• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1101-1106
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• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.27-28
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• 2012

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.194-194
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• 2011

The effects of argon neutral beam (NB) energy on the amorphous carbon (a-C) films were investigated, while the a-C films were deposited by neutral particle beam assisted sputtering (NBAS) system. The energy of neutral particle beam can be controlled by reflector bias voltage directly as a unique operating parameter in this system. The deposition characteristics of the films investigated of Raman spectra, UV-visible spectroscopy, electrical conductivity, stress measurement system, and ellipsometer indicate the properties of amorphous carbon films can be manipulated by only NB energy (or reflector bias voltage) without changing any other process parameters. We report the effect of reflector bias voltage in the range from 0 to -1KV. By the increase of the reflector bias voltage, the amount of cross-linked sp2 clusters as well as the sp3 bonding in the a-C film coated by the NBAS system can be increased effectively and the composition of carbon thin films can be changed from nano-crystalline graphite phase to amorphous carbon phase.

• Journal of the Korean institute of surface engineering
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• v.39 no.4
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• pp.153-159
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• 2006

Nanodiamond films were deposited on Si substrate by introducing a time dependent on/off modulation of $CH_4\;and\;O_2$ flows in a vertical-type microwave plasma enhanced chemical vapor deposition system. Surface morphology and diamond quality of the film were investigated as a function of the on/off modulation time interval. The diamond nucleation density on the substrate was enhanced under low temperature and low pressure condition. In addition, the diamond nucleation density was enhanced by increasing the on/off modulation time interval. Enhanced diamond quality was noticeable under the condition of a longer on/off modulation time interval. It was suggested that the nanodiamond nuclei formed the cluster formation.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.477-477
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• 2012

The effects of argon neutral beam (NB) energy on the amorphous carbon (a-C) films were investigated, while the a-C films were deposited by neutral particle beam assisted sputtering (NBAS) system. The deposition characteristics of these films were studied as a function of NB energy (or reflector bias voltage). The film structures were investigated by Raman spectroscopy. The hardness was measured by nano-indentation tests and the optical band gap was measured by UV-visible spectroscopy.

• Safety and Health at Work
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• v.2 no.3
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• pp.282-289
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• 2011

Objectives: We sought to establish a novel method to generate nano-sized carbon black particles (nano-CBPs) with an average size smaller than 100 nm for examining the inhalation exposure risks of experimental rats. We also tested the effect of nano-CBPs on the pulmonary and circulatory systems. Methods: We used chemical vapor deposition (CVD) without the addition of any additives to generate nano-CBPs with a particle size (electrical mobility diameter) of less than 100nm to examine the effects of inhalation exposure. Nano-CBPs were applied to a nose-only inhalation chamber system for studying the inhalation toxicity in rats. The effect on the lungs and circulatory system was determined according to the degree of inflammation as quantified by bronchoalveolar lavage fluid (BALF). The functional alteration of the hemostatic and vasomotor activities was measured by plasma coagulation, platelet activity, contraction and relaxation of blood vessels. Results: Nano-CBPs were generated in the range of 83.3-87.9 nm. Rats were exposed for 4 hour/day, 5 days/week for 4 weeks to $4.2{\times}10^6$, $6.2{\times}10^5$, and $1.3{\times}10^5$ particles/$cm^3$. Exposure of nano-CBPs by inhalation resulted in minimal pulmonary inflammation and did not appear to damage the lung tissue. In addition, there was no significant effect on blood functions, such as plasma coagulation and platelet aggregation, or on vasomotor function. Conclusion: We successfully generated nano-CBPs in the range of 83.3-87.9 nm at a maximum concentration of $4.2{\times}10^6$ particles/$cm^3$ in a nose-only inhalation chamber system. This reliable method can be useful to investigate the biological and toxicological effects of inhalation exposure to nano-CBPs on experimental rats.

• Journal of Powder Materials
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• v.18 no.2
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• pp.112-121
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• 2011

This study investigated the effect of solvent on the fabrication of Ni-free Fe-based alloy nano powders by employing the PWE (pulsed wire evaporation) in liquid and compared the alloy particles fabricated by three different methods (PWE in liquid, PWE in Ar, plasma arc discharge), for high temperature oxidation-resistant metallic porous body for high temperature soot filter system. Three different solvents (ethanol, acetone, distilled water) of liquid were adapted in PWE in liquid process, while X-ray diffraction (XRD), field emission scanning microscope (FE-SEM), and transmission electron microscope (TEM) were used to investigate the characteristics of the Fe-Cr-Al nano powders. The alloy powder synthesized by PWE in ethanol has good particle size and no surface oxidation compared to that of distilled water. Since the Fe-based alloy powders, which were fabricated by PWE in Ar and PAD process, showed surface oxidation by TEM analysis, the PWE in ethanol is the best way to fabricate Fe-based alloy nano powder.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.37.2-37.2
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• 2009

