• Title/Summary/Keyword: Nano-precision

Search Result 741, Processing Time 0.033 seconds

Study on the Thermal and Dynamic Behaviors of Air Spring for vibration isolation of LCD panel inspecting machine connected with an External Chamber through a flexible tube: PART I, Theoretical Modeling (외부챔버와 유연한 튜브로 연결된 LCD 패널 검사기 방진용 공기 스프링의 열 및 동적 연성거동에 대한 연구: PART I, 이론적 모델링)

  • Seok, Jong-Won;Lee, Ju-Hong;Kim, Pil-Kee
    • Journal of the Semiconductor & Display Technology
    • /
    • v.10 no.1
    • /
    • pp.33-41
    • /
    • 2011
  • Due to the recent quantum leaps forward in bio-, nano-, and information-technologies (BT, NT and IT), the precisionization and miniaturization of mechanical and electrical components are in high demand. In particular, the ITrelated equipments that take a great part in our domestic industry are in the area requiring high precision technologies. As a consequence, the researches on the development vibration isolation systems that diminish external disturbance or internal vibration are highly required. Among the components comprising the vibration isolation system, air spring has become on a focal point for the researchers due to its merits. This air spring is able to support heavy loads, keep a low natural frequency despite of having a lower value of stiffness, and control the performance of vibration isolation. However, sometimes the sole use of air spring is in demand due to some economic reasons. Under this circumstance, the damping effect of sole air spring may not enough to reduce sufficient amount of vibration. In this study, the air spring mount system connecting with an external chamber is proposed to increase or control the damping effect. To investigate its damping mechanism, the thermal and dynamic behaviors of the system is examined through a theoretical modeling approach in this part of research. In this approach, thermomechanical and Helmholtz resonator type models are to be employed for the air spring/external chambers and connecting tube system, respectively. The frequency response functions (FRFs) derived from the modeling effort are evaluated with physical parametric values and the effects of connecting tube length on these FRFs are identified through computer simulations.

A Study on Vulcanization of EPDM by Far-infrared (원적외선에 의한 EPDM의 가교 특성 연구)

  • Bae, J.W.;Kim, J.S.;Lee, J.H.;Jung, W.S.;Park, H.C.;Kang, D.P.
    • Elastomers and Composites
    • /
    • v.43 no.1
    • /
    • pp.1-7
    • /
    • 2008
  • Far-infrared vulcanization of ethylene-propylene-diene terpolymer(EPDM) compounds has been studied in comparison with hot air vulcanization. Vulcanization characteristics of EPDM compounds were measured by degree of curing and temperature of specimens in vulcanization process. As a result, degree of curing by far-infrared of EPDM compounds was shown to be higher value than that by hot air at the same vulcanization temperature. Especially, degree of curing by far-infrared on 3 mm thickness of EPDM compounds was increased by two times compared to that by hot air. While the increase of thermal conductivity of EPDM compounds highly improved degree of curing by far-infrared, that hardly improved degree of curing by hot air.

A Study on the Growth Rate and Surface Shape of Single Crystalline Diamond According to HFCVD Deposition Temperature (HFCVD 증착 온도 변화에 따른 단결정 다이아몬드 표면 형상 및 성장률 변화)

  • Gwon, J.U.;Kim, M.S.;Jang, T.H.;Bae, M.K.;Kim, S.W.;Kim, T.G.
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.34 no.5
    • /
    • pp.239-244
    • /
    • 2021
  • Following Silicon Carbide, single crystal diamond continues to attract attention as a next-generation semiconductor substrate material. In addition to excellent physical properties, large area and productivity are very important for semiconductor substrate materials. Research on the increase in area and productivity of single crystal diamonds has been carried out using various devices such as HPHT (High Pressure High Temperature) and MPECVD (Microwave Plasma Enhanced Chemical Vapor Deposition). We hit the limits of growth rate and internal defects. However, HFCVD (Hot Filament Chemical Vapor Deposition) can be replaced due to the previous problem. In this study, HFCVD confirmed the distance between the substrate and the filament, the accompanying growth rate, the surface shape, and the Raman shift of the substrate after vapor deposition according to the vapor deposition temperature change. As a result, it was confirmed that the difference in the growth rate of the single crystal substrate due to the change in the vapor deposition temperature was gained up to 5 times, and that as the vapor deposition temperature increased, a large amount of polycrystalline diamond tended to be generated on the surface.

