• 제목/요약/키워드: Nano Stereolithography

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3차원 마이크로 디바이스 개발을 위한 나노 스테레오리소그래피 공정 개발에 관한 연구 (Development of Nano-Stereolithography Process for Precise Fabrication of Three-Dimensional Micro-Devices)

  • 박상후;임태우;양동열;이신욱;공홍진;이광섭
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권1호
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    • pp.45-49
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    • 2006
  • A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system.

3 차원 나노 스테레오리소그래피의 정밀화를 위한 펨토초 레이저 출력-조사시간 제어방법 (A Scheme to Control Laser Power and Exposure Time for Fabricating Precise Threedimensional Microstructures in Nano-stereolithography (nSL) Process)

  • 박상후;임태우;양동열
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.1365-1368
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    • 2004
  • A scheme to control the laser power and the exposure time was studied to fabricate precise microstructures using the nanostereolithography (nSL) process. Some recent works have shown that a three-dimensional (3D) microstructure can be fabricated by the photopolymerizing process which is induced by two-photon absorption (TPA) with a femtosecond pulse laser. TPA provides the ability to confine photochemical and physical reactions within the order of laser wavelength, so neardiffraction limit features can be produced. In the nSL process, voxels are continuously generated to form a layer and then another layer is stacked in the normal direction of a plane to construct a 3D structure. Thus, fabrication of a voxel with low aspect ratio and small diameter is one of the most important parameters for fabricating precise 3D microstructures. In this work, the mechanism of a voxel formation is studied and a scheme on the control of laser power and exposure for minimizing aspect ratio of a voxel is proposed.

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복셀 메트릭스 스캐닝법에 의한 나노 복화(複畵)공정 재발 (Development of a Nano Replication Printing(nRP) Process using a Voxel Matrix Scanning Scheme)

  • 박상후;임태우;양동열;이신욱;공홍진
    • 한국정밀공학회지
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    • 제21권2호
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    • pp.210-217
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    • 2004
  • In this study, a new process, named as nano replication printing(nRP) process, is developed for printing any figure in the range of several micrometers by using voxel matrix scanning scheme. In this newly developed process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid resin according to a voxel matrix which is transformed from bitmap format file. After the polymerization, a droplet of ethanol is dropt to remove the unnecessary remaining liquid resin and then the polymerized figures with nano-scaled precision are only remaining on the glass plate. By the nRP process, any figure file of bitmap format could be reproduced as nano-scaled precision replication in the range of several micrometers. Also, nano/micro-scaled patterns for an extremely wide range of applications would become a technologically feasible reality. Some of figures with nano-scaled precision were printed in scaled replication as examples to prove the usefulness of this study.

조직공학을 위한 생체모사용 스캐폴드 개발 (Development of Biomimetic Scaffold for Tissue Engineering)

  • 박수아;이준희;김완두
    • Elastomers and Composites
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    • 제44권2호
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    • pp.106-111
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    • 2009
  • 조직공학은 기능을 상실한 인체를 대체하거나 복원하기 위해 인공대체품을 개발하기 위한 중요한 학문이다. 특히, 세포가 자랄 수 있는 지지체 역할을 하는 스캐폴드는 조직공학 연구를 위한 중요한 부분을 차지하고 있다. 그래서, 3차원 조직공학용 스캐폴드 개발을 위한 다양한 제조 방법을 소개하고자 하였다. 스캐폴드의 일반적인 제조방법으로는 염침출법 (solvent-casting particulate-leaching), 염 발포법 (gas foaming/salt leaching), fiber meshes/fiber bonding 법, 상분리법 (phase separation), melt moulding 법, 동결 건조법 (freeze drying)이 있으며, 넓은 표면적을 가진 스캐폴드 개발방법으로 전기방사법이 알려져 있다. 또한, 최근에는 스캐폴드 내부의 균일한 세포의 침투를 유도하기 위해 적당한 공극크기를 조절하고 우수한 공극률을 가진 스캐폴드를 개발하고자 stereolithography (SLA), selective laser sintering (SLS), fused deposition modeling (FDM), 및 3D printing (3DP) 와 같은 다양한 solid freeform fabrication (SFF) 기술이 개발되어지고 있다.

이광자 흡수 광중합에 의한 3차원 마이크로 쉘 구조물 제작 (Fabrication of Three-Dimensional Micro-Shell Structures Using Two-Photon Polymerization)

  • 박상후;임태우;양동열
    • 대한기계학회논문집A
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    • 제29권7호
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    • pp.998-1004
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    • 2005
  • A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.