• Journal of the Microelectronics and Packaging Society
• /
• v.30 no.2
• /
• pp.65-70
• /
• 2023

Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL technologies is generally limited to the micro level. Here, we introduce a novel hard imprint lithography method, extreme-pressure imprint lithography (EPIL), for the direct nano-to-microscale pattern formation on the surfaces of metal substrates with various thicknesses. The EPIL process allows reliable nanoscopic patterning on diverse surfaces, such as polymers, metals, and ceramics, without the use of ultraviolet (UV) light, laser, imprint resist, or electrical pulse. Micro/nano molds fabricated by laser micromachining and conventional photolithography are utilized for the nanopatterning of Al substrates through precise plastic deformation by applying high load or pressure at room temperature. We demonstrate micro/nanoscale pattern formation on the Al substrates with various thicknesses from 20 ㎛ to 100 mm. Moreover, we also show how to obtain controllable pattern structures on the surface of metallic materials via the versatile EPIL technique. We expect that this imprint lithography-based new approach will be applied to other emerging nanofabrication methods for various device applications with complex geometries on the surface of metallic materials.

• Korean Chemical Engineering Research
• /
• v.60 no.2
• /
• pp.229-236
• /
• 2022

An experimental investigation was conducted on the influences of median size, dust concentration, dust condition (cloud and layer) for the fire and explosion hazard assessment of dusts with the same powder property. For this purpose, tests have been performed in accordance with 20 L explosion sphere, thermogravi- metric analyze, combustion rate tester (UN method). We investigated the explosion characteristics and flame propagation velocity (FPV) in dust cloud and the flame spread velocity(FSV) over dust layer on 8 dust samples with different particle sizes of 4 types of dusts (Sugar, Mg, Al, Zr). An explosion hazard increased with decreasing particle size in Mg and Al dust clouds, but sugar did not show the effect of explosion hazard due to particle size change in dust clouds. The flame propagation velocity (FPV) of suspended dusts increased significantly when the particle size decreased from micro to nano than the variation of particle size in micro range. The flame spread velocity (FSV) over dust layer showed a tendency to increase over the inclined dust layers (30° slope) rather than the horizontal dust layers (0° slope). The flame spread rate (FSV) over dust layers increased on the inclined dust layer (30° slope) rather than the horizontal dust layer (0° slope) and was higher upward flame than the downward flame in condition of inclined dust layers(30° slope).

• Journal of the Korean Vacuum Society
• /
• v.21 no.1
• /
• pp.48-54
• /
• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and SF6 as an additive gas under thermal chemical vapor deposition system. The geometries of as-grown carbon materials were investigated with increasing the reaction temperature as the increment of $25^{\circ}C$ from $650^{\circ}C$ up to $800^{\circ}C$. At $650^{\circ}C$, the embryos for carbon coils were formed. With increasing the reaction temperature to $700^{\circ}C$, the coil-type geometries were developed. Further increasing the reaction temperature to $775^{\circ}C$, the development of wave-like nano-sized coils, instead of nano-sized coils, and occasional appearance of micro-sized carbon coils could be observed. Fluorine in $SF_6$ additive may shrink the micro-sized coil diameter via the reduction of Ni catalyst size by fluorine's etching role. Finally, the preparation of the micro-sized carbon coils having the smaller coil diameters, compared with the previously reported ones, could be possible using $SF_6$ additive.

• Korean Journal of Environmental Biology
• /
• v.40 no.1
• /
• pp.54-69
• /
• 2022

We conducted a field survey from 2018 to 2020 to analyze the spatial distribution of phytoplankton communities at 13 stations in the East Sea. The diatom Chaetoceros curvisetus appeared as the dominant species in winter, and small flagellates less than 20 ㎛ prevailed in all seasons except winter. The seasonal average range of the micro (>20 ㎛), nano (20 ㎛≥Chl-a>3 ㎛), and picophytoplankton (≤3 ㎛) was 20.6-26.2%, 27.1-35.9%, and 40.8-49.0%, respectively. The composition ratio of nano and picophytoplankton was high at the surface mixed layer from spring to autumn when the water columns were strongly stratified. Especially, the stability of the water mass was increased when the summer surface water temperature was higher than that of the previous year. As a result, the nutrient inflow from the lower layer to the surface was reduced as the ocean stratification layer was strengthened. Therefore, the composition ratio of nano and picophytoplankton was the highest at 77.9% at the surface mixed layer. In conclusion, the structure of the phytoplankton community in the East Sea has been miniaturized, which is expected to form a complex microbial food web structure and lower the carbon transfer rate to the upper consumer stage.

