• Title/Summary/Keyword: Nano Patterns

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Fabrication of Organic Thin Film Transistor(OTFT) for Flexible Display by using Microcontact Printing Process (미세접촉프린팅공정을 이용한 플렉시블 디스플레이 유기박막구동소자 제작)

  • Kim K.Y.;Jo Jeong-Dai;Kim D.S.;Lee J.H.;Lee E.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.595-596
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    • 2006
  • The flexible organic thin film transistor (OTFT) array to use as a switching device for an organic light emitting diode (OLED) was designed and fabricated in the microcontact printing and low-temperature processes. The gate, source, and drain electrode patterns of OTFT were fabricated by microcontact printing which is high-resolution lithography technology using polydimethylsiloxane(PDMS) stamp. The OTFT array with dielectric layer and organic active semiconductor layers formed at room temperature or at a temperature tower than $40^{\circ}C$. The microcontact printing process using SAM(self-assembled monolayer) and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even nano size, and reduced the procedure by 10 steps compared with photolithography. Since the process was done in low temperature, there was no pattern transformation and bending problem appeared. It was possible to increase close packing of molecules by SAM, to improve electric field mobility, to decrease contact resistance, and to reduce threshold voltage by using a big dielecric.

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Role of gas flow rate during etching of hard-mask layer to extreme ultra-violet resist in dual-frequency capacitively coupled plasmas

  • Gwon, Bong-Su;Lee, Jeong-Hun;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.132-132
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    • 2010
  • In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

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Effect of Process Parameters on Microstructure and Magnetic Properties of Sm-Co Alloy Powder Prepared by High Energy Ball Milling (고에너지 볼밀링된 Sm-Co 합금 분말의 미세조직 및 자성특성에 미치는 공정변수의 영향)

  • Kim, Bo-Sik;Chang, Si-Young
    • Journal of Powder Materials
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    • v.17 no.2
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    • pp.130-135
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    • 2010
  • Sm-16.7wt%Co alloy powders were prepared by high energy ball milling under the conditions of various milling time and the content of process control agent (PCA), and their microstructure and magnetic properties were investigated to establish optimum processing conditions. The initial powders employed showed irregular shape and had a size ranging from 5 to $110\;{\mu}m$. After milling for 5 h, the shape of powders changed to round shape and their mean powder size was approximately $5\;{\mu}m$, which consisted of the agglomerated nano-sized particles with 15 nm in diameter. The coercivity was reduced with increasing the milling time, whereas the saturation magnetization increased. As the content of PCA increased, the powder size minutely decreased to approximately $7\;{\mu}m$ at the PCA content of 10 wt%. The XRD patterns showed that the main diffraction peaks disappeared apparently after milling, indicating the formation of amorphous structure. The measured values of coercivity were almost unchanged with increasing the content of PCA.

Biomimetic MIP Terpene Sensors Adding Conductive Polymers (전도성 고분자가 첨가된 생체 모방형 분자 각인 고분자 테르펜 센서)

  • Jung, Jae-Hun;Lee, Sung-Pil
    • Journal of Sensor Science and Technology
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    • v.21 no.5
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    • pp.345-351
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    • 2012
  • Biomimetic terpene sensors which have high sensitivity and stability have been fabricated using moleculary imprinted polymer (MIP) technology. Since it is impossible to make a resistive type sensor due to the high resistance of MIP, we improved the sensor by adding conductive polymers. We investigated the sensitivity of resistive type sensors with nano particles depending on the amount of conductive polymers. The MIP membrane contained the methacrylic acid as functional monomer and ethylene glycol dimethacrylate as cross linker, which formed specific cavities originated by the target terpene molecules. The mixture of MIP and the conductive polymer was coated on the patterns of interdigit electrodes on the alumina substrate. The fabricated sensors showed their highest specific sensitivities exposed to 500 ppm target gases : limonene 0.055 at 40% of amount of conductive polymers and geraniol $5.84{\times}10^{-4}$ at 20% of amount of conductive polymers. In conclusion, we found that the terpene sensors are affected by the target molecules, functional monomers and the conductive polymers.

