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Low-temperature synthesis of nc-Si/a-SiNx: H quantum dot thin films using RF/UHF high density PECVD plasmas

  • Yin, Yongyi;Sahu, B.B.;Lee, J.S.;Kim, H.R.;Han, Jeon G.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.341-341
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    • 2016
  • The discovery of light emission in nanostructured silicon has opened up new avenues of research in nano-silicon based devices. One such pathway is the application of silicon quantum dots in advanced photovoltaic and light emitting devices. Recently, there is increasing interest on the silicon quantum dots (c-Si QDs) films embedded in amorphous hydrogenated silicon-nitride dielectric matrix (a-SiNx: H), which are familiar as c-Si/a-SiNx:H QDs thin films. However, due to the limitation of the requirement of a very high deposition temperature along with post annealing and a low growth rate, extensive research are being undertaken to elevate these issues, for the point of view of applications, using plasma assisted deposition methods by using different plasma concepts. This work addresses about rapid growth and single step development of c-Si/a-SiNx:H QDs thin films deposited by RF (13.56 MHz) and ultra-high frequency (UHF ~ 320 MHz) low-pressure plasma processing of a mixture of silane (SiH4) and ammonia (NH3) gases diluted in hydrogen (H2) at a low growth temperature ($230^{\circ}C$). In the films the c-Si QDs of varying size, with an overall crystallinity of 60-80 %, are embedded in an a-SiNx: H matrix. The important result includes the formation of the tunable QD size of ~ 5-20 nm, having a thermodynamically favorable <220> crystallographic orientation, along with distinct signatures of the growth of ${\alpha}$-Si3N4 and ${\beta}$-Si3N4 components. Also, the roles of different plasma characteristics on the film properties are investigated using various plasma diagnostics and film analysis tools.

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Reduction of the Blocking Artifact in Block-Based Image Coding System (블록 기반 이미지 코딩 시스템에서 블록화 현상 감소 기법)

  • Yoo Kyeong-Jong;Seo Yeong-Geon;Lee Bu-Kwon
    • Journal of Digital Contents Society
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    • v.5 no.1
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    • pp.48-53
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    • 2004
  • Due to NxN block coding blocking artifacts are exhibited by block-based DCT coding images, primarily at low bit rates. In this letter, we propose the new technique that reduce the blocking artifacts pixels in such images. In the case of combining with list block reconstruction techniques, our algorithm can be also used to improve image qiality. And, the performance of the proposed algorithm is demonstrated experimentally.

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유연생산 시스템 모델플랜트 MASFLEX-NX의 개발

  • 성창민
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1996.10a
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    • pp.1-5
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    • 1996
  • As the manufacturing system becomes more complicated and flexible there is a strong trend of having effective flexible manufacturing system in modern manufacturing. Furthermore it seems that competitiveness of an enterprise is dependent upon. to some extent the effectiveness of flexible manufacturing system.

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Theory and Practice in the Tensile Strength Test for Split Ring Shaped Rock Specimen (터진고리 형태의 암석시편에 대한 인장강도 시험의 이론과 실제)

  • Choi, Byung-Hee;Lee, Youn-Kyou;Park, Chan;Park, Chulwhan
    • Explosives and Blasting
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    • v.38 no.1
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    • pp.30-37
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    • 2020
  • In this study the split ring (SR) test was investigated for its applicability to the measurement of the tensile strength of rock specimen of NX size. The concept of the SR test is the same as the half ring (HR) test (Choi et al., 2019) except that the expected fracture plane is perpendicular to the loading direction. Because of this perpendicularity, however, it was believed that the SR test could be more accurate than the HR test. Like the HR specimen, the SR specimen is a curved prismatic bar with a uniform section. Appealing to a basic bending theory in strength of materials, the tensile strength for the special bar can be calculated analytically. Numerical simulations using LS-DYNA revealed, as expected, that the strength errors were 1% and 5% for the tensional and compressional SR tests, respectively, which were much lower than that (12%) of the HR test. To identify the performance of the two SR tests, laboratory experiments were conducted. The HR and Brazilian tests were also performed for comparison. The experiments showed that the ratios of the tensional and compressional SR to Brazilian strengths were 1.2~1.4 and 1.1~1.2, respectively, which are too small compared to empirical values in ordinary bend tests. Consequently, it is concluded that the SR test is not appropriate for use in tensile strength test of rock specimen of NX size. But the ratio of the HR to Brazilian strengths was within 1.7~2.0 for both the previous and present studies, showing a good consistency in their test results.

