• 한국재료학회지
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• 제25권6호
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• pp.300-304
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• 2015

Nanorod ZnO and spherical nano ZnO for gas sensors were prepared by hydrothermal reaction method and hydrazine method, respectively. The nano-ZnO gas sensors were fabricated by a screen printing method on alumina substrates. The gas sensing properties were investigated for hydrocarbon gas. The effects of Co concentration on the structural and morphological properties of the nano ZnO:Co were investigated by X-ray diffraction and scanning electron microscope (SEM), respectively. XRD patterns revealed that nanorod and spherical ZnO:Co with a wurtzite structure were grown with (100), (002), (101) peaks. The sensitivity of nanorod and spherical ZnO:Co sensors was measured for 5 ppm $CH_4$ and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in target gases. The highest sensitivity to the $CH_4$ and $CH_3CH_2CH_3$ gas of spherical nano ZnO:Co sensors was observed at Co 6 wt%. The spherical nano ZnO:Co sensor exhibited a higher sensitivity to hydrocarbon gas than nanorod ZnO.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2008년도 Asian Magnetics Conference
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• pp.29.2-29.2
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• 2008

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.355-360
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• 2013

A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

• 센서학회지
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• 제19권6호
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• pp.462-468
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• 2010

A low power gas sensor with microheater was fabricated by MEMS technology. In order to heat up the gas sensing material to a operating temperature, a platinum(Pt) micro heater was built on to the micromachined Si substrate. The width and gap of microheater were $20\;{\mu}m$ and $4.5\;{\mu}m$, respectively. ZnO nanowhisker arrays were fabricated on a sensor device by hydrothermal method. The sensor device was deposited with ZnO seeds using PLD systems. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growthing ZnO nanowhiskers. The power consumption to heat up the gas sensor to a operating temperature was measured and temperature distribution of sensor was analyzed by a Infrared Thermal Camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high(64 %) sensitivity was obtained even at as low as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$ and was only 25 mW at $150^{\circ}C$.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Bulletin of the Korean Chemical Society
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• 제33권7호
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• pp.2359-2364
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• 2012

Two new chemosensors, rhodamine 6G derivative bearing hydroxyethyl group (1) and rhodamine base derivative bearing 15-crown-5 group (2) were synthesized and their sensing behaviors toward various metal ions were investigated by UV/Vis and fluorescence spectroscopies. Addition of $Hg^{2+}$ ion to a $CH_3CN$ solution of 1 and 2 gave visual color changes as well as fluorescent OFF-ON observations. Selectivity and sensitivity of 1 towards $Hg^{2+}$ are excellent enough to detect micromolar level of $Hg^{2+}$ ion, even in equeous media and biological sample (HeLa cell).

• 센서학회지
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• 제19권6호
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• pp.475-482
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• 2010

Rogowski coil which detects magnetic flux on current changes. It is used for digital integration with watt-hour meter's current sensor, because, Rogowski coil has non-cored or non-magnetic core structure, so that, it cannot be saturated magnetically. This is a study for inventing accurate electric current sensors that have been applied on multi-layer ceramic substrate. We have confirmed its properties from each different layer's materials and pattern sizes by MWS 3D Electromagnetic field analysis program. And, after sensor manufacturing on multi-layer ceramic substrate, we confirmed its sensing quality is reliable as accurate electric current sensor for watt-hour meter.

• 센서학회지
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• 제24권5호
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• pp.281-286
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• 2015

The importance of air quality monitoring is rapidly increasing. Even though state-of-the-art air quality monitoring technologies such as mass spectrometry, gas chromatography, and optical measurement enable high-fidelity measurement of air pollutants, they cannot be widely used for portable or personalized platforms because of their high cost and complexity. Recently, personalized and localized environmental monitoring, rather than global and averaged environmental monitoring, has drawn greater attention with the advancement of mobile telecommunication technologies. Here, micro- and nano-technologies enable highly integrated and ultra-compact sensors to meet the needs of personalized environmental monitoring. In this paper, several examples of MEMS-based gas sensors for compact and personalized air quality monitoring are explained. Additionally, the principles and usage of functional nanomaterials are discussed for highly sensitive and selective gas sensors.

• Rapid Communication in Photoscience
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• 제2권2호
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• pp.46-51
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• 2013

This study reports a fiber-optic sensor detecting biomolecule by simultaneously monitoring localized surface plasmon resonance (LSPR) from gold nanoparticles (Au NPs) of ca. $50{\pm}5$ nm attached on one end of optical fiber and surface enhanced Raman scattering (SERS) of the reporter molecules adsorbed on the gold surfaces as an additional sensing tool. The sensor was fabricated by immobilizing Au NPs on one end of an optical fiber by chemical reaction. LSPR and SERS signals of the sensor were measured using various refractive indices solutions. Finally, the sensor was applied to observe real-time LSPR sensor-gram and SERS spectra of the reporter molecule of 4-aminothiphenol during the antibody-antigen reaction of interferon-gamma (IFN-${\gamma}$) as a proof-concept experiment of biological applications.