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http://dx.doi.org/10.7736/KSPE.2014.31.6.491

High-Precision Slot-Die Coating Machine for Thin Films of Flexible Display  

Choi, Young-Man (Department of Printed Electronics, Korea Institute of Machinery and Materials)
Lee, Seung-Hyun (Department of Printed Electronics, Korea Institute of Machinery and Materials)
Jo, Jeongdai (Department of Printed Electronics, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.6, 2014 , pp. 491-495 More about this Journal
Abstract
We developed a compact high-precision slot-die coating machine for thin-film deposition on a flexible substrate. For smooth and precise coating, air-bearing and linear motor system were employed to minimize velocity ripple. The gap control mechanism is specially designed to have repeatability of gap between nozzle and substrate under 1 ${\mu}m$. Due to extremely precise gap control, the machine can coat thin-films down to 50 nm with $200mm{\times}100mm$ size. A thin film of Ag nano-particle ink is coated for demonstration.
Keywords
Slot Die Coating; Velocity Control; Precision Machine;
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