• 한국광학회지
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• 제28권2호
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• pp.53-58
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• 2017

본 논문은 집적화된 소형의 분광모듈 구현을 위한 나노회절격자의 설계 및 제작에 관한 연구이다. 제안된 평면 구조의 나노회절격자는 회절격자로부터 반사된 빛을 집광하기 위하여 비등간격의 구조로 설계되었으며, 400 nm에서 650 nm까지의 파장 대역폭에서 균등한 분해능을 가지도록 비대칭 V 홈 구조를 가지도록 설계되었다. 최적 설계된 나노회절격자를 저가, 대량 생산에 적합한 UV-NIL 공정을 통해 제작하기 위하여 FT-IR 흡수스펙트럼을 분석하였으며, 이를 통해 5 nm 이내의 치수 정밀도를 가진 고분자 나노회절격자를 제작 할 수 있었다. 제작된 고분자 기반 나노회절격자를 이용한 집적형 분광모듈은 250 nm의 파장 대역폭에서 각 첨두파장의 기준으로 5 nm의 균등한 파장 분해능을 확인하였으며, 이는 다양한 분광모듈의 적용분야에 적용될 것으로 기대된다.

• 마이크로전자및패키징학회지
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• 제22권3호
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• pp.73-77
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• 2015

본 논문에서는 저가로 쉽게 제작할 수 있는 구조를 지닌 단일칩 형태의 고분자 기반 평판형 분광모듈을 제안하였다. 제안된 분광모듈은 UV 임프린트 기법에 의해 제작되어진 비등간격 나노회절격자와 오목거울이 포함된 평판형 광도파로로 구성되어진다. 회절효율을 향상시키기 위해 나노회절격자의 구조는 $25^{\circ}$의 블레이징 각도와 100nm의 선폭을 가지도록 설계, 제작되었다. 평판형 분광모듈은 700 nm 대역폭과 10 nm 분해능을 가짐을 확인하였다. 이러한 집적형 고분자 분광모듈은 다양한 센서 시스템에 적용될 수 있을 것으로 기대된다.

• 한국정밀공학회지
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• 제23권8호
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• pp.72-79
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• 2006

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.

• 한국레이저가공학회지
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• 제17권2호
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• pp.19-25
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• 2014

Optical embedded diffraction gratings with the bulk modification in BK-7 glass plates excited by tightly focused high-intensity femtosecond (130fs) Ti: sapphire laser (peak wavelength = 790nm) were demonstrated. The structural modifications with diameters ranging from 400nm to $4{\mu}m$ were photo-induced after plasma formation occurred upon irradiation with peak intensities of more than $1{\times}1013W/cm^2$. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which low-density plasma occurred. The maximum refractive index change was estimated to be $1.5{\times}10^{-2}$. The two optical embedded gratings in BK-7 glass plate were demonstrated with refractive index modification induced by the scanning of low-density plasma formation.

• 한국광학회지
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• 제24권2호
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• pp.53-57
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• 2013

본 논문에서는 금속 슬릿 배열로 구성된 편광 선택 가능한 블레이즈드 회절 격자를 제안한다. 마이크로 스케일의 블레이즈드 회절 격자를 디자인 하고 이 구조에 추가적으로 나노스케일의 금속 슬릿 구조를 적용하여 편광 선택기능을 부여하였다. 이 소자에 대하여 사례 연구로 예를 디자인하여 FDTD(Finite Difference Time Domain method)방법을 이용한 전산모사를 통해 성능을 검증해 보았다. 임의의 디자인 사례에 대해 대략 77.61% 의 회절효율과 8.99의 편광선택비가 얻어졌으며 편광선택비를 높이기 위한 또 다른 디자인에서는 64.22%의 회절효율과 81.09의 편광선택비가 얻어졌다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.1212-1215
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• 2004

Diffraction modes of holographic grating were fabricated with polyurethane acrylates(PUA). Two types of silica (AEROSIL 200 and AEROSIL R812) were added to reduce the shrinkage of polymer matrix. It was founded that shrinkage of PUA composite film was reduced with the addition of silica. HPDLC based PUA/silica composite also showed high diffraction efficiency. The morphology of the resultant gratings was analyzed by using scanning electron microscopy(SEM) and Tg of the polymer matrix by dynamic mechanical thermal analysis(DMTA).

• Current Optics and Photonics
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• 제5권2호
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• pp.134-140
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• 2021

In this paper, I introduce a novel design method of a high performance nanophotonic beam deflector providing broadband operation, large active tunability, and signal efficiency, simultaneously. By combining thermo-optically tunable vanadium dioxide nano-ridges and a metallic mirror, reconfigurable local optical phase of reflected diffraction beams can be engineered in a desired manner over broad bandwidth. The active metagrating deflectors are systematically designed for tunable deflection of reflection beams according to the thermal phase-change of vanadium dioxide nano-ridges. Moreover, by multiplexing the phase-change supercells, a robust design of actively tunable beam splitter is also verified numerically. It is expected that the proposed intuitive and simple design method would contribute to development of next-generation optical interconnects and spatial light modulators with high performances. The author also envisions that this study would be fruitful for modern holographic displays and three-dimensional depth sensing technologies.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• Journal of the Optical Society of Korea
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• 제13권3호
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• pp.330-334
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• 2009

A simple and compact frequency swept laser is demonstrated at $1.3{\mu}m$ using a wavelength scanning filter based on a rotating slit disk. The laser is comprised of a pigtailed semiconductor optical amplifier, a circulator, and a wavelength scanning filter in an extended cavity configuration. The wavelength scanning filter is composed of a collimator, a diffraction grating, a rotating slit disk, and a mirror. The instantaneous laser output power is more than 5 mW. The scanning range of the laser is extended to 80 nm at the maximum level, and 55 nm in the full width at half maximum at a scanning rate of 2 kHz.