• 한국진공학회지
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• 제16권6호
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• pp.463-467
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• 2007

[ $Al_2O_3$ ]기판을 산소 plasma 또는 수소 plasma로 표면 처리한 후 그 위에 plasma-assisted molecular beam epitaxy 방법으로 성장된 ZnO 박막의 구조적 특성과 광학적 발광 특성을 체계적으로 조사하였다. 제작된 ZnO 박막은 high resolution X-ray diffraction 측정과 atomic force microscope를 사용하여 구조적 특성과 표면 특성을 관찰하였으며, photoluminescence (PL) 측정을 통하여 엑시톤과 관련된 광학적 전이특성을 온도에 따라 조사하였다. free exciton, bound exciton, 그리고 이들의 phonon replica들의 특성을 온도에 따라 분석하였으며, 산소 plasma로 표면 처리한 시료의 PL 세기가 수소 plasma 표면 처리한 시료의 PL 세기보다 상당히 커짐을 관찰하였다. 산소 plasma로 처리된 기판 위에 성장된 ZnO 시료가 수소 plasma로 처리된 경우보다 우수한 구조적 특성과 광학적 특성을 보였는데, 이는 산소 plasma로 표면 처리함으로써 산소 공공(oxygen vacancy)과 같은 결함 구조가 적게 생성되고 좋은 격자 상수 일치를 보여주므로 구조적 특징과 발광 특징이 향상되는 것으로 해석되었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.371-376
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• 2003

The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process, simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during Compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• 한국정밀공학회지
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• 제20권5호
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• pp.189-195
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• 2003

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• Journal of the Optical Society of Korea
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• 제20권2호
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• pp.245-250
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• 2016

In this paper, we demonstrate a self-imaging technique that can visualize longitudinal interference patterns behind periodically-structured objects, which is often referred to as Talbot carpet. Talbot carpet is of great interest due to ever-decreasing scale of interference features. We demonstrate experimentally that Talbot carpets can be imaged in a single exposure configuration revealing a broad spectrum of multi-scale features. We have performed rigorous diffraction simulations for showing that Talbot carpet print can produce ever-decreasing structures down to limits set by mask feature sizes. This demonstrates that large-scale pattern masks may be used for direct printing of features with substantially smaller scales. This approach is also useful for characterization of image sensors and recording media.

• 한국세라믹학회지
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• 제43권3호
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• pp.143-147
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• 2006

Co-Fe-Al-O nanogranular thin films were fabricated by RF-magnetron sputtering under an $Ar+O_2$ atmosphere. High resolution transmission electron microscopy revealed that the Co-Fe-Al-O films are composed of bcc (Co, Fe) nanograins finer than 5 nm and an Al-O amorphous phase. A very large electrical resistivity of $374{\mu}{\Omega}cm$ was obtained, together with a large uniaxial anisotropy field of 50 Oe, a hard axis coercivity of 1.25 Oe, and a saturation magnetization of 12.9 kG. The actual part of the relative permeability was measured to be 260 at low frequencies and this value was maintained up to 1.3 GHz. The ferromagnetic resonance frequency was 2.24 GHz. The resulting Co-Fe-Al-O nanogranular thin films with a high electrical resistivity and high resonance frequency are considered to be suitable for GHz magnetic device applications.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.39-45
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• 2004

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and ${Si}_3$$N_4$ tips were in the range of ${10}^{-1}$~${10}^{-3}$and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1927-1931
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• 2003

Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Micro contact printing is one of the most promising methods for manufacturing the nanometer-sized structures. The crucial element for the micro contact printing is the nano-resolution printing technique using polymeric stamps. In this study, a multi-scale analysis scheme for simulating the micro contact printing process is proposed and some useful analysis results are presented. Using the slip-link model [1], the dependency of viscoelasticity on molecular weight of polymer stamp is predicted. Deformation behaviors of polymeric stamps are analyzed using finite element method based upon the predicted viscoelastic properties.

• 한국분말재료학회지
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• 제17권4호
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• pp.342-346
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• 2010

In the present work, water-based gold nanofluids were synthesized by the solution plasma processing (SPP). The size distribution and the shape of gold nanoparticles in the nanofluids were investigated using high resolution transmission electron microscopy (HR-TEM). The dispersion stability of gold nanofluids was characterized using zeta potential, as well. The thermal properties of gold nanofluids were measured by utilizing lambda measurement device. Nanofluids containing nanoparticles with $64.0{\pm}42.1\;nm{\sim}18.10{\pm}5.0\;nm$ in diameter were successfully synthesized. As diameter of nanoparticles decreased, dispersion stability of nanofluids increased and the enhanced ratio of thermal conductivity increased. The nanofluid with nanoparticles of $18.10\;{\pm}\;5.0\;nm$ in diameter showed approximately 3% improvement in thermal conductivity measurement and this could be due to the enhanced Brownian movement.

• 한국가시화정보학회지
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• 제2권1호
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• pp.12-17
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• 2004

The physical characteristics of soot near the soot inception point were investigated with various measurements. In-situ measurements of particle size and volume fraction were introduced based on time resolved laser-induced incandescence (TIRE-LII) and laser-induced ion mobility (LIIM). The one has more convenience and accuracy than conventional LII technique and the other works best for particle sizes of a few nanometers at high concentrations in a uniform concentration field. A complementary ex-situ measurement of particle size is nano differential mobility analyzer (Nano-DMA), which recently developed for measuring particle sizes between 2nm and 100nm and provides high-resolution size information for early soot. Particles will be also collected on transmission electron microscope (TEM) grids using rapid thermophoretic sampling and analyzed for morphology. These measurements will allow fresh and original insight into the characterizing soot inception process. The measured physical properties of incipient soot will clarify the controlling growth mechanism combined with chemical ones, and the dominant mechanism for soot modeling can be deduced from the information.