• 한국전기전자재료학회논문지
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• 제27권9호
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• pp.566-570
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• 2014

Electrode pattern effects on the capacitive humidity sensor were investigated. The fabrication of the capacitive humidity sensor was formed with three steps. The bottom electrode was formed on the silicon substrate with Pt/Ti thin layer by using shadow mask and e-beam evaporator. The photo sensitive polyimide was formed on the bottom electrode by using photolithography process as a humidity sensitive thin film. The upper electrode was formed on the polyimide thin film with Pt/Ti thin layer by using e-beam evaporator and lift-off method. Three electrode patterns, such as circle, square, and triangle pattern, were used and changed the sizes to investigate the effects. The capacitances of the sensors were decreased 622 to 584 pF with the area decreament of patterns 250,000 to $196,250{\mu}m^2$. From these results, a capacitive humidity sensor with photo sensitive polyimide is expected to be applied to a high sensitive humidity sensor.

• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.597-598
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• 2006

In this study, we used the ESD method to prepare the protein microarrays for observation the stem cell responses to pattern size, space and shapes. The ESD method allows a reduction in spot size, high efficiency of substance transfer, and high rate in fabrication as a result of ability to simultaneously deposit thousands of identical spots. Typical electro spraying conditions for the deposition of proteins were a voltage of $3{\sim}5keV$ and the humidity under 30%. The patterns of masks have a variety of shapes, spaces, and hole sizes from 10 um to $300{\mu}m$. Three kinds of proteins(collagen, fibronectin, and vitronectin dissolved in PBS) are deposited in a dry state, preserving the functional activity of proteins. Stem cells were cultured on each protein patterned sample at $37^{\circ}C$ for 1day.

• 자원리싸이클링
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• 제12권4호
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• pp.20-29
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• 2003

본 연구에서는 새도우마스크 제조공정 중 발생되는 Fe-Ni 계 폐산용액을 효율적으로 재활용하기 위하여 폐산용액을 자체 제작한 분무열분해 system을 이용하여 분무열분해시킴에 의해 평균입도 100nm 이하의 니켈 페라이트($NiFe_2$$O_4$)나노 분발을 제조하였으며 반응온도, 용액의 농도 및 용액 유입속도의 반응인자들의 변화에 따른 생성된 분발의 특성변화를 파악하였다. 반응온도가 800∼$1100^{\circ}C$ 로 증가함에 따라 분무열분해 공정에 의해 생성된 분말의 평균입도가 현저히 증가하였고 점점 치밀한 조직을 나타내었으며 비표면적은 크게 감소하였다. 반응온도의 증가에 따라 니첼 페라이트 상의 생성비율 및 결정성이 증가하였다. 원료용액의 농도가 증가됨에 따라 분말의 평균입도는 점점 증가하고 비표면적은 감소하는 반면 입도분포는 더욱 불규칙하게 나타났다. 용액의 농도 증가에 따라 니켈 폐라이트 상의 생성비율 및 결정성은 현저히 증가하고 있었다. 용액의 유입속도 증가에 따라 분말들의 평균입도는 현저히 증가하고 비표면적은 감소하는 반면 입도분포는 불규칙하게 되며 조직의 치밀성도 감소하였다. 용액의 유입속도 감소에 따라 니켈 폐라이트 상의 결정성 및 생성비율이 현저히 증가하고 있었다.