• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.813-819
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• 2011

This paper predicted nonlinear dynamic responses of a cantilevered carbon nanotube(CNT) resonator incorporating the electrostatic forces and van der Waals interactions between the CNT cantilever and ground plane. The structural model of CNT includes geometric and inertial nonlinearities to investigate various phenomena of nonlinear responses of the CNT due to the electrostatic excitation. In order to solve this problem, we used Galerkin's approximation and the numerical integration techniques. As a result, the CNT nano-resonator shows the softening effect through saddle-node bifurcation near primary resonance frequency with increasing the applied AC and DC voltages. Also we can predict nonlinear secondary resonances such as superharmonic and subharmonic resonances. The superharmonic resonance of the nano-resonator is influenced by applied AC voltage. The period-doubling bifurcation leads to the subharmonic resonance which occurs when the nano-resonator is actuated by electrostatic forces as parametric excitation.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.12
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• pp.1157-1163
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• 2012

Natural frequency of a nano-resonator via nano transfer printing is studied. Through a nano transfer printing, the hybrid metal/polymer membrane may evolve a wrinkle. Natural frequency of a wrinkled hybrid membrane decreases significantly, as the amplitude to wavelength ratio becomes larger. To address the design limit of a hybrid nano resonator, we perform parametric study using finite element analysis. Specifically, we study the effects of the Young's modulus ratio of the metal/polymer membrane, thickness ratio and wrinkle amplitude to wavelength ratio, respectively. The results from the parametric studies can serve as guideline to design hybrid nano resonators.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.447-452
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• 2011

This paper predicted the dynamic behaviors of a cantilevered carbon nanotube(CNT) incorporating the electrostatic force, van der Waals interactions between the CNT and ground plane. The structural model of the CNT includes geometric and inertial nonlinearities for predicting various phenomena of nonlinear responses of the CNT due to the electrostatic force. In order to solve the problem, we used Galerkin's approximation and the numerical integration techniques and as a result, we predicted characteristics of nonlinear response of nano resonator. The cantilevered CNT shows complex dynamic responses and instabilities due to the applied ac and ac voltages, and driving frequencies. The results investigated in this paper are helpful to the modeling of nanotube based electromechanical devices such as nano-resonators and nano-sensors.

• Journal of the Semiconductor & Display Technology
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• v.16 no.1
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• pp.102-105
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• 2017

Currently, the size of the electronic device is in the nano area. In order to control the movements of these nanoscale devices, one should be able to understand the physical phenomena in the nano area. Recently, due to carbon nanotubes and mechanical outstanding electrical conductivity and mechanical characteristics of the carbon nanotubes and Graphene behaves to apply. Efforts have been active. There are various tubes with a radius of a in a compact mass in the form of a Multi walled carbon nanotubes in different between the radius. Van der Waals force can move smoothly without friction with each other by the nanoscale motor turning, using the properties, making. This is the lightest solids per unit area on the thickness is electrical atomic layer one of the substance and the electrical conductivity, the best material and mechanical characteristics are very much. Many studies because great is the ideal nanoelectromechanical device of material is being considered. In this study, electrical resonator for a new structure proposed and the nature and methodology would like to come up.

• Structural Engineering and Mechanics
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• v.73 no.3
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• pp.287-302
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• 2020

This investigation deals with a size-dependent coupled thermoelasticity analysis based on Green-Naghdi (GN) theory in nano scale using a new modified nonlocal model of heat conduction, which is based on the GN theory and nonlocal Eringen theory of elasticity. In the analysis based on the proposed model, the nonlocality is taken into account in both heat conduction and elasticity. The governing equations including the equations of motion and the energy balance equation are derived using the proposed model in a nano beam resonator. An analytical solution is proposed for the problem using the Laplace transform technique and Talbot technique for inversion to time domain. It is assumed that the nano beam is subjected to sinusoidal thermal shock loading, which is applied on the one of beam ends. The transient behaviors of fields' quantities such as lateral deflection and temperature are studied in detail. Also, the effects of small scale parameter on the dynamic behaviors of lateral deflection and temperature are obtained and assessed for the problem. The proposed GN-based model, analytical solution and data are verified and also compared with reported data obtained from GN coupled thermoelasticity analysis without considering the nonlocality in heat conduction in a nano beam.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.63-66
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• 2013

Carbon Nanotube have been proposed for use in various applications for electromechanical systems. Nano-electromechanical resonators which provide high frequency resolution and long energy storage time, play an important role in wide area fields of science and engineering. Using the control of tension in carbon nanotube, can be made the tunable resonator. In the study, we analysis the tunable frequency change of resonator by tension changes due to the rotation angles of the single-walled carbon nanotube resonator. The frequency characteristics of a resonator as a function of the rotation angle. The tension was found to decrease with increasing rotation angle, and therefore the resonance frequencies could be changed by controlling the single-walled carbon nanotube rotation angle. The resonance frequencies decreased with increasing angle, and when the rotation angle was greater than $60^{\circ}$, these changes were marked.

• Advances in nano research
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• v.14 no.3
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• pp.285-294
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• 2023

The dynamic and sensing performances of nanomechanical resonators with their different boundary conditions are studied based on surface elasticity-based modeling and simulation. Specifically, the effect of surface stress is included in Euler-Bernoulli beam model for different boundary conditions. It is shown that the surface effect on the intrinsic elastic property of nanowire is independent of boundary conditions, while these boundary conditions affect the frequency behavior of nanowire resonator. The detection sensitivity of nanowire resonator is remarkably found to depend on the boundary conditions such that double-clamping boundary condition results in the higher mass sensitivity of the resonator in comparison with simple-support or cantilever boundary condition. Furthermore, we show that the frequency shift of nanowire resonator due to mass adsorption is determined by its length, whereas the frequency shift is almost independent of its thickness. This study enables a design principle providing an insight into how the dynamic and sensing performances of nanomechanical resonator is determined and tuned.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.1
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• pp.69-75
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• 2017

In this paper, slit ground resonator with slit and capacitor is proposed for practical use of magnetic resonant wireless power transfer(MR-WPT). And this paper presents the performance comparison of conventional loop resonator as Rx resonator to slit ground resonator. The proposed silt ground resonator with 31 cm width, 20.5 cm length, $35{\mu}m$ thickness is designed the crossing slit 1 cm width with only opened edge. And an external capacitors were connected at the opened edge of slit ground resonator for resonating at 6.78 MHz. The transfer efficiencies of MR-WPT were measured at open and short mode, and then the highest transfer efficiencies of MR-WPT according to the Rx resonators were plotted. In result, the transfer efficiency of MR-WPT with loop resonator was the highest. However, when the ground was inserted in receiver part at the bottom of laptop model, the transfer efficiency was closed 0 %. The transfer efficiency recovered the transfer efficiency of 67 % using slit ground resonator. The magnetic field was penetrated through the slit and proposed slit ground resonator works as resonator in MR-WPT.

• Proceedings of the Korean Magnestics Society Conference
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• 2011.12a
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• pp.68-69
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• 2011