• Title/Summary/Keyword: Nano accuracy

Search Result 214, Processing Time 0.031 seconds

Technology Trend on Innovation of Control System by IT-fusion and Implementation of Nano-level Accuracy for Nano Control Systems (제어 시스템의 IT 융합을 통한 성능 향상과 나노 정밀도 구현 기술 동향)

  • Kim C.B.;Kim K.D.
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.240-245
    • /
    • 2005
  • In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.

  • PDF

Phase Identification of Nano-Phase Materials using Convergent Beam Electron Diffraction (CBED) Technique

  • Kim, Gyeung-Ho;Ahn, Jae-Pyoung
    • Applied Microscopy
    • /
    • v.36 no.spc1
    • /
    • pp.47-56
    • /
    • 2006
  • Improvements are made to existing primitive cell volume measurement method to provide a real-time analysis capability for the phase analysis of nanocrystalline materials. Simplification is introduced in the primitive cell volume calculation leading to fast and reliable method for nano-phase identification and is applied to the phase analysis of Mo-Si-N nanocoating layer. In addition, comparison is made between real-time and film measurements for their accuracy of calculated primitive cell volume values and factors governing the accuracy of the method are determined. About 5% accuracy in primitive cell determination is obtained from camera length calibration and this technique is used to investigate the cell volume variation in WC-TiC core-shell microstructure. In addition to chemical compositional variation in core-shell type structure, primitive cell volume variation reveals additional information on lattice coherency strain across the interface.

Behavioral Characteristics of Nano-Stages According to Hinge Structure (힌지 형태에 따른 나노 스테이지의 거동특성)

  • Oh, Hyun-Seong;Lee, Sung-Jun;Choi, Soo-Chang;Park, Jung-Woo;Lee, Deug-Woo
    • Transactions of the Korean Society of Machine Tool Engineers
    • /
    • v.16 no.3
    • /
    • pp.23-30
    • /
    • 2007
  • Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.

A Study on the Improvement of Measurement Accuracy of Laser Interferometers for a Stopped Target (정지 타겟에 대한 레이저 간섭계의 측정 정밀도 향상에 관한 연구)

  • Lee, Jea-Ho;Kim, Seung-Hyun;Jung, Joon-Hong;Park, Ki-Heon
    • Proceedings of the KIEE Conference
    • /
    • 2006.04a
    • /
    • pp.345-347
    • /
    • 2006
  • An interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano accuracy and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. These efforts are mainly focused in reducing the errors inside the interferometer and improving the environments physically. The purpose of this paper is to improve accuracy of the interferometer by using measurement noise models and the Kalman filter algorithm.

  • PDF

The simulation of tensile and bonding process in nano-size (나노 단위 금속 원자의 인장 및 접합 공정 시뮬레이션)

  • 박성재;이세헌
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2003.06a
    • /
    • pp.1182-1185
    • /
    • 2003
  • Recently, the research of the nano technology has been done on a lot of area over the world. Especially, the interest of them is much higher for semiconductor companies and other super accuracy processing area. In this thesis, we have approached the characteristic of the tensile and bonding of copper, frequently used to nano wires, by molecular dynamics simulation. And the simulation was done by EAM, Embedded Atom Method which has the most highest accuracy for metal. Then the feature of copper at atom space is understood through the simulation of nano wire.

  • PDF

Accuracy Improvement of Lattice Parameters Measured from Electron Diffraction Data (전자회절을 이용한 격자상수의 측정 정확도 향상)

  • Lee, Sang-Gil;Song, Kyung;Kim, Jin-Gyu
    • Applied Microscopy
    • /
    • v.41 no.1
    • /
    • pp.75-79
    • /
    • 2011
  • For quantitative analysis of nano-crystal structure, we reported the accuracy improvement method of lattice parameters measured from electron diffraction. For calculation of Au lattice parameters used as a standard crystal structure, it was considered two different acquisition methods (detector and enegy-filter) and three different calculation methods (conventional, least-square and regression fit). As a result, the measurement reliability could be enhanced by using CCD camera which gives higher performance, while energy-filtering did not affect the improvement the camera constant accuracy. Also, the accuracy of lattice parameters could be improved up to $10^{-4}$ order by regression fitting with correction formula. Finally, it is expected that the combination of regression fitting and intensity extraction from energy-filtered precession electron diffraction gives a solution of quantitative structure analysis for unknown nano-crystals.

Accuracy improvement in motion tracking of tennis balls using nano-sensors technology

  • Shuning Yan;Chaozong Xiang;Li Guo
    • Advances in nano research
    • /
    • v.14 no.5
    • /
    • pp.409-419
    • /
    • 2023
  • Tracking the motion of tennis balls is a challenging task in using cameras around the tennis court. The most important instance of the tennis trajectory is the time of impact and touch the court which in some cases could not be detected precisely. In the present study, we aim to present a novel design of tennis balls equipped with nano-sensors to detect the touch of the ball to the court. In the impact instance, tennis ball receives significant acceleration and change in the linear momentum. This large acceleration could deform a small-beam structure with piezoelectric layer to produce voltage. The voltage could further be utilized to produce infrared waves which could be easily detected by infrared detection sensors installed on the same video cameras or separately near the tennis court. Therefore, the exact time of the impact could be achieved with higher accuracy than image analyzing method. A detailed dynamical property of such sensors is discussed using nonlinear beam equations. The results show that within the acceleration range of tennis ball during an impact, the piezoelectric patches of the nano-sensors in the tennis ball could produce enough voltages to propagate infrared waves to be detected by infrared detectors.

Direct Measurement of Distortion of Optical System of Lithography (노광 광학계의 왜곡수차 측정에 관한 연구)

  • Joo, WonDon;Lee, JiHoon;Chae, SungMin;Kim, HyeJung;Jung, Mee Suk
    • Korean Journal of Optics and Photonics
    • /
    • v.23 no.3
    • /
    • pp.97-102
    • /
    • 2012
  • In general, one of the methods used to measure distortion is to use the full image of the regular pattern. However, because of low accuracy, this method is mainly used for an optical system such as a camera.. In order to measure distortion with high accuracy less than 1um, one can use the method of measuring the exact position of a mask image. In this case, a high accuracy stage with a laser encoder is required. In this paper, we investigate measurement of the distortion of high accuracy with a simple manual stage. The main idea is that we split and measure the mask image with the overlapping area by using CCD or CMOS, and then we get an exact position of the mask image by integrating the adjacent split images. We use the Canny Edge Detection method to get the position information of the mask image and we researched the process to exactly calculate distortion by using coordinate transformations and a least square method.

Point Cloud Measurement Using Improved Variance Focus Measure Operator

  • Yeni Li;Liang Hou;Yun Chen;Shaoqi Huang
    • Current Optics and Photonics
    • /
    • v.8 no.2
    • /
    • pp.170-182
    • /
    • 2024
  • The dimensional accuracy and consistency of a dual oil circuit centrifugal fuel nozzle are important for fuel distribution and combustion efficiency in an engine combustion chamber. A point cloud measurement method was proposed to solve the geometric accuracy detection problem for the fuel nozzle. An improved variance focus measure operator was used to extract the depth point cloud. Compared with other traditional sharpness evaluation functions, the improved operator can generate the best evaluation curve, and has the least noise and the shortest calculation time. The experimental results of point cloud slicing measurement show that the best window size is 24 × 24 pixels. In the height measurement experiment of the standard sample block, the relative error is 2.32%, and in the fuel nozzle cone angle measurement experiment, the relative error is 2.46%, which can meet the high precision requirements of a dual oil circuit centrifugal fuel nozzle.