A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 1 : Design and Analysis of Static and Dynamic Properties (주사 현미경용 평면 스캐너 Part 1 :설계 및 정 · 동특성 해석)
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- Transactions of the Korean Society for Noise and Vibration Engineering
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- v.15 no.6 s.99
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- pp.667-673
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- 2005