• Journal of Sensor Science and Technology
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• 제29권5호
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.482-483
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• 2011

Graphene is a good candidate for the future nano-electronic materials because it has excellent conductivity, mobility, transparency, flexibility and others. Until now, most graphene researches are focused on the nano electronic device applications, however, biological application of graphene has been relatively less reported. We have fabricated a deoxyribonucleic acid (DNA) conjugated graphene field-effect transistor (FET) and measured the electrical transport characteristics. We have used graphene sheets grown on Ni substrates by chemical vapour deposition. The Raman spectra of graphene sheets indicate high quality and only a few number of layers. The synthesized graphene is transferred on top of the substrate with pre-patterned electrodes by the floating-and-scooping method [1]. Then we applied adhesive tapes on the surface of the graphene to define graphene flakes of a few micron sizes near the electrodes. The current-voltage characteristic of the graphene layer before stripping shows linear zero gate bias conductance and no gate operation. After stripping, the zero gate bias conductance of the device is reduced and clear gate operation is observed. The change of FET characteristics before and after stripping is due to the formation of a micron size graphene flake. After combined with 30 base pairs single-stranded poly(dT) DNA molecules, the conductance and gate operation of the graphene flake FETs become slightly smaller than that of the pristine ones. It is considered that DNA is to be stably binding to the graphene layer due to the ${\pi}-{\pi}$ stacking interaction between nucleic bases and the surface of graphene. And this binding can modulate the electrical transport properties of graphene FETs. We also calculate the field-effect mobility of pristine and DNA conjugated graphene FET devices.

• Bulletin of the Korean Chemical Society
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• 제30권11호
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• pp.2584-2588
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• 2009

The effect of $LaF_3$ coating on the structural and electrochemical properties of $Li[Ni_{0.3}Co_{0.4}Mn_{0.3}]O_{2}$ cathodes was investigated using XRD, SEM, TEM, and a cycler. The coating layer consisted of nano-sized particles attached nonuniformly to the surface of pristine powder. Despite the surface coating treatment, phase difference by $LaF_3$ coating was not detected. The discharge capacities of coated electrodes were a little lower than that of pristine sample at a 1 C rate. However, as the C rate increases, the capacity retention of the coated sample becomes obviously superior to that of the pristine sample. The cyclic performances of the electrodes in the voltage range of 4.8 $\sim$ 3.0 V were also improved by the surface coating. Such enhancement is attributed to the presence of the $LaF_3$ coating layer, which effectively suppressd the reaction between electrodes and electrolytes on the surface of the $Li[Ni_{0.3}Co_{0.4}Mn_{0.3}]O_{2}$ electrode.

• Journal of the Korean Electrochemical Society
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• 제7권1호
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• pp.38-43
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• 2004

Porous carbon aerogel-silica gel composite materials were used as the electrodes of capacitive deionization(CDI) process, which were prepared by a paste rolling method. The electrochemical parameters such at current values, coulombs af a function of cycle, and CDI efficiencies were investigated for 10th and 100th cycles in 1,000ppm NaCl solution. Carbon aerogel-silica gel composite electrodes showed good wet-ability and higher mechanical strengths even under the NaCl solutions as well. In our experimented runs, all of the composite electrodes also are showed good cycle-ability without destroy of active material during cycles and decreased manufacturing times by $50\%$. Conclusively, the adding of silica gel powder to carbon aerogel leads to the effective performance of CDI process due to effective utilization of active materials by increasing the wet-ability and mechanical hardness.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.629-632
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• 2008

Printed organic thin-film transistors (OTFTs) were used in the fabrication of a screen- printed gate, source and drain electrodes on flexible plastic substrates using silver pastes, a coated polyvinylphenol dielectrics, and jetted bis(triisopropyl-silylethynyl) pentacene (TIPS-pentacene) organic semiconductor. The OTFTs printed using screen printing and soluble processes made it was possible to fabricate a printed OTFT with a channel length as small as $13\;{\mu}m$ on plastic substrates; this was not possible using previous traditional printing techniques.