• Korean Journal of Materials Research
• /
• v.23 no.4
• /
• pp.246-249
• /
• 2013

Nano-sized ${\beta}$-SiC nanoparticles were synthesized combined with a sol-gel process and a carbothermal process. TEOS and carbon black were used as starting materials for the silicon source and carbon source, respectively. $SiO_2$ nanoparticles were synthesized using a sol-gel technique (Stober process) combined with hydrolysis and condensation. The size of the particles could be controlled by manipulating the relative rates of the hydrolysis and condensation reactions of tetraethyl orthosilicate (TEOS) within the micro-emulsion. The average particle size and morphology of synthesized silicon dioxide was about 100nm and spherical, respectively. The average particles size and morphology of the used carbon black powders was about 20nm and spherical, respectively. The molar ratio of silicon dioxide and carbon black was fixed to 1:3 in the preparation of each combination. $SiO_2$ and carbon black powders were mixed in ethanol and ball-milled for 12 h. After mixing, the slurries were dried at $80^{\circ}C$ in an oven. The dried powder mixtures were placed in alumina crucibles and synthesized in a tube furnace at $1400{\sim}1500^{\circ}C$ for 4 h with a heating rate of $10^{\circ}C$/min under flowing Ar gas (160 cc/min) and furnace cooling down to room temperature. SiC nanoparticles were characterized by XRD, TEM, and SAED. The XRD results showed that high purity beta silicon carbide with excellent crystallinity was synthesized. TEM revealed that the powders are spherical shape nanoparticles with diameters ranging from 15 to 30 nm with a narrow distribution.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.6
• /
• pp.433-439
• /
• 2011

Poly Si TFTs (poly silicon thin film transistors) with p channel those are annealed HT (high temperature) with gate poly crystalline silicon and LT (low temperature) with metal gate electrode were fabricated on quartz substrate using the analyzed data and compared according to the activated grade silicon thin films and the size of device channel. The electrical characteristics of HT poly-Si TFTs increased those are the on current, electron mobility and decrease threshold voltage by the quality of particles of active thin films annealed at high temperature. But the on/off current ratio reduced by increase of the off current depend on the hot carrier applied to high gate voltage. Even though the size of the particles annealed at low temperature are bigger than HT poly-Si TFTs due to defect in the activated grade poly crystal silicon and the grain boundary, the characteristics of LT poly-Si TFTs were investigated deterioration phenomena those are decrease the electric off current, electron mobility and increase threshold voltage. The results of transconductance show that slope depend on the quality of particles and the amplitude depend on the size of the active silicon particles.

• Korean Journal of Materials Research
• /
• v.20 no.7
• /
• pp.374-378
• /
• 2010

$MgTiO_3$ thin films were prepared by r.f. magnetron sputtering in order to prepare miniaturized NPO type MLCCs. $MgTiO_3$ films showed a polycrystalline structure of ilmenite characterized by the appearance of (110) and (202) peaks. The intensity of the peaks decreased with an increase in the chamber pressure due to the decrease of crystallinity which resulted from the decrease of kinetic energy of the sputtered atoms. The films annealed at $600^{\circ}C$ for 60min. showed a fine grained microstructure without micro-cracks. The grain size and roughness of the $MgTiO_3$ films decreased with the increase of chamber pressure. The average surface roughness was 1.425~0.313 nm for $MgTiO_3$ films prepared at 10~70 mTorr. $MgTiO_3$ films showed a dielectric constant of 17~19.7 and a dissipation factor of 2.1~4.9% at 1MHz. The dielectric constant of the films is similar to that of bulk ceramics. The dielectric constant and the dissipation factor decreased with the increase of the chamber pressure due to the decrease of grain size and crystallinity. The leakage current density was $10^{-5}\sim10^{-7}A/cm^2$ at 200kV/cm and this value decreased with the increase of the chamber pressure. The small grain size and smooth surface microstructure of the films deposited at high chamber pressure resulted in a low leakage current density. $MgTiO_3$ films showed a near zero temperature coefficient and satisfied the specifications for NPO type materials. The dielectric properties of the $MgTiO_3$ thin films prepared by sputtering suggest the feasibility of their application for MLCCs.

