• 제목/요약/키워드: Nano-processing

검색결과 563건 처리시간 0.029초

전기선 폭발법으로 제조된 Al-Cu 합금 나노분말을 이용한 다공성 나노 입자 제조 (Fabrication of Porous Nano Particles from Al-Cu Alloy Nano Powders Prepared by Electrical Wire Explosion)

  • 박제신;김원백;서창열;안종관;김병규
    • 한국분말재료학회지
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    • 제15권3호
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    • pp.234-238
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    • 2008
  • Al-Cu alloy nano powders have been produced by the electrical explosion of Cu-plated Al wire. The porous nano particles were prepared by leaching for Al-Cu alloy nano powders in 40wt% NaOH aqueous solution. The surface area of leached powder for 5 hours was 4 times larger than that of original alloy nano powder. It is demonstrated that porous nano particles could be obtained by selective leaching of alloy nano powder. It is expected that porous Cu nano powders can be applied for catalyst of SRM (steam reforming methanol).

전기선 폭발법에 의하여 제조된 Al-Ni 합금 나노분말의 선택적 침출 (The Selective Leaching of Al-Ni Alloy Nano Powders Prepared by Electrical Wire Explosion)

  • 박제신;김원백;서창열;장한권;안종관;김병규
    • 한국분말재료학회지
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    • 제15권4호
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    • pp.308-313
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    • 2008
  • Al-Ni alloy nano powders have been produced by the electrical explosion of Ni-plated Al wire. The porous nano particles were prepared by leaching for Al-Ni alloy nano powders in 20wt% NaOH aqueous solution. The structural properties of leached porous nano powder were investigated by nitrogen physisorption, X-ray diffraction (XRD) and transmission Microscope (TEM). The surface areas of the leached powders were increased with amounts of AI in alloys. The pore size distributions of these powders were exhibited maxima at range of pore diameters 3.0 to 3.5 nm from the desorption isotherm. The maximum values of those were decreased with amounts of Al in alloys.

평판형 고밀도 유도결합 건식 식각시 Optical Emission Spectroscopy를 이용한 $BCl_3$$BCl_3$/Ar 플라즈마의 분석 (Diagnosis of $BCl_3$ and $BCl_3$/Ar Plasmas with an Optical Emission Spectroscopy during High Density Planar Inductively Coupled Dry Etching)

  • Cho, Guan-Sik;Wantae Lim;Inkyoo Baek;Seungryul Yoo;Park, Hojin;Lee, Jewon;Kuksan Cho;S. J. Pearton
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.88-88
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    • 2003
  • Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

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나노코발트 분말합성을 위한 액상환원공정의 최적화 (Optimization of Wet Reduction Processing for Nanosized Cobalt Powder)

  • 홍현선;정항철;김건홍;강이승;석한길
    • 한국분말재료학회지
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    • 제20권3호
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    • pp.191-196
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    • 2013
  • Nano-sized cobalt powder was fabricated by wet chemical reduction method at room temperature. The effects of various experimental variables on the overall properties of fabricated nano-sized cobalt powders have been investigated in detail, and amount of NaOH and reducing agent and dropping speed of reducing agent have been properly selected as experimental variables in the present research. Minitab program which could find optimized conditions was adopted as a statistic analysis. 3D Scatter-Plot and DOE (Design of Experiments) conditions for synthesis of nano-sized cobalt powder were well developed using Box-Behnken DOE method. Based on the results of the DOE process, reproducibility test were performed for nano-sized cobalt powder. Spherical nano-sized cobalt powders with an average size of 70-100 nm were successfully developed and crystalline peaks for the HCP and FCC structure were observed without second phase such as $Co(OH)_2$.

AAO를 이용한 나노 패턴 마스터 제작에 관한 연구 (Study on Fabrication of Highly Ordered Nano Patterned Master by Using Anodic Aluminum Oxidation)

  • 신홍규;권종태;서영호;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.368-370
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    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

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Synthesis of LiFePO4 nano-fibers for cathode materials by electrospinning process

  • Kang, Chung-Soo;Kim, Cheong;Son, Jong-Tae
    • Journal of Ceramic Processing Research
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    • 제13권spc2호
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    • pp.304-307
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    • 2012
  • Nano-fibers of LiFePO4 were synthesized from a metal oxide precursor by adopting electrospinning method. After calcination of the above precursor nano-fibers at 800 ℃, LiFePO4 nano-fibers with a diameter of 300 ~ 800 nm, were successfully obtained. Measurement were performed using X-ray diffraction (XRD), fourier transform infrared spectrometer (FT-IR), videoscope, scanning electron microscope (SEM) and atomic force microscope (AFM), respectively, were performed to characterize the properties of the as-prepared materials. The results showed that the crystalline phase and morphology of the fibers were largely influenced the starting materials and electrospinning conditions.

전기도금법과 전기선폭발법을 이용한 Al-Cu 합금 나노분말제조 (The Fabrication of Al-Cu Alloy Nano Powders by a New Method Combining Electrodeposition and Electrical Wire Explosion)

  • 박제신;서창열;장한권;이재천;김원백
    • 한국분말재료학회지
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    • 제13권3호
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    • pp.187-191
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    • 2006
  • Al-Cu alloy nano powders were produced by the electrical explosion of Cu-plated Al wires. The composition and phase of the alloy could be controlled by varying the thickness of Cu deposit on Al wire. When the Cu layer was thin, Al solid solution and $CuAl_2$ were the major phases. As the Cu layer becomes thicker, Al diminished while $Al_4Cu_9$ phase prevailed instead. The average particle size of Al-Cu nano powders became slightly smaller from 63 nm to 44 nm as Cu layer becomes thicker. The oxygen content of Al-Cu powder decreased linearly with Cu content. It is well demonstrated that the electrodeposition combined with wire explosion could be simple and economical means to prepare variety of alloy and intermetallic nano powders.

Bending Strength of Textured Alumina Prepared by Slip Casting in a Strong Magnetic Field

  • Suzuki, Tohru S.;Uchikoshi, Tetsuo;Morita, Koji;Hirage, Keijiro;Sakka, Yoshio
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1099-1100
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    • 2006
  • The mechanical properties of ceramics materials can be tailored by designing their microstructures. We have reported that development of texture can be controlled by slip casting in a strong magnetic field followed by heating even for diamagnetic ceramics such as alumina. A strong magnetic field of 12T was applied to the suspension indcuding alumina powder to rotate each particle during slip casting. The sintering was conducted at the desired temperature in air without a magnetic field. C-axis of alumina was parallel to the magnetic field. Bending strength of textured alumina depended on the direction of oriented microstructure.

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