• Korean Journal of Materials Research
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• 제11권11호
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• pp.936-940
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• 2001

Spray pyrolysis is a favorable technique to form complex mixed-metal oxide powders with high purity in high temperature region. Manganese oxide powders were prepared by spray pyrolysis from an aqueous solution of $Mn(NO_3)_2$. Powders were formed in the temperature range of 500~$700^{\circ}C$ under the constant pressure of 300torr. All the powders have hydrous forms. When the temperature was increased, the size and the surface area of the particles decreased. An electrochemical capacitors were made with manganese oxide electrodes and KOH electrolyte. With the temperature decreased, capacitors showed high capacitance. Capacitor which was prepared with powders formed in the temperature $500^{\circ}C$ demonstrated specific capacitances as high as 83F/g.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.416-417
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• 2007

We prepared flexible transparent conducting electrodes by spray coating of single-walled carbon nanotube (SWNT) networks on PET substrate and have demonstrated their use as transparent anodes for flexible organic light emitting diodes (OLEDs). The flexible CNT electrode produced by spray coating method shows relatively low sheet resistance ($150{\sim}220{\Omega}/sq.$) and high transmittance of ~60% even though it was prepared at room temperature. In addition, CNT electrode/PET sample exhibits little resistance change during 2000 bending cycles, demonstrated good mechanical robustness. Using transparent CNT electrode, it is readily possible to achieve performances comparable to commercial ITO-based OLEDs. This indicates that flexible CNT electrode is alternative anode materials for conventional ITO anode in flexible OLEDs.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.69-69
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• 2010

Carbon nano tubes (CNTs) have been attractive candidates for fundamental research studies due to their outstanding physical and chemical properties. High thermal and chemical stability and large surface area make CNTs an ideal platform for many nano materials systems. Several applications such as Several applications were proposed for CNTs many of which are concerned with conductive or high strength composites make them excellent candidates for a variety of energy conversion and storage technologies.

• Journal of the Korea Academia-Industrial cooperation Society
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• 제12권6호
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• pp.2904-2912
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• 2011

Water qualities in the decentralized water treatment plants do not frequently satisfy the water standard limit, in particular, fluoride and nitrate are notorious for the poor removal. In this study, an electro-adsorption equipped with carbon nonotube (CNT) electrodes were carried out to effectively remove the nitrate and fluoride in the decentralized water treatment plants. Two types of CNT electrodes, coating and sintering electrodes were applied. Coating electrodes were made based on different kinds of binder and sintering electrodes were made based on different sintering temperature. Removal of fluoride and nitrate when the coated electrodes with organic binder were used for electro-adsorption were 46 and 99.9% respectively, which were better performances than the coated electrodes with inorganic binder were used. On the other hand, removal of fluoride and nitrate when the electrodes sintered at higher temperature ($1,000^{\circ}C$) were 77 and 87% respectively, which were better performances than the electrodes sintered at lower temperature ($850^{\circ}C$). As a consequences, the electro-adsorption equipped with a CNT electrodes could be an potential alternative process for the removal of fluoride and nitrate in a decentralized water treatment plants if proper current density and contact time were applied.

• Transactions on Electrical and Electronic Materials
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• 제6권5호
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• pp.238-242
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• 2005

The Pt counter electrode of a dye-sensitized solar cell (DSSC) plays a role in helping redox reaction of iodine ions in electrolyte, also, transferring electrons into electrolyte. In this case, it is expected that characteristics of Pt electrodes strongly depend on fabrication process and its surface condition. In this study, Pt electrodes were prepared by a electro-deposition and a RF magnetron sputtering. Electrochemical behavior of Pt electrodes was compared using cyclic-voltammetry and impedance spectroscopy. Surface morphology of Pt electrodes was investigated by FE-SEM and AFM. I-V characteristics of DSSC were measured and discussed in association with the surface properties of counter electrode. As a result, electrochemical properties of electro-deposited Pt electrode were superior to that of sputtered Pt electrode. This is likely that enlarged area of surface in electro-deposited Pt electrode in comparison with the case of sputtered Pt electrode playa role in enhancing such electrochemical properties.