• 한국진공학회지
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• 제18권2호
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• pp.97-101
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• 2009

현대의 반도체 산업에서 공정 중 가장 큰 비중을 차지하며, 가장 많은 자본과 인력을 소비하는 것이 바로 세정 공정이다. 세정공정은 소자의 작동에 영향을 미치고 기능을 저하시킬 수 있는 이물질 입자들을 제거하는 것이다. 특히 소자를 식각하기 위한 Photoresist(PR) 과정이 끝날 때마다 항상 세정 과정이 포함되어야 했다. 또한, Photoresist(PR) 공정 중 생성된 HDI-PR(high dose implanted photoresist)은 세정 과정에서 제거가 힘들기 때문에 현대의 고밀도 집적회로 세정 공정에서는 건식 세정과 습식 세정을 혼용하여 여러 단계의 세정 공정을 거치게 된다. 이 논문에서는 기존 플라즈마 방식으로 대표되는 건식 세정과 약액으로 대표되는 습식 세정을 동시에 사용하는 방식을 사용하여 약액활성화 방법(Plasma Liquid-Vapor Activation; PLVA)을 제안하여 실험을 실시하였고 HDI-PR을 활성화된 용액에 담근 후 Nano-Indenter를 이용하여 표면강도와 탄성계수를 측정했다. Nano-indenter는 특정한 기하학적 형태를 가지는 Tip을 표면에 압입한 후 압입하중과 압입깊이를 측정함으로서 시료의 표면강도와 탄성계수를 측정하였다. 그 결과 plasma로 활성화된 PR stripper 용액으로 strip한 후의 시료의 표면 강도가 크게 줄어든 것을 확인하였다. 이는 이후 물리적 표면 세정 공정을 후 공정으로 사용한다면 보다 효율적인 HDI-PR을 제거할 수 있을 것으로 사료된다.

• Steel and Composite Structures
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• 제27권3호
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• pp.371-388
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• 2018

In this paper, a new model based on nonlocal high order theory is proposed to study the size effect on the bending of nano-sandwich beams with a compliance core. In this model, in contrast to most of the available sandwich theories, no prior assumptions are made with respect to the displacement field in the core. Herein the displacement and the stress fields of the core are obtained through an elasticity solution. Equations of motion and boundary conditions for nano-sandwich beam are derived by using Hamilton's principle and an analytical solution is presented for simply supported nano-sandwich beam. The results are validated with previous studies in the literature. These results can be utilized in the study of nano-sensors and nano-actuators. The effect of nonlocal parameter, Young's modulus of the core and aspect ratio on the deflection of the nano-sandwich beam is investigated. It is concluded that by including the small-scale effects, the deflection of the skins is increased and by increasing the nonlocal parameter, the influence of small-scale effects on the deflections is increased.

• 한국의류학회지
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• 제34권5호
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• pp.775-783
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• 2010

This study examines the dyeability, light fastness, washing fastness, and the antibacterial activity of chitosan and nano silver composite non-woven fabrics dyed with an extracted solution from Chrysanthemum Indicum Linn. The results show that an increase in the chitosan and nano silver percentage resulted in an increase in the $a^*$ values and $b^*$ values; however, the $L^*$ values decreased in the undyed condition. ${\Delta}E$ values of chitosan and nano silver composite non-woven fabrics were higher than cotton 100% non-woven fabrics in the dyed condition with an extracted solution from Chrysanthemum Indicum Linn, and mordant treatments influenced the chrominance change. In the dyed condition with an extracted solution from Chrysanthemum Indicum Linn, an increase in the percentage of chitosan and nano silver resulted in an increase of the K/S values. The dyeability of chitosan and nano silver composite non-woven fabrics increased by mordant treatments. The light fastness and washing fastness of the mordanted non-woven fabrics were better than the non-mordanted. For the antibacterial activity, the bacterial reduction rate of chitosan and nano silver composite non-woven fabrics was 99.9% to Staphylococcus aureus and Klebsiella pneumoniae.

