• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.217-217
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• 2003

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1273-1279
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• 2013

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.1
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• pp.29-51
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• 1997

The purpose of the survey is to identify possible new areas of research relating to nanotechnology and in particular areas in which the established facilities of the Centre for Metrology can be employed to good effect. This survey indicates that nanotechnology, a sub set of the more embracing Nano Science, is a rapidly developing discipline with good potential for Electronic and Mechanical Engineering. Nanotechnology includes three areas: Nanometrology, Nanometer positioning and Control, and Nanomanufacturing. In each of the areas, the current research situation and developing trends have been summarised. Possibilities for future work indicated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.180-185
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• 2003

Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modem control theory, dual servo algorithm is developed by minimum order observer, and stability priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.10
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• pp.728-737
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• 2019

In this study, the minimized on-board computer (OBC) module for integrated navigation is developed, which provides satellites' relative position information in formation flying and cluster operation situations. The scalability is considered to apply the user-selected wireless communication module and Global Positioning System (GPS) receiver for navigation, while considering to meet the structural design standard of nano-satellites. As a result of the product development and production, the processing speed of integrated navigation and real-time data synchronization is satisfied for cluster operation nano-satellites by using micro controller unit (MCU). From a heat/vacuum, vibration and radiation test, the OBC was confirmed to be operated in space environments. From these results, a mass production system of OBC was made which is a key part of development on satellite formation flying and cluster/constellation missions that the community demands are increasing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.391-392
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.917-918
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• 2011

• Journal of Electrical Engineering and Technology
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• v.7 no.4
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• pp.558-563
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• 2012

In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $10{\times}10$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}3urad$, ${\pm}2urad$, ${\pm}1urad$]The errors of long stroke movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}1.5urad$, ${\pm}2urad$, ${\pm}0.5urad$].