High rate magnetron sputtering of thick Cr-based tribological coatings

  • Bin, Jin H.;Nam, Kyung H.;Boo, Jin H.;Han, Jeon G.
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.409-413
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    • 2001
  • In this study, high rate deposition of thick CrNx films was carried out by crossed field unbalanced magnetron sputtering for the special application such as piston ring employed in automobile engine. For the high rate deposition and thick CrNx films formation with thickness of 30$\mu\textrm{m}$, high power density of $35W/cm^2$ in each target was induced and the multi-layer films of Cr/CrN and $\alpha$-Cr/CrN were synthesized by control of $N_2$ flow rate. The dynamic deposition rate of Cr and $\alpha$-CrN film was reached to 0.17$\mu\textrm{m}$/min and 0.12$\mu\textrm{m}$/rnin and the thick CrN$_{x}$. film of 30$\mu\textrm{m}$ could be obtained less than 5 hours. The maximum hardness was obtained above 2200 kg/mm$^2$ and adhesion strength was measured in about 70N, in case of multi-layers films. And the friction coefficient was measured by 0.4, which was similar to the value of CrN single-layer film.m.

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Chemical Vapor Deposition of Inorganic Thin Films using Atmospheric Plasma : A Review of Research Trend (상압 플라즈마를 이용한 무기박막의 화학기상 증착법에 대한 연구동향)

  • Kim, Kyong Nam;Lee, Seung Min;Yeom, Geun Young
    • Journal of the Korean institute of surface engineering
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    • v.48 no.5
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    • pp.245-252
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    • 2015
  • In recent years, the cleaning and activation technology of surfaces using atmospheric plasma as well as the deposition technology for coating using atmospheric plasma have been demonstrated conclusively and drawn increasing industrial attention. Especially, due to the simplicity, the technology using atmospheric plasma enhanced chemical vapor deposition has been widely studied from many researchers. The plasma source type commonly used as the stabilization of diffuse glow discharges for atmospheric pressure plasma enhanced chemical vapor deposition pressure is the dielectric barrier discharge. In this review paper, some kinds of modified dielectric barrier discharge type will be presented. And, the characteristics of silicon based compound such as SiOx and SiNx deposited using atmospheric plasma enhanced chemical vapor system will be discussed.

EFFECTS OF ELECTROACUPUNCTURE AND NALOXONE ON MOUTH OPENING REFLEX (전기침과 Naloxone이 개구반사에 미치는 영향)

  • Park, Min-Gap;Seo, Young-Ah;Song, Hyung-Geun;Lee, Sang-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.25 no.2
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    • pp.467-475
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    • 1998
  • 악안면 영역에 동통이 가하여지면 회피반사의 일종인 개구반사가 유발되며, 개구반사의 크기는 뇌간의 중추에 전달된 동통의 크기에 비례한다. 따라서 동통의 정도를 악이복근의 근전도를 이용하여 정량화 할 수 있고 동통의 지표로 이용할 수 있다. 본 실험은 악안면동통에 의하여 유발된 개구반사의 크기가 침점(족삼리) 전기자극으로 감소되는지와 이러한 전기침의 효과가 나타나는데 opioid 물질이 관여하는지에 대하여 연구하고자 하였다. 8주 이상, 150g이상의 Sprague-Dawley계 쥐 34 마리를 암수 구별없이 이용하여 실험하였다. 복강 내 Urethane용액(1.5g/kg)을 주입 전신마취하고 악이복근을 노출시켜 근전도 기록을 위한 한쌍의 선전극을 삽입하였다. 동통유발을 위하여 구강내 하악 이공주변에 0.1mm의 선전극을 한쌍 삽입하고 전기자극기에 연결하였다. 유해자극 조건은 duration $100{\mu}sec$, interval 5sec의 pulse로 정하고 자극의 크기는 개구반사를 일으키는 역치의 2배 크기로 하며 매 측정시마다 동일 자극을 10회식 가하여 평균하였다. 침점의 전기자극을 위하여 침점의 하나인 족삼리(Zusanli)에 표면전극(넓이 $0.4cm^2$ 정도)을 부착하고 자극부위가 약한 근수축을 일으키는 강도인 $100{\mu}sec$, 5V, 2Hz의 자극을 20분간 가하였다. 악이복근의 근전도는 교류증폭기 (Dam80, WPI, USA) 에서 1000배 증폭하여 유해자극이 가해진 순간 oscilloscope 에서 관찰하여 그 크기를 측정하였다. 침점의 전기자극으로 나타나는 진통효과가 opioid의 분비와 관련있는지 알아보기 위하여 opioid 의 길항제인 naloxone(0.2mg/kg)을 복강 내로 투여하였다. 실험군을 4군(group I - IV)으로 분류하였고 각 군에서 근전도를 측정한 단계는 다음과 같다. group I : control 침점에 전기자극 20 분간 가한후(EA), 20분후(EA20) group II : control 침점에 전기자극 20분간 가한후(EA), naloxone 투여 20분후(NX) group III : control naloxone 투여 5분후 침점에 전기자극 20분 가한후(NxEA20) group IV : control naloxone 투여 20분후(NX20) 구강내에 가해진 유해자극에 의하여 발생하는 악이복근 근전도는 족삼리 침점의 전기자극으로 그 크기가 감소하였고 이러한 침점자극의 효과는 naloxone의 투여로 인하여 억제되었다. 이와 같은 결과는 침점자극으로 진통작용이 나타나는데에 opioid 물질이 관여하고 있음을 시사한다.