• Advances in nano research
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• 제15권4호
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• pp.339-353
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• 2023

This work aims to present a solution for the buckling behavior of perforated nano/microbeams with deformable boundary conditions using nonlocal strain gradient theory (NLSGT). For the first time, a solution that can provide buckling loads based on the non-local and strain gradient effects of perforated nanostructures on an elastic foundation, while taking into account both deformable and rigid boundary conditions. Stokes' transformation and Fourier series are used to realize this aim and determine the buckling loads under various boundary conditions. We employ the NLSGT to account for size-dependent effects and utilize the Winkler model to formulate the elastic foundation. The buckling behavior of the perforated nano/microbeams restrained with lateral springs at both ends is studied for various parameters such as the number of holes, the length and filling ratio of the perforated beam, the internal length, the nonlocal parameter and the dimensionless foundation parameter. Our results indicate that the number of holes and filling ratio significantly affect the buckling response of perforated nano/microbeams. Increasing the filling ratio increases buckling loads, while increasing the number of holes decreases buckling loads. The effects of the non-local and internal length parameters on the buckling behavior of the perforated nano/microbeams are also discussed. These material length parameters have opposite effects on the variation of buckling loads. This study presents an effective eigenvalue solution based on Stokes' transformation and Fourier series of the restrained nano/microbeams under the effects of elastic medium, perforation parameters, deformable boundaries and nonlocal strain gradient elasticity for the first time.

• 자원리싸이클링
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• 제14권6호
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• pp.21-27
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• 2005

국내 은 함유 폐자원의 고부가가치 제품화를 위한 연구의 일환으로써 sodium formaldehydesulfoxy와 ascorbic acid를 각각 환원제로 사용한 Ag 나노분발의 제조실험을 수행하였다. Ag수용액은 질산은을 소정 농도로 증류수에 용해시켜 사용하였으며, Ag미립자의 응집방지를 위한 분산제로는 Tamol NN8906, PVP, SDS 및 caprylic acid를 각각 사용하었다. 환원반응을 통하여 제조한 Ag 미립자는 입도분석기 및 TEM측정을 통하여 morphology와 평균입도를 측정하였다. sodium formaldehydesulfoxylate 에 의한 은의 환원을 위해서는 이론치의 1.4배를 첨가해 주어야 하는 것으로 나타났으며, ascorbic acid와는 달리 생성된 Ag 입자가 너무 크게 성장하는 문제점이 있었다. 분산제에 따른 Ag 입자의 특성을 살펴본 결과, Tamol 및 PVP를 사용한 경우에는 bimodal distribution을 보였으나, SDS 와 caprylic acid의 경우에는 수십 nm에서 $100{\mu}m$에 이르는 매우 broad한 입도분포를 보였다.

• 한국재료학회지
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• 제20권3호
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• pp.142-147
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• 2010

Nano-sized $BaNd_2Ti_5O_{14}$ powders were prepared by the spray pyrolysis process. Sucrose used as the organic additive enabled the formation of nano-sized $BaNd_2Ti_5O_{14}$ powders. The powders prepared from the spray solution without sucrose had a spherical shape, dense structure and micron size before and after calcination. However, the precursor powders prepared from the spray solution with sucrose had a large size, and hollow and porous morphology. The precursor powders had an amorphous crystal structure because of the short residence time of the powders inside the hot wall reactor. The complete decomposition of sucrose did not occur inside the hot wall reactor. Therefore, the precursor powders obtained from the spray solution with sucrose of 0.5M had a carbon content of 39.2wt.%. The powders obtained from the spray solution with sucrose of 0.5M had a slightly aggregated structure of nano-sized primary powders of $BaNd_2Ti_5O_{14}$ crystalline phase after calcination at $1000^{\circ}C$. The calcined powders turned into nano-sized $BaNd_2Ti_5O_{14}$ powders after milling. The mean size of the $BaNd_2Ti_5O_{14}$ powders was 125 nm.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.517-519
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• 2009

We fabricated thin film polarizer by coating lyotropic chromonic liquid crystals (LCLCs) dissolved in anionic monomer solution. Compared to water-based technique, the new method provided many advantages such as excellent coatability, good adhesion to various substrates, and superb surface hardness.

