• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.240-245
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• 2005

In order to implement nano-level accuracy of precision equipments, a nano control system is one of the key components. The control system consists of a controller, actuators and sensors having nano-level resolution. In this paper, application area and technical trend on the nano control system are introduced. Some required techniques for realizing nano-level resolution of a controller or actuator are presented. Technical innovation of a control system by IT-fusion and its effect are also described. Finally, domestic research activities for development of the IT-based nano control system are introduced.

• 우주기술과 응용
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• 제3권3호
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• pp.257-279
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• 2023

한국항공우주연구원에서는 심우주 탐사를 위한 핵심 기술 개발을 위해 6U급 초소형 위성인 HiREV(high resolution video and image)를 개발하였다. 6U HiREV 초소형 위성의 임무는 지구 관측을 위한 고해상도 영상 및 동영상 촬영이며, 임무 수행 시 고온의 카메라 모듈로 인해 렌즈와 모듈 간의 열 지향 오차가 발생할 수 있다. 열 지향 오차는 해상도에 큰 영향을 미치므로, 이를 해결하기 위해 열 설계가 필요하다. 또한 HiREV 광학 카메라는 지상에서 쓰이는 상용제품(COTS, Commercial Off The Shelf)을 이용하여 개발한 것이므로 상온에서 가장 좋은 성능을 가지며, 고온/저온 환경인 우주에서 활용되기 위해 별도의 열 설계가 적용되어야 한다. 본 논문에서는 임무 카메라 탑재체를 위해 3가지의 수동 열 설계가 수행되었으며, 궤도열 해석을 통하여 열 설계가 효과적임을 확인하였다.

• 센서학회지
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• 제25권4호
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• pp.280-284
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• 2016

For an arc-flash protection system, the selection of arc-flash sensor in implementation is largely dependent on the coverage area and the spatial resolution. Typically, a point sensor is used to accurately measure an arc event within a very narrow region; whereas, a loop or a line sensor can cover several electrical compartment at the same time, but with a poor resolution. In this work, a novel scheme for an arc-flash sensor was developed by making use of the transmission loss of plastic optical fibers (POFs) to cover a broad range with a high spatial resolution. By relating the amplitude ratio of the arc-signals at the ends of the POF with the arc-location, arc events could be located with a resolution of ~5 cm within a spatial range of 10 m, which has not been reported yet.

• Journal of the Optical Society of Korea
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• 제9권1호
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• pp.32-35
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• 2005

In light microscopy, spatial resolution is limited by diffraction effect. Confocal microscopy has improved resolutions in both lateral and axial directions, but these are still limited by diffraction effect. Confocal self-interference microscopy (CSIM) uses interference between two perpendicularly polarized beams to enhance lateral resolution. In previous research, we proposed a calcite plate with its optic-axis perpendicular to the propagation angle and one of the boundary surfaces of the plate. This type of plate is not widely used to our knowledge. In this paper, we change the calcite plate to more common one, which is commercially available. This calcite plate has its optic axis in the plane of incidence. We analyze the characteristics of this calcite plate and numerically compare the performances of CSIM in previous research and CSIM with the commercial calcite plate. Numerical results show improved performance when using the commercial calcite plate

• 한국세라믹학회지
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• 제40권11호
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• pp.1047-1057
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• 2003

A sub-nanometer resolution Scanning Nonlinear Dielectric Microscope (SNDM) was developed for observing ferroelectric polarization. We also demonstrate that the resolution of SNDM is higher than that of a conventional piezo-response imaging. Secondly, we report new SNDM technique detecting higher nonlinear dielectric constants $\varepsilon$$\_$3333/ and $\varepsilon$$\_$33333/. Higher order nonlinear dielectric imaging provides higher lateral and depth resolution. Finally, the formation of artificial small inverted domain is reported to demonstrate that SNDM system is very useful as a nano-domain engineering tool. The nano-size domain dots were successfully formed in LiTaO$_3$ single crystal. This means that we can obtain a very high density ferroelectric data storage with the density above 1T-bits/inch$^2$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.95-96
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• 2007

• Bulletin of the Korean Chemical Society
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• 제34권1호
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• pp.207-210
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• 2013

We report the construction of a MALDI imaging mass spectrometer equipped with a specially designed laser focusing lens, a compact aspherical singlet lens, that obtains a high-lateral imaging resolution in the microprobe mode. The lens is specially designed to focus the ionization laser (${\lambda}$ = 355 nm) down to a $1{\mu}m$ diameter with a long working distance of 34.5 mm. With the lens being perpendicular to the sample surface and sharing the optical axis with the ion path, the imaging mass spectrometer achieved an imaging resolution of as good as $5{\mu}m$ along with a high detection sensitivity of 100 fmol for peptides. The mass resolution was about 900 (m/${\Delta}m$) in the linear TOF mode. The high-resolution capability of this instrument will provide a new research opportunity for label-free imaging studies of various samples including tissues and biochips, even for the study at a single cell level in the future.

• 한국정밀공학회지
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• 제21권11호
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• pp.117-124
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• 2004

Recently, nano-methodology is increasingly important as the ruler for measuring nano-technology, and we applied the linear encoder to nano-methodology. The quadrature output in the linear encoder has an effect on increasing the resolution in some techniques. Already, various interpolation techniques based on the quadrature signal have applied to the precision servo system. In this paper, we propose a new interpolation algorithm for ultra-precision positioning in the low speed with simulation by MATLAB SIMULINK. This method modified previous methods and was properly designed for some given control system. To verify, we first fulfilled the encoder signal test to find main parameters fer the signal transformation, then we proved the proposed interpolation algorithm by experiments, which show that the result of the interpolation algorithm corresponds with the measurement of the laser interferometer in 100 nm unit approximately. In addition, we can get more precise measurement by more accurate and noise-free signal. So we need to compensate imperfections in the encoder signal. After that, we will apply this algorithm to nano positioning system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.633-636
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• 2005

Imprint lithography is a promising method for high-resolution and high-throughput lithography using low-cost equipment. As with other nanoimprint methods, ultraviolet-nanoimprint lithography (UV-NIL) resolution appears to be limited only by template resolution, and offers a significant cost of ownership reduction when compared to other next generation lithography (NGL) methods such as EUVL and 157 nm lithography. The purpose of this paper is to suggest optimum values of control parameters of Imprio 100 manufactured by Molecular Imprint, Inc., which is the first commercially available UV-NIL tool, for sound nanoimprint. UV-NIL experiments were performed on Imprio 100 to find dispensing recipe for avoiding air entrapment. Dispensing recipe related to residual layer thickness and uniformity was optimized and 40 nm thick residual layer was achieved.