A Study on the Health Consciousness and Eating Habits of the Seongnam Dining Owners (성남시 외식사업자의 건강의식과 식습관)

  • Cho, Wookyoun
    • Journal of the Korean Society of Food Culture
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    • v.30 no.4
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    • pp.447-456
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    • 2015
  • The purposes of this study were to determine health consciousness and eating habits of dining business owners from Seongnam city. To figure out their health levels, this study focused on quality of sleep, current state of health, health care, smoking, drinking, regular exercise, working hours, dietary behavior pattern, dietary habits, and food intakes patterns. Out of 200 subjects, 104 (52.0%) were males and 96 (48.0%) were females. Their average age was 46.60. For education level, a majority of males graduated from college, whereas a majority of females graduated from high school. Average combined ratios of overweight and obese were 62.5% for males and 25% for females. A majority worked less than 3 years in the dining business area, but 37% of subjects worked more than 10 years. Average health level was favorable, but 38.9% of subjects had hypertension. Males' percentages for smoking and drinking were higher than those of females. Regular physical activity was high, but regular exercise rate was low. Males' average eating speed was faster than that of females and had low scores for desirable eating habits. The study shows that local business owners need to take care of their health.

Preparation and Characterization of Nanoparticles Using Poly(N-isopropylacrylamide)-$Poly({\varepsilon}-caprolactone)$ and Poly(ethylene glycol)-$Poly({\varepsilon}-caprolactone)$ Block Copolymers with Thermosensitive Function

  • Choi, Chang-Yong;Jang, Mi-Kyeong;Nah, Jae-Woon
    • Macromolecular Research
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    • v.15 no.7
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    • pp.623-632
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    • 2007
  • Thermosensitive nanoparticles were prepared via the self-assembly of two different $poly({\varepsilon}-caprolactone)$-based block copolymers of poly(N-isopropylacrylamide)-b-$poly({\varepsilon}-caprolactone)$ (PNPCL) and poly(ethylene glycol)-b-$poly({\varepsilon}-caprolactone)$ (PEGCL). The self-aggregation and thermosensitive behaviors of the mixed nanoparticles were investigated using $^1H-NMR$, turbidimetry, differential scanning microcalorimetry (micro-DSC), dynamic light scattering (DLS), and fluorescence spectroscopy. The copolymer mixtures (mixed nanoparticles, M1-M5, with different PNPCL content) formed nano-sized self-aggregates in an aqueous environment via the intra- and/or intermolecular association of hydrophobic PCL chains. The microscopic investigation of the mixed nanoparticles showed that the critical aggregation concentration (cac), the partition equilibrium constants $(K_v)$ of pyrene, and the aggregation number of PCL chains per one hydrophobic microdomain varied in accordance with the compositions of the mixed nanoparticles. Furthermore, the PNPCL harboring mixed nanoparticles evidenced phase transition behavior, originated by coil to the globule transition of PNiPAAm block upon heating, thereby resulting in the turbidity change, endothermic heat exchange, and particle size reduction upon heating. The drug release tests showed that the formation of the thermosensitive hydrogel layer enhanced the sustained drug release patterns by functioning as an additional diffusion barrier.