• ALGAE
• /
• v.21 no.1
• /
• pp.83-90
• /
• 2006

Phytoplankton community in the coastal waters off the northeastern Korean Peninsula were characterized from May 2002 to August 2003. Taxonomic composition, abundance and biomass were determined at two water depths at 10 sample sites. A total of 153 phytoplankton species including 121 diatoms, 28 dinoflagellates, 7 green algae and 7 other species were identified. The mean abundance of phytoplankton varied from 15 to 430 cells mL–1 in the surface layer and from 11 to 545 cells mL–1 in the bottom layer, respectively. Phytoplankton was more abundant in coastal stations relative to those in more open ocean. The most dominant species were marine diatoms such as Thalassionema nitzschioides, Licmorphora abbreviata, Chaetoceros affinis and Chaetoceros socialis. In addition, a few limnotic diatoms including Fragilaria capucina v. rumpens, the green alga Scenedesmus dimorphus, some marine dinoflagellates and Cryptomonas sp. appeared as dominant species. Mean concentration of total chlorophyll-a varied from 0.22 to 7.87 μg chl-a L–1 and from 0.45 to 6.79 μg chl-a L–1 in the surface and bottom layers, respectively. The contribution of phytoplankton each size-fractionated varied highly with season. The contribution of microphytoplankton to total biomass of phytoplankton in the surface and bottom layer was high in February and August 2003, and that of nano-phytoplankton was high in May 2002 in both surface and bottom layers.

• Korean Journal of Materials Research
• /
• v.23 no.1
• /
• pp.31-34
• /
• 2013

Trivalent cerium-ion-doped $Y_3(Al,\;Ga)_5O_{12}$ nanoparticle phosphor nanoparticles were synthesized using the reverse micelle process. The Ce doped $Y_3(Al,\;Ga)_5O_{12}$ particles were obtained from nitrate solutions dispersed in the nanosized aqueous domains of a micro emulsion consisting of cyclohexane as the oil phase and poly(oxyethylene) nonylphenyl ether (Igepal CO-520) as the non-ionic surfactant. The crystallinity, morphology, and thermal properties of the synthesized $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ powders were characterized by thermogravimetry-differential thermal analysis (TGA-DTA), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), and transmission electron microscopy. The crystallinity, morphology, and chemical states of the ions were characterized; the photo-physical properties were studied by taking absorption, excitation, and emission spectra for various concentrations of cerium. The photo physical properties of the synthesized $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ powders were studied by taking the excitation and emission spectra for various concentrations of cerium. The average particle size of the synthesized YAG powders was below $1{\mu}m$. Excitation spectra of the $Y_3Al_5O_{12}$ and $Y_3Al_{3.97}Ga_{1.03}O_{12}$ samples were 485 nm and 475 nm, respectively. The emission spectra of the $Y_3Al_5O_{12}$ and $Y_3Al_{3.97}Ga_{1.03}O_{12}$ were around 560 nm and 545 nm, respectively. $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ is a red-emitting phosphor; it has a high efficiency for operation under near UV excitation, and may be a promising candidate for photonic applications.

• Wind and Structures
• /
• v.25 no.2
• /
• pp.131-156
• /
• 2017

This paper deals with the dynamic stability of embedded functionally graded (FG)-carbon nanotubes (CNTs)-reinforced micro cylindrical shells. The structure is subjected to harmonic non-uniform temperature distribution and 2D magnetic field. The CNT reinforcement is either uniformly distributed or FG along the thickness direction where the effective properties of nano-composite structure are estimated through Mixture low. The viscoelastic properties of structure are captured based on the Kelvin-Voigt theory. The surrounding viscoelastic medium is considered nonhomogeneous with the spring, orthotropic shear and damper constants. The material properties of cylindrical shell and the viscoelastic medium constants are assumed temperature-dependent. The first order shear deformation theory (FSDT) or Mindlin theory in conjunction with Hamilton's principle is utilized for deriving the motion equations where the size effects are considered based on Eringen's nonlocal theory. Based on differential quadrature (DQ) and Bolotin methods, the dynamic instability region (DIR) of structure is obtained for different boundary conditions. The effects of different parameters such as volume percent and distribution type of CNTs, mode number, viscoelastic medium type, temperature, boundary conditions, magnetic field, nonlocal parameter and structural damping constant are shown on the DIR of system. Numerical results indicate that the FGX distribution of CNTs is better than other considered cases. In addition, considering structural damping of system reduces the resonance frequency.