Investigation of Structural Change of DLC Coating during Frictional Wear by Raman Spectroscopy (라만 분광법을 활용한 마모 중 DLC 코팅의 구조적 변화 조사)

  • Kim, Song-Hee;Jang, Jae Cheol
    • Journal of the Korean institute of surface engineering
    • /
    • v.52 no.1
    • /
    • pp.16-22
    • /
    • 2019
  • The structural change of DLC coatings during long-term wear test and dicing test under the low loading condition was investigated. DLC coatings were applied for the precision injection molds of a modified SNCM steel for the extension of life and the micro-diamond blades for the high cutting efficiency and the increase in life. A ball-on-disc wear tests in the mold steel and a dicing tests in the micro-diamond blades were conducted to understand degradation of DLC coatings. The degradation of DLC coatings for the injection mold steel and the micro-diamond blades during the wear and dicing tests were studied with Raman Spectroscopy. Raman peaks were divided two bands(D band and G band) to study the degradation process of DLC structure. By the wear test, polished condition of wear marks were observed to be maintained until 10 hrs of wear test period is given, but small striation marks appeared in 20 hours wear test. It was observed that $I_D/I_G$ ratios changed as the degradation of DLC coatings is proceeded during the wear tests and the dicing tests. It is suggested that the change in $I_D/I_G$ value possibly reflected from the composition of $sp^2$ and $sp^3$ bondings in DLC layers relevant to the change in mechanical and physical property.

Research to Minimize Endoscope and Objective-lens Sensitivity Using Multi-configurations (다중 구성을 이용한 내시경 및 대물렌즈 광학계 공차 민감도 최소화 설계 기술)

  • Jung, Mee-Suk
    • Korean Journal of Optics and Photonics
    • /
    • v.32 no.6
    • /
    • pp.259-265
    • /
    • 2021
  • Recently, lens manufacturing and assembly technology has greatly improved. However, tight requirements of manufacturing and assembly lead to an increase in cost and manufacturing time, and in some cases the performance of an optical system may deteriorate depending on the operating environment's conditions, such as temperature or vibration. In addition, the use of a compensator is an effective method to reduce sensitivity in an ultra-precision optical system, but in the case of a small lens, such as that in an endoscope, it is difficult to use a compensator due to the size limitation of the lens barrel. Therefore, minimizing lens sensitivity is the most important technology in lens design. For this reason, there have been various attempts to reduce the lens sensitivity, and there is a trend to add functions to reduce the sensitivity in the lens design S/W. In this paper, we introduce a design technology that minimizes lens sensitivity. We first design a lens with quite good performance, then analyze the sensitivity of this lens, make a multi-configuration with high-sensitivity element error, and then reoptimize it. We prove with an example that this design technique is very effective.

Atomic Fountain towards a single atom trap (단원자 포획을 위한 원자분수)

  • H. S. Rawat;S. H. Kwon;Kim, J. B.;K. An
    • Proceedings of the Optical Society of Korea Conference
    • /
    • 2000.08a
    • /
    • pp.74-75
    • /
    • 2000
  • The past few decades have witnessed the development of very robust technique, known as magneto-optical trap(MOT), for cooling and trapping of neutral atoms using lasers and magnetic fields. This technique can easily produce cooled atoms to a temperature range of nano-kelvin $s^{(1)}$ . These laser cooled and trapped atoms have found applications in various fields, such as ultrahigh resolution spectroscopy, precision atomic clocks, very cold atomic collision physics, Bose-Einstein Condensation, the Atom laser, etc. Particularly, a few isolated atoms of very low temperature are needed in the cavity QED studies in the optical regime. One can obtain such atoms from a MOT using the atomic fountain technique. The widely used technique for atomic fountain is, first to cool and trap the neutral atoms in MOT. And then launch them in the vertical (1, 1, 1) direction with respect to cooling beams, using moving molasses technique. Recently, this technique combined with the cavity-QED has opened an active area of basic research. This way atoms can be strongly coupled to the optical radiation in the cavity and leads to various new effects. Trapping of single atom after separating it from MOT in the high Q-optical cavity is actively initiated presentl $y^{(2.3)}$. This will help to sharpen our understanding of atom-photon interaction at quantum level and may lead to the development of single-atom laser. Our efforts to develop an $^{85}$ Rb-atomic fountain is in progress. (omitted)