A Study on Cause of Defects in NIL Molding Process using FEM (유한요소 해석을 이용한 나노임프린트 가압 공정에서 발생하는 결함 원인에 대한 연구)

  • Song, N.H.;Son, J.W.;Kim, D.E.;Oh, S.I.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.364-367
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    • 2007
  • In nano-imprint lithography (NIL) process, which has shown to be a good method to fabricate polymeric patterns, several kinds of pattern defects due to thermal effects during polymer flow and mold release operation have been reported. A typical defect in NIL process with high aspect ratio and low resist thickness pattern is a resist fracture during the mold release operation. It seems due to interfacial adhesion between polymer and mold. However, in the present investigation, FEM simulation of NIL molding process was carried out to predict the defects of the polymer pattern and to optimize the process by FEA. The embossing operation in NIL process was investigated in detail by FEM. From the analytical results, it was found that the lateral flow of polymer resin and the applied pressure in the embossing operation induce the weld line and the drastic lateral strain at the edge of pattern. It was also shown that the low polymer-thickness result in the delamination of polymer from the substrate. It seems that the above phenomena cause the defects of the final polymer pattern. To reduce the defect, it is important to check the initial resin thickness.

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Low Power Embedded Memory Design for Viterbi Decoder with Energy Optimized Write Operation (쓰기 동작의 에너지 감소를 통한 비터비 디코더 전용 저전력 임베디드 SRAM 설계)

  • Tang, Hoyoung;Shin, Dongyeob;Song, Donghoo;Park, Jongsun
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.11
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    • pp.117-123
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    • 2013
  • By exploiting the regular read and write access patterns of embedded SRAM memories inside Viterbi decoder, the memory architecture can be efficiently modified to reduce the power consumption of write operation. According to the experimental results with 65nm CMOS process, the proposed embedded memory used for Viterbi decoder achieves 30.84% of power savings with 8.92% of area overhead compared to the conventional embedded SRAM approaches.

Synthesis and Characteristic of Ni/VSZ Cermet for High Temperature Electrolysis Prepared by Mechanical Alloying Method (Mechanical Alloying Method로 제조된 고온수전해용 Ni/YSZ cermet의 제조 및 특성)

  • Chae, Ui-Seok;Hong, Hyun-Sean;Choo, Soo-Tae
    • Journal of Hydrogen and New Energy
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    • v.16 no.4
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    • pp.372-378
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    • 2005
  • Ni/YSZ ($Y_2O_3$-stabilized $ZrO_2$) composite powder for a cathode material in high temperature electrolysis(HTE) was synthesized by a mechanical alloying method with Ni and YSZ powder. Microstructure of the composite and cell thickness for HTE reaction has been analyzed with various techniques of XRD, SEM to investigate effects of fabrication conditions. Employing the composite material, furthermore, the unit cell for HTE has been studied to evolve hydrogen from water. XRD patterns showed that the composites after wet mechanical alloying were composed of respective nano-sized crystalline Ni and YSZ. While ethanol as additive for mechanical alloying increased to $20\;{\mu}m$ of average particle size of the composites, alpha-terpineol effectively decreased to sub-micro size of that. This study has been found out the evolution of hydrogen by HTE reaction employing the fabricated cathode material, showing 1.4 ml/min of $H_2$ generation rate as increasing $20\;{\mu}m$ of cathode thickness.

Soft Mold Imprinting Fabrication of Anti-reflection Film using Self-Organized Nanostructure Polymer Surfaces Irradiated by Ion Beams (이온빔 처리된 폴리머 표면의 자가나노구조화를 이용한 반사방지 필름 제조용 소프트 몰드 임프린팅 연구)

  • Lee, Seunghun;Byeon, Eun-Yeon;Choi, Juyeon;Jung, Sunghoon;Yu, Byeong-Gil;Kim, Do-Geun
    • Journal of Surface Science and Engineering
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    • v.50 no.6
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    • pp.480-485
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    • 2017
  • Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer between oxygen ion and the polymer surface induced cross-linking and scission reactions, resulting in self-organized nanostructures with regular patterns of the wavenumber of $5{\mu}m^{-1}$. Post processes including ultra-violet curable resin coating and delamination fabricated anti-reflection films. The imprinted resin surface also showed the consistent wavenumber, $5{\mu}m^{-1}$. Pristine PET, oxygen ion beam treated PET, and imprinted replica sample showed total transmittance of 91.04, 93.25, and 93.57-93.88%, respectively.