• International Journal of Precision Engineering and Manufacturing
• /
• 제7권4호
• /
• pp.3-7
• /
• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• 한국광학회:학술대회논문집
• /
• 한국광학회 2009년도 동계학술발표회 논문집
• /
• pp.391-392
• /
• 2009

• 한국정밀공학회지
• /
• 제33권1호
• /
• pp.11-16
• /
• 2016

Lithography techniques are generally used to manufacture nano-patterns on silicon, however, it is difficult to make a V-shaped pattern using these techniques. Although silicon is a brittle material, it can be treated as a ductile material if mechanically machined at extremely low force scale. The manufacturing technique of nano-patterns on single crystal silicon using a mechanical method was developed in this study. First, the linear pattern was machined on the silicon with increasing thrust force. Then, the correlation between measured cutting force and machined pattern was analyzed. Based on the analysis, the critical thrust force was quantitatively determined, and then the silicon was machined at a force lower than the critical thrust force. The machined pattern was observed using SEM and AFM to check for the occurrence of brittle fractures. Finally, the sharp V-shaped nano-pattern was manufactured on the single crystal silicon.

• Journal of Mechanical Science and Technology
• /
• 제20권10호
• /
• pp.1702-1715
• /
• 2006

The increasing use of nano-positioners in a wide variety of laboratory and industrial applications has created a need for nano-mechatronics education in all engineering disciplines. The subject of nano-mechatronics is broad and interdisciplinary. This article focuses on the way nano-mechatronics is taught in department of mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST). As one model of nano-positioning systems, design and experimental methodology is presented in this article. For design phase, the stiffness and resonant frequencies are found analytically and verified by using a commercial finite element analysis program. Next, for experimental phase, various tests are performed to access the performances of the designed nano-positioner, for example, sine-tracking, multi-step response and travel-range check etc. Finally, the definition of 'separation frequency' is described and some comments are discussed.

• 한국레이저가공학회지
• /
• 제17권2호
• /
• pp.19-25
• /
• 2014

Optical embedded diffraction gratings with the bulk modification in BK-7 glass plates excited by tightly focused high-intensity femtosecond (130fs) Ti: sapphire laser (peak wavelength = 790nm) were demonstrated. The structural modifications with diameters ranging from 400nm to $4{\mu}m$ were photo-induced after plasma formation occurred upon irradiation with peak intensities of more than $1{\times}1013W/cm^2$. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which low-density plasma occurred. The maximum refractive index change was estimated to be $1.5{\times}10^{-2}$. The two optical embedded gratings in BK-7 glass plate were demonstrated with refractive index modification induced by the scanning of low-density plasma formation.

• 한국광학회:학술대회논문집
• /
• 한국광학회 2009년도 동계학술발표회 논문집
• /
• pp.355-356
• /
• 2009

• Journal of the Optical Society of Korea
• /
• 제9권1호
• /
• pp.32-35
• /
• 2005

In light microscopy, spatial resolution is limited by diffraction effect. Confocal microscopy has improved resolutions in both lateral and axial directions, but these are still limited by diffraction effect. Confocal self-interference microscopy (CSIM) uses interference between two perpendicularly polarized beams to enhance lateral resolution. In previous research, we proposed a calcite plate with its optic-axis perpendicular to the propagation angle and one of the boundary surfaces of the plate. This type of plate is not widely used to our knowledge. In this paper, we change the calcite plate to more common one, which is commercially available. This calcite plate has its optic axis in the plane of incidence. We analyze the characteristics of this calcite plate and numerically compare the performances of CSIM in previous research and CSIM with the commercial calcite plate. Numerical results show improved performance when using the commercial calcite plate

• 한국기계가공학회지
• /
• 제11권6호
• /
• pp.139-144
• /
• 2012

In the automobile industry, the various efforts to lower their industrial cost and enhance fuel efficiency have been made through process improvement or weight saving of automobile parts. Gear is one of significant parts of transmission, which is made by cast iron or alloy steel. It is expensive due to complex processing, inferior materials and large machining allowance. In this study, alternative gear cars oil which is based on fluid applications materials is produced by reducing surface induction hardening and carburizing hardened in production. And then, wear characteristic and mechanical properties such as hardness of the sintered alloy which is used as a substitute for small machining allowance is investigated.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2003년도 하계학술대회 논문집 C
• /
• pp.1917-1919
• /
• 2003

본 연구에서는 바이오 및 환경 분야에 적용 가능한 미세 유체소자 제작에 있어서 4" 유리 / 유리 웨이퍼접합을 시도하였으며, 접합결과 90%이상의 접합면적을 보였다. 접합된 샘플을 산 및 알카리 조건에 따른 인장시험결과 모든 조건에서 약 $2kgf/mm^2$ 이상의 접합강도를 보였으며 파괴는 접합면이 아닌 모재에서 발생되었다. 또한 미세유체소자 제작에 있어서 초음파를 이용하여 유리를 가공하였으며, 폭 $300{\mu}m$, 깊이 $200{\mu}m$의 미세채널을 제작하였다.

• 한국정밀공학회지
• /
• 제32권1호
• /
• pp.63-68
• /
• 2015

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.