• Title/Summary/Keyword: Nano-Replication

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Study of nano patterning rheology in hot embossing process (핫엠보싱 공정에서의 미세 패턴 성형에 관한 연구)

  • Kim, H.;Kim, K.S.;Kim, H.Y.;Kim, B.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.10a
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    • pp.371-376
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    • 2003
  • The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process, simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during Compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

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Development of Metal Substrate with Multi-Stage Nano-Hole Array for Low Temperature Solid Oxide Fuel Cell (저온 고체산화물연료전지 구현을 위한 다층 나노기공성 금속기판의 제조)

  • Kang, Sangkyun;Park, Yong-Il
    • Journal of the Korean Ceramic Society
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    • v.42 no.12 s.283
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    • pp.865-871
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    • 2005
  • Submicron thick solid electrolyte membrane is essential to the implementation of low temperature solid oxide fuel cell, and, therefore, development of new electrode structures is necessary for the submicron thick solid electrolyte deposition while providing functions as current collector and fuel transport channel. In this research, a nickel membrane with multi-stage nano hole array has been produced via modified two step replication process. The obtained membrane has practical size of 12mm diameter and $50{\mu}m$ thickness. The multi-stage nature provides 20nm pores on one side and 200nm on the other side. The 20nm side provides catalyst layer and $30\~40\%$ planar porosity was measured. The successful deposition of submicron thick yttria stabilized zirconia membrane on the substrate shows the possibility of achieving a low temperature solid oxide fuel cell.

Highly Ordered Mesoporous Metal Oxides as Catalysts for Dehydrogenation of Cyclohexanol (메조기공을 갖는 다양한 금속 산화물 촉매를 이용한 사이클로헥사놀의 탈수소화 반응)

  • Lee, Eunok;Jin, Mingshi;Kim, Ji Man
    • Korean Chemical Engineering Research
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    • v.51 no.4
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    • pp.518-522
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    • 2013
  • Cyclohexanone is important intermediate for the manufacture of caprolactam which is monomer of nylron. Cyclohexanone is generally produced by dehydrogenation reaction of cyclohexanol. In this study, highly mesoporous metal oxides such as meso-$WO_3$, meso-$TiO_2$, meso-$Fe_2O_3$, meso-CuO, meso-$SnO_2$ and meso-NiO were synthesized using mesoporous silica KIT-6 as a hard template via nano-replication method for dehydrogenation of cyclohexanol. The overall conversion of cyclohexanol followed a general order: meso-$WO_3$ >> meso-$Fe_2O_3$ > meso-$SnO_2$ > meso-$TiO_2$ > meso-NiO > meso-CuO. In particular, meso-$WO_3$ significantly showed higher activity than the other mesoporous metal oxides. Therefore, the meso-$WO_3$ has wide range of application possibilities for dehydrogenation of cyclohexanol.

Fabrication of Silicon Nanotemplate for Polymer Nanolens Array

  • Cho, Si-Hyeong;Kim, Hyuk-Min;Lee, Jung-Hwan;Venkatesh, R. Prasanna;Rizwan, Muhammad;Park, Jin-Goo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.37.1-37.1
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    • 2011
  • Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

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Synthesis of Core-Shell Silica Nanoparticles with Hierarchically Bimodal Pore Structures

  • Yun, Seok-Bon;Park, Dae-Geun;Yun, Wan-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.467-467
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    • 2011
  • Reflecting the growing importance of nanomaterials in science and technology, controlling the porosity combined with well-defined structural properties has been an ever-demanding pursuit in the related fields of frontier researches. A number of reports have focused on the synthesis of various nanoporous materials so far and, recently, the nanomaterials with multimodal porosity are getting an emerging importance due to their improved material properties compared with the mono porous materials. However, most of those materials are obtained in bulk phases while the spherical nanoparticles are one of the most practical platforms in a great number of applications. Here, we report on the synthesis of the core-shell silica nanoparticles with double mesoporous shells (DMSs). The DMS nsnoparticles are spherical and monodispersive and have two different mesoporous shells, i.e., the bimodal porosity. It is the first example of the core-shell silica nanoparticles with the different mesopores coexisting in the individual nanoparticles. Furthermore, the carbon and silica hollow capsules were also fabricated via a serial replication process.