  • PDF

Applications of Self-assembled Monolayer Technologies in MEMS Fabrication (MEMS 공정에서의 자기 조립 단분자층 기술 응용)

  • Woo-Jin Lee;Seung-Min Lee;Seung-Kyun Kang
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.30 no.2
    • /
    • pp.13-20
    • /
    • 2023
  • The process of microelectromechanical system (MEMS) fabrication involves surface treatment to impart functionality to the device. Such surface treatment method is the self-assembled monolayer (SAM) technique, which modifies and functionalizes the surface of MEMS components with organic molecule monolayer, possessing a precisely controllable strength that depends on immersion time and solution concentration. These monolayers spontaneously adsorb on polymeric substrates or metal/ceramic components offering high precision at the nanoscale and modifying surface properties. SAM technology has been utilized in various fields, such as tribological property control, mass-production lithography, and ultrasensitive organic/biomolecular sensor applications. This paper provides an overview of the development and application of SAM technology in various fields.

Thermal post-buckling measurement of the advanced nanocomposites reinforced concrete systems via both mathematical modeling and machine learning algorithm

  • Minggui Zhou;Gongxing Yan;Danping Hu;Haitham A. Mahmoud
    • Advances in nano research
    • /
    • v.16 no.6
    • /
    • pp.623-638
    • /
    • 2024
  • This study investigates the thermal post-buckling behavior of concrete eccentric annular sector plates reinforced with graphene oxide powders (GOPs). Employing the minimum total potential energy principle, the plates' stability and response under thermal loads are analyzed. The Haber-Schaim foundation model is utilized to account for the support conditions, while the transform differential quadrature method (TDQM) is applied to solve the governing differential equations efficiently. The integration of GOPs significantly enhances the mechanical properties and stability of the plates, making them suitable for advanced engineering applications. Numerical results demonstrate the critical thermal loads and post-buckling paths, providing valuable insights into the design and optimization of such reinforced structures. This study presents a machine learning algorithm designed to predict complex engineering phenomena using datasets derived from presented mathematical modeling. By leveraging advanced data analytics and machine learning techniques, the algorithm effectively captures and learns intricate patterns from the mathematical models, providing accurate and efficient predictions. The methodology involves generating comprehensive datasets from mathematical simulations, which are then used to train the machine learning model. The trained model is capable of predicting various engineering outcomes, such as stress, strain, and thermal responses, with high precision. This approach significantly reduces the computational time and resources required for traditional simulations, enabling rapid and reliable analysis. This comprehensive approach offers a robust framework for predicting the thermal post-buckling behavior of reinforced concrete plates, contributing to the development of resilient and efficient structural components in civil engineering.

A Feasibility Study on the Infrastructure Project of Femto Fusion Technology (펨토 융합기술 기반구축사업 타당성 분석 연구)

  • Kim, Dae Ho;Kim, Tae Hyung
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
    • /
    • v.8 no.1
    • /
    • pp.1-11
    • /
    • 2013
  • The femto fusion technology refers to not only the technology for femtosecond($10^{-15}$ second) laser and but also the fusion technology of its application. This technology is comparable to the nano technology, the extreme technology on the space, and is of extreme time-domain technology. Now, we need to develop the hyperfine and high-precision femto fusion process technology which allows to miniaturize and highly integrate the products of mobile, semiconductor and display industries, the national main focusing growth industries. However, The femtosecond laser fabrication technology is essential in the development of fusion technology, but only a few of domestic researchers can handle the former. Under this condition, our government plans to develop the "femto fusion technology infrastructure project" as one of the ICT research infrastructure. So the purpose of this study is to analyze the feasibility of this project. We applied AHP(analytic hierarchy process) for this study. The final result shows that all the repondent's score is over 0.55 and the aggregated score is 0.846. And as a consequence, we can conclude that to do this project is feasible.

  • PDF

Fabrication and characterization of $WSi_2$ nanocrystals memory device with $SiO_2$ / $HfO_2$ / $Al_2O_3$ tunnel layer

  • Lee, Hyo-Jun;Lee, Dong-Uk;Kim, Eun-Kyu;Son, Jung-Woo;Cho, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.02a
    • /
    • pp.134-134
    • /
    • 2011
  • High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

  • PDF