• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.240-245
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• 2005

In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.

• 한국정밀공학회지
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• 제22권6호
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• pp.7-14
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• 2005

• Applied Microscopy
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• 제36권spc1호
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• pp.47-56
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• 2006

Improvements are made to existing primitive cell volume measurement method to provide a real-time analysis capability for the phase analysis of nanocrystalline materials. Simplification is introduced in the primitive cell volume calculation leading to fast and reliable method for nano-phase identification and is applied to the phase analysis of Mo-Si-N nanocoating layer. In addition, comparison is made between real-time and film measurements for their accuracy of calculated primitive cell volume values and factors governing the accuracy of the method are determined. About 5% accuracy in primitive cell determination is obtained from camera length calibration and this technique is used to investigate the cell volume variation in WC-TiC core-shell microstructure. In addition to chemical compositional variation in core-shell type structure, primitive cell volume variation reveals additional information on lattice coherency strain across the interface.

• 한국공작기계학회논문집
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• 제16권3호
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• pp.23-30
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• 2007

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.345-347
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• 2006

An interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano accuracy and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. These efforts are mainly focused in reducing the errors inside the interferometer and improving the environments physically. The purpose of this paper is to improve accuracy of the interferometer by using measurement noise models and the Kalman filter algorithm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1182-1185
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• 2003

Recently, the research of the nano technology has been done on a lot of area over the world. Especially, the interest of them is much higher for semiconductor companies and other super accuracy processing area. In this thesis, we have approached the characteristic of the tensile and bonding of copper, frequently used to nano wires, by molecular dynamics simulation. And the simulation was done by EAM, Embedded Atom Method which has the most highest accuracy for metal. Then the feature of copper at atom space is understood through the simulation of nano wire.

• Applied Microscopy
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• 제41권1호
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• pp.75-79
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• 2011

For quantitative analysis of nano-crystal structure, we reported the accuracy improvement method of lattice parameters measured from electron diffraction. For calculation of Au lattice parameters used as a standard crystal structure, it was considered two different acquisition methods (detector and enegy-filter) and three different calculation methods (conventional, least-square and regression fit). As a result, the measurement reliability could be enhanced by using CCD camera which gives higher performance, while energy-filtering did not affect the improvement the camera constant accuracy. Also, the accuracy of lattice parameters could be improved up to $10^{-4}$ order by regression fitting with correction formula. Finally, it is expected that the combination of regression fitting and intensity extraction from energy-filtered precession electron diffraction gives a solution of quantitative structure analysis for unknown nano-crystals.

• Advances in nano research
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• 제14권5호
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• pp.409-419
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• 2023

Tracking the motion of tennis balls is a challenging task in using cameras around the tennis court. The most important instance of the tennis trajectory is the time of impact and touch the court which in some cases could not be detected precisely. In the present study, we aim to present a novel design of tennis balls equipped with nano-sensors to detect the touch of the ball to the court. In the impact instance, tennis ball receives significant acceleration and change in the linear momentum. This large acceleration could deform a small-beam structure with piezoelectric layer to produce voltage. The voltage could further be utilized to produce infrared waves which could be easily detected by infrared detection sensors installed on the same video cameras or separately near the tennis court. Therefore, the exact time of the impact could be achieved with higher accuracy than image analyzing method. A detailed dynamical property of such sensors is discussed using nonlinear beam equations. The results show that within the acceleration range of tennis ball during an impact, the piezoelectric patches of the nano-sensors in the tennis ball could produce enough voltages to propagate infrared waves to be detected by infrared detectors.

• 한국광학회지
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• 제23권3호
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• pp.97-102
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• 2012

일반적으로 왜곡을 측정하는 방법으로 패턴의 전체 이미지를 분석하여 왜곡을 평가하는 방법을 이용하고 있으나 정확도가 높지 않아 카메라 등의 광학계에 많이 적용되고 있다. 1um이하의 정확도를 요구하는 왜곡수차를 측정하는 방법으로는 고가의 정밀 스테이지를 이용하여 마스크의 이미지 위치를 정확히 측정하는 방법이 주로 이용된다. 본 논문에서는 정확도가 요구되지 않는 매뉴얼 스테이지를 이용하여 왜곡을 정확히 측정하는 방법을 연구 하였다. 주요 아이디어로는 CCD나 CMOS를 이용하여 마스크 이미지를 일부 중첩되도록 분할측정하고 인접중첩영역의 이미지를 통합하여 마스크 이미지 위치를 정확히 계산하는 것이다. 마스크 이미지의 정확한 위치정보를 얻기 위해 Canny Edge Detection 기법을 사용하였으며 이렇게 확보된 위치정보로부터 좌표변환과 최소자승법을 사용하여 정확한 왜곡수차를 계산하는 과정을 연구하였다.

• Current Optics and Photonics
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• 제8권2호
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• pp.170-182
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• 2024

The dimensional accuracy and consistency of a dual oil circuit centrifugal fuel nozzle are important for fuel distribution and combustion efficiency in an engine combustion chamber. A point cloud measurement method was proposed to solve the geometric accuracy detection problem for the fuel nozzle. An improved variance focus measure operator was used to extract the depth point cloud. Compared with other traditional sharpness evaluation functions, the improved operator can generate the best evaluation curve, and has the least noise and the shortest calculation time. The experimental results of point cloud slicing measurement show that the best window size is 24 × 24 pixels. In the height measurement experiment of the standard sample block, the relative error is 2.32%, and in the fuel nozzle cone angle measurement experiment, the relative error is 2.46%, which can meet the high precision requirements of a dual oil circuit centrifugal fuel nozzle.