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Mechanical Design, Analysis, and Environment test for TRIO-CINEMA

  • Lee, Yong-Seok;Kim, Tae-Yeon;Yu, Je-Geon;Jin, Ho;Seon, Jong-Ho;Lee, Dong-Hun;Imme, Thomas;Lin, Robert P.
    • The Bulletin of The Korean Astronomical Society
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    • v.37 no.1
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    • pp.67.2-67.2
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    • 2012
  • 경희대학교와 UC Berkeley, Imperial College London은 우주관측을 위한 초소형 인공위성인 TRIO-CINEMA(TRIO-CINEMA) Project를 수행하고 있다. TRIO-CINEMA는 총 3기의 인공위성으로 경희대학교에서 2기의 위성을, UC Berkeley에서 1기의 위성을, Imperial College에서 3개의 자력계를 제작하고 있다. CINEMA는 Cubesat의 3U 규격으로 크기는 $100mm{\times}100mm{\times}340.5mm$이고 무게는 약 3 kg, 소비전력은 약 3 W이며, 지구 주변의 ENA측정을 위한 주 탑재체인 STEIN(SupraThermal Electrons, Ions, and Neutrals)과 자기장 측정을 위한 부 탑재체인 MAGIC(MAGnetometer from Imperial College)이 탑재되어 약 1년간 800 km 태양동주기 궤도에서 임무를 수행할 예정이다. 위성의 발사는 별도의 POD(Picosatellite Orbital Deployer)라는 Adaptor를 사용해 발사체에 탑재되는데, 발사환경에서 위성이 받을 모든 현상에 관하여 NX Nastran을 사용해 계산을 진행하였다. 계산 결과의 검증을 위해 위성의 Structure Model을 가지고 Random Vibration test를 수행해 위성의 고유 진동수를 측정하였다. 또한 위성이 궤도에서 운용 중 다양하게 받게 되는 열원에 따른 위성의 각 부분의 온도변화를 NX TMG program을 사용하여 계산하였다. 계산 결과의 검증을 위해 3월 Thermal Cycle test 및 Thermal Balance test를 수행할 예정이다. UC Berkeley에서 제작한 위성 1기는 제작완료 후 발사를 위해 발사장으로 배송을 완료하였고, 경희대학교에서 제작 중인 CINEMA 위성 2기는 2012년 후반기 러시아에서 Dnepr 로켓을 사용해 발사 예정이다.

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A STUDY ON WEAR AND CORROSION RESISTANCE OF CrN$_{x}$ FILMS BY CATHODIC ARC ION PLATING PROCESS

  • Han, Jeon-G.;Kim, Hyung-J.;Kim, Sang-S.
    • Journal of the Korean institute of surface engineering
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    • v.29 no.5
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    • pp.545-548
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    • 1996
  • $CrN_x$ films were deposited on SKD61 and S45C by cathodic arc ion plating process. In this study, the microstructure, microhardness, a hesion, wear and corrosion properties of the CrNx films were studied for various nitrogen partial pressures and the results were compared with those from the electroplated hard Cr. The crystal structure of the films was characterized by X-ray diffraction. Wear tests were performed under no lubricant condition at atmosphere by ball-on-disc type tribotester. Corrosion resistance of the films were studied by electrochemical corrosion test, measuring current demsity-potential curves. The results indicated that the $CrN_x$ films formed using ion plation method showed higer hardness and lower current density, friction coefficient than electroplated hard Cr. Consequently, the application of the CrNx coationgs by ion plating which is free of environmental pollution, is expected to improve lifetime of components in industrial practice.

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