• 대한치과보철학회지
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• 제46권3호
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• pp.307-319
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• 2008

STATEMENT OF PROBLEM: It is known that an anodic oxidation technique, one of the methods for the implant surface treatment, remarkably increased surface area, enhanced wettability and accelerated the initial bone healing. Purpose: This study was performed to evaluate the wettability of anodized titanium surface which has a nanotubular structure, to assess osseointegration after the placement of implant with nano-size tubes on tibia of rats and to analyze quantitatively transferable rhBMP-2 on each surface. MATERIAL AND METHOD: Four different kinds of surface-treated titanium discs (polished (machined surface) group, micro (blasting surface) group, nano (anodizedmachined surface) group, and nano-micro (anodized-blasting surface) group) were fabricated (n=10). Three different media were chosen to measure the surface contact angles; distilled water, plasma and rhBMP-2 solution. After a single drop (0.025 $m{\ell}$) of solution, the picture was taken with the image camera, and contact angle was measured by using image analysis system. For the test of osseointegration, 2 kinds of anodized surface (anodized-machined surface, anodized-blasting surface) implants having 2.0 mm in diameter and 5.0 mm in length inserted into the tibia of Wistar rats. After 3 weeks, tibia were harvested and the specimens were stained with hematoxylin and eosin for histological analysis. To test the possibility of drug delivery, after soaking sample groups in the concentration of 250 ng/$m{\ell}$l of rhBMP-2 for 48 hours, the excess solution of rhBMP-2 were removed. After that, they were lyophilized for 24 hours, and then the rhBMP-2 on the surface of titanium was resolved for 72 hours in PBS. All the extracted solution was analyzed by ELISA. One-way analysis of variance (ANOVA) was performed on the data. RESULTS: The wettability is improved by anodic oxidation. The best wettability was shown on the nano-micro group, and it was followed by nano group, micro group, and polished group. In the histological findings, all implants showed good healing and the new bone formation were observed along the implant surface. After 3 days, nano-micro group delivered the most amount of rhBMP-2, followed by nano group, micro group, and polished group. CONCLUSION: It indicated that anodic oxidation on blasting surface produce functionally graded nano-micro porous structure and enhance hydrophilicity of the surface and osseointegration. The findings suggest that the nano-micro porous structure could be a useful carrier of osteogenic molecules like rhBMP-2.

• 한국표면공학회지
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• 제41권5호
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• pp.226-231
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• 2008

Titanium and its alloy have been widely used in dental implant and orthopedic prostheses. Electrochemical characteristics of dental implant in the various simulated body fluids have been researched by using electrochemical methods. Ti-6Al-4V alloy implant was used for corrosion test in 0.9% NaCl, artificial saliva and simulated body fluids. The surface morphology was observed using scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX). The electrochemical stability was investigated using potentiosat (EG&G Co, 263A). The corrosion surface was observed using scanning electron microscopy (SEM). From the results of potentiodynamic test in various solution, the current density of implant tested in SBF and AS solution was lower than that of implant tested in 0.9% NaCl solution. From the results of passive film stability test, the variation of current density at constant 250 mV showed the consistent with time in the case of implant tested in SBF and AS solution, whereas, the current density at constant 250mV in the case of implant tested in 0.9% NaCl solution showed higher compared to SBF and AS solution as time increased. From the results of cyclic potentiodynamic test, the pitting potential and |$E_{pit}\;-\;E_{corr}$| of implant tested in SBF and AS solution were higher than those of implant tested in 0.9% NaCl solution.

• 제어로봇시스템학회논문지
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• 제14권5호
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.