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A Study on Polymer Replica Materials for Nanotransfer Printing (패턴전사프린팅용 고분자 복제 소재 연구)

  • Kang, Young Lim;Park, Woon Ik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.4
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    • pp.262-268
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    • 2021
  • For the past several decades, various next-generation patterning methods have been developed to obtain well-designed nano-to-micro structures, such as imprint lithography, nanotransfer printing (nTP), directed self-assembly (DSA), E-beam lithography, and so on. Especially, nTP process has much attention due to its low processing cost, short processing time, and good compatibility with other patterning techniques in achieving the formation of high-resolution functional patterns. To transfer functional patterns onto desirable substrates, the use of soft materials is required for precise replication of master mold. Here, we introduce a simple and practical nTP method to create highly ordered structures using various polymeric replica materials. We found that polymethyl methacrylate (PMMA), polystyrene (PS), and polyvinylpyridine (PVP) are possible candidates for replica materials for reliable duplication of Si master mold based on systematic analysis of pattern visualization. Furthermore, we successfully obtained well-defined metal and oxide nanostructures with functionality on target substrates by using replica patterns, through deposition and transfer process. We expect that the several candidates of replica materials can be exploited for effective nanofabrication of complex electronic devices.

Kaempferol Inhibits Enterovirus Proliferation through MAPK Signal Regulation (Kaempferol의 MAPK 신호 조절을 통한 심근염 유발 엔테로바이러스 증식 억제)

  • Jang, Jin-Hwa;Jeong, Hae-In;Lim, Byung-Kwan;Nam, Sang-Jip
    • Korean Journal of Pharmacognosy
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    • v.48 no.3
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    • pp.173-178
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    • 2017
  • We investigated the efficacy of single compound of plant extract in coxsackievirus B3 (CVB3) infection. CVB3 is a main cause of Hand-foot-mouth diseases (HFMD) and viral myocarditis in children and adult. Several single compounds of plant extract were purified by HPLC and tested as antiviral drug candidate. Among them, kaempferol was selected to effective anti-enterovirus compound by HeLa cells survival assay. CVB3 infected HeLa cells were treated with kaempferol ($100{\mu}g/ml-100ng/ml$) and their antiviral effect was confirmed. After 16 hours of treatment, HeLa cells were lysed and proteins were extracted for western blot analysis. CVB3 viral capsid protein VP1 production and transcription factor eIF4G-1 cleavage was significantly decreased in $100{\mu}g/ml$ kaempferol treatment. Virus replication was observed by virus RNA amplification. Kaempferol strongly reduced virus positive and negative strand RNA amplification. Moreover, MAPK signal induced by CVB3 infection, pERK and pmTOR, kaempferol treatment significantly inhibited the activity. Plant extract single compound, kaempferol, is a strong candidate to be developed non-toxic anti-enterovirus treatment agent.

Superhydrophobic Engineered Surface Based on Nanohoneycomb Structures (나노허니컴 구조물을 이용한 산업용 극소수성 표면 제작)

  • Kim, Dong-Hyun;Park, Hyun-Chul;Lee, Kun-Hong;Hwang, Woon-Bong
    • Composites Research
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    • v.20 no.2
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    • pp.17-20
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    • 2007
  • Superhydrophobic polytetrafluoroethylene ($Teflon^{(R)}$, Dupont) sub-micro and nanostructures were fabricated by the dipping method, based on anodization process in oxalic acid. The polymer sticking phenomenon during the replication creates the sub-microstructures on the negative polytetrafluoroethylene nanostructure replica. This process gives a hierarchical structure with nanostructures on sub-microstructures, which looks like the same structures as lotus leaf and enables commercialization. The diameter and the height of the replicated nano pillars were 40 nm and 40 um respectively. The aspect ratio is approximately 1000. The fabricated surface has a semi-permanent superhydrophobicity, the apparent contact angle of the polytetrafluoroethylene sub-micro and nanostructures is about $160^{\circ}$, and the sliding angle is less than $1^{\circ}$.

Fabrication of PDMS Mold by AFM Based Mechanical TNL Patterning (AFM기반 기계적 TNL 패터닝을 통한 PDMS 몰드제작)

  • Jung, Y.J.;Park, J.W.
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.5
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    • pp.831-836
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    • 2013
  • This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

Quantitative rheology of polymers in high resolution structuring (미세성형공정에서의 폴리머 레올로지의 정량화)

  • Kim, Byeong-Hee;Kim, Heon-Young;Ki, Ho;Kim, Kwang-Soon;Kang, Shin-Ill
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1036-1042
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    • 2003
  • The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process , simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

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