and the codeposition of SiC in the composite coating layer increased with increasing concentration of SiC in the solution only at the early stage. Both of them reached certain maxima and then decreased with increasing concentration of SiC. Rough surface was obtained with increasing codeposition of SiC, which is probably due to the agglomeration of the SiC particle in the vicinity of surface. Vickers hardness increased with increasing codeposition of SiC and heat treatment at $300^{\circ}C$ in air for 1 hour. Wear volume decreased with increasing codeposition of SiC and friction coefficient increased with increasing codeposition of SiC at the early stage, and it became almost constant. Such wear and friction behaviors are desirable for the practical application.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1207-1210
• /
• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• Transactions of Materials Processing
• /
• v.16 no.3 s.93
• /
• pp.210-214
• /
• 2007

Manufacturing bulk nanostructured materials with least grain growth from initial powders is challenging because of the bottle neck of bottom-up methods using the conventional powder metallurgy via compaction and sintering. In the study, densification behavior of nano Cu powders during pressureless sintering was investigated using an in-situ optical dilatometer technique. The initial heating and steady temperature stages during the sintering of nano Cu powder compacts were observed. At the initial heating stage, the powder compact has many porosities and full densification needs high temperature and/or high pressure sintering. In the experimental analysis, changes in geometry and density were measured and discussed for optimal consolidation and densification by the in-situ optical dilatometer.