• 한국세라믹학회지
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• 제36권12호
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• pp.1322-1326
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• 1999

In2O3 thick film gas sensor for detecting NOx gas of high concentration was fabricated by a screen printing technique. This work focussed on investigation of the change of sensitivity to NOx gas with firing temperatures of sensing layer and on improvement of the sensitivity by adding catalysts such as Al,. Ru, and SnO2 The cross sensitivites of sensor to CO, H2, CH4 and i-C4H10 gases were also examined under NO2 gas concentration of 200ppm Pure In2O3 gas sensor prepared at a firing temperature of 50$0^{\circ}C$ showed a maximum sensitivity to NOx gas at the operating temperature of 40$0^{\circ}C$ Al(0.004 wt%)-In2O3 sensor largely improved the sensitivities to both NO2 and NO gas and showed a superior selectivity compared with other gas sensors.

• 센서학회지
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• 제19권3호
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• pp.176-183
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• 2010

It is considered that the urea injection DeNOx SCR(selective catalytic reduction) system is the only promising method to satisfy the worldwide NOx emission standards. As for the theoretical aspect, reactants of NO and $NO_2$ with $NH_3$ produce $H_2O$, $N_2$ and $O_2$ which do not harm human beings and environmental as well. The realization of maximum NOx conversion (without using a post oxidation catalyst) is only possible with closed loop controlled urea dosing. It means built-in $NH_3$ gas sensor have to be developed for detecting accurate $NH_3$ concentration for the feedback system. Using YSZ(yttria-stabilized zirconia) as a solid state electrolyte and $In_2O_3$ as a sensing material, this paper aims to study dependable $NH_3$ gas sensor for the promising solution of DeNOx technology, which have a reproducible electric output signal, a high sensitivity and fast response.

• 센서학회지
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• 제5권5호
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• pp.39-46
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• 1996

$WO_{3}$에 미량의 Pd 또는 Pt가 첨가된 박막을 이용한 NOx 센서를 제조하였다. $WO_{3}$계 박막은 고진공, 저항가연식 evaporator를 이용하여 분위기온도에서 증착한 다음 $500^{\circ}C$에서 열처리하였다. 5 ppm의 $NO_{2}$가스에 대하여 $200^{\circ}C$에서 측정한 가스감도($R_{gas}/R_{air}$)는 0.5 wt.% $Pt-WO_{3}$ 센서에서 50으로서 최대값을 가졌다.

• 한국전기전자재료학회논문지
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• 제20권9호
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• pp.821-827
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• 2007

The nitrogen oxides, NO and $NO_2$, abbreviated usually as NOx, emitted from combustion facilities such as power plants and automobiles are the typical air-pollutants causing acid rain and photochemical smog. In order to solve the NOx-related pollution problems effectively, we need efficient techniques to monitor NOx in the combustion exhausts and in environments. Development of solid-state electrochemical devices for detecting NOx is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid state amperometric sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing amperometric gas sensor. We concentrated on development of manufacturing process and performance test. Amperometric Nitrogen dioxide sensor was fabricated using NASICON and an $NaNO_2$ layer deposited on the counter electrode. The current response was almost linear with Nitrogen dioxide concentration in the range 1-350 ppb at $150^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.365-365
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for NOx gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of 400 pm were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin films with different thickness are analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The GZO gas sensors are tested by gas measurement system under varing operation temperature and show good performance to the NOx gas in sensitivity and response time.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.40-41
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• 2007

$SnO_2$ nanowires are used at the nanoscale level for the electrical transduction of the gas interaction with these sensing materials. We report on a study of high sensitivity and fast NOx gas sensor. We focused on improving the response time and refresh time by growth nanowires on the trench structure of Si substrate as air path. To improve refresh time we applied the trench structure with depth of $10\;{\mu}m$ by the inductively coupled plasma reactive ion etching(ICP-RIE). The fabricated device was measured at temperature of $200{\sim}300^{\circ}C$. The sensor exhibit ultra-fast and reversible electrical response (t90% ~4 s for response and ~3 s for recovery).

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.601-604
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• 1998

NOX detecting gas sensors using TiO2 doped tungsten oxide semiconductor were prepared and their electrical and sensing characteristics have been investigated. In normal air condition, the sensors of WO3, TiO2 doped WO3 show grain boundary heights of 0.34 eV, 0.25 eV, respectively. The grain boundary barrier energy variation was increased by doping TiO2 into large variation of resistance to NOX gases. And doping the TiO2 4 wt.%, the particle size of WO3 polycrystal films showed higher sensitivity and better sorption characteristics to NOX gas than the pure WO3 films material in air at operating temperature of $350^{\circ}C.$ The TiO2 doped WO3 semiconductor gas sensor shows nano-sized particle size and good sensitivity to sub-ppm concentration of NOX.

• 한국세라믹학회지
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• 제32권12호
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• pp.1369-1376
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• 1995

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

• 전기전자학회논문지
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• 제23권3호
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• pp.793-799
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• 2019

본 연구에서는 웨어러블 Fabric(Nylon) + MWCNT 가스센서 내부에서 열확산을 해석하기 위해서 요소해석 프로그램(comsol)을 이용하여 센서 내부에서의 열용량의 확산 과정과 열용량 분포 경도를 확인하였다. 열용량의 확산과정을 해석하기 위해서 가스센서의 구조체에 대하여 이차원으로 모델링을 진행하였으며, 제시된 모델링에 대해서 센서 구성 부분에 대한 특성값을 제시하여 메시 요소법(FEM)을 이용하여 설계된 웨어러블 가스센서에 대해서 열용량이 확산되는 정도와 열용량 경도를 구하기 위해서 지배방정식으로 1계 편미분방정식을 제안하여 해석하였으며, 열속도 전달식을 제안하여 전극층과 가스 검출부의 10[K/mm] 온도 경도를 구하였다.

• 열처리공학회지
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• 제24권3호
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• pp.140-143
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• 2011

In this work, Ga doped ZnO (GZO) films were prepared by radio frequency (RF) magnetron sputtering without intentional substrate heating on glass substrate and then the effect of the intense electron irradiation on structural and electrical properties and the NOx gas sensitivity were investigated. Although as deposited GZO films showed a diffraction peak for ZnO (002) in the XRD pattern, GZO films that electron irradiated at electron energy of 900 eV showed the higher intense diffraction peaks than that of the as deposited GZO films. The electrical property of the films are also influenced with electron's energy. As deposited GZO films showed the three times higher resistivity than that of the films irradiated at 900 eV In addition, the sensitivity for NOx gas is also increased with electron irradiation energy and the film sensor showed the proportionally increased gas sensitivity with NOx concentration. This approach is promising in gaining improvement in the performance of thin film gas sensors used for the detection of hazard gas phase.