다이렉트 프린팅 방식에 대한 수요가 높아지면서 마이크로 노즐에 대한 수요도 높아지고 있다. 마이크로 노즐은 Nano particle deposition system (NPDS)에서 가장 중요한 부분으로 금속이나 세라믹 분말을 음속으로 가속시키는 역할을 한다. 또한 마이크로 노즐은 마이크로 스페이스 셔틀과 주사바늘이 없는 약물 주사 시스템 등의 많은 분야에서 사용 가능하다. 이러한 마이크로 노즐은 대부분 기계적 절삭법을 이용하여 알루미늄으로 만들어져왔다. 하지만 알루미늄으로 만들어진 마이크로 노즐은 경도가 낮아 세라믹 나노 입자를 적층하는 것에 적절치 못하며 사용가능한 수명이 짧다는 단점을 가지고 있다. 또한 가장 큰 단점으로 노즐목을 1mm이하로 제작하는 것이 어렵다는 것이다. 따라서 본 연구에서는 Si wafer를 Deep RIE 방식을 이용하여 3차원적으로 제작하였다. Deep RIE 방식 중 BOSCH process를 이용하였다. 이렇게 만들어진 마이크로 노즐은 다이렉트 프린팅 방식중 하나인 NPDS에 적용하였다. Si wafer로 만들어진 마이크로 노즐이 적용된 NPDS를 이용하여 graphite 분말을 가속하여 적층 실험을 실시하였다 이와 함께 전산 유체 역학(CFD)를 이용하여 마이크로 노즐일 이용한 초음속 가속 가능 여부를 판단하였다. 전산 유체 역학은 유한 요소법을 이용하여 유체의 거동을 시뮬레이션을 통하여 예측하는 것으로 마이크로 노즐 내에서 유체의 흐름을 예상할 수 있다. 실제 실험의 결과와 전산 유체 역학을 이용한 시뮬레이션 결과dml 비교 분석을 실시하였다.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.6
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• pp.491-495
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• 2014

We developed a compact high-precision slot-die coating machine for thin-film deposition on a flexible substrate. For smooth and precise coating, air-bearing and linear motor system were employed to minimize velocity ripple. The gap control mechanism is specially designed to have repeatability of gap between nozzle and substrate under 1 ${\mu}m$. Due to extremely precise gap control, the machine can coat thin-films down to 50 nm with $200mm{\times}100mm$ size. A thin film of Ag nano-particle ink is coated for demonstration.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.38.2-38.2
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• 2009

마이크로노즐은 우주공간에서 인공위성의 자세를 바로잡는 데 필요한 마이크로 로켓에 들어가는 필수적인 부품이다. 마이크로 노즐은 또한 나노입자 적층 시스템(nano-particle deposition system, NPDS)에 들어갈 수 있다. NPDS는 세라믹 또는 금속 나노분말 입자를 노즐을 통해 초음속으로 가속시킨 뒤 상온에서 이를 기판에 적층시키는 새로운 시스템이다. 본 연구의 목표는 NPDS에 쓰이는 노즐을 일반적인 반도체 공정을 이용하여 마이크론 스케일의 목을 갖도록 한 마이크로노즐을 제작하는 데 있다. 보쉬 공정은 이러한 마이크로노즐을 제작하는데 필수적인 공정으로, 유도결합플라즈마를 이용해 실리콘 웨이퍼를 식각시키는 기술을 말한다. 보쉬 공정에 사용되는 플라즈마 기체는 $SF_6$와 $C_4F_8$인데, 이 두 가지 기체를 번갈아가면서 사용하여 실리콘 웨이퍼를 이방성 식각하는 것이 그 특징이다. 보쉬 공정에는 다양한 변수가 존재하며 이를 적절히 통제하면 마이크로노즐에 적합한 프로파일을 실리콘 웨이퍼 내에 형성시킬 수 있다. 본 연구에서는 보쉬 공정을 이용하여 3차원 마이크로 노즐을 제작하였다. 기존에 반응성이온식각(deep reactive ion etching, DRIE) 공정을 통해 마이크로노즐을 제작한 사례가 많이 보고되었지만 이들은 모두 2차원적으로 마이크로노즐을 제작하였다. 2차원적으로 제작한 마이크로노즐은 마이크로 로켓에 주로 사용되었지만, 초음속으로 가속된 분말이 노즐의 형상으로 인한 유체 흐름의 불안정성 때문에 NPDS에서는 오래도록 사용할 수 없다는 문제점이 있다. 그러므로 본 연구에서는 마이크로노즐을 3차원 형상으로 제작함으로써 이러한 문제점을 해결하고자 하였다.