• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.22.2-22.2
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• 2009

Currently, metal silicides become increasingly more essential part as a contact material in complimentary metal-oxide-semiconductor (CMOS). Among various silicides, NiSi has several advantages such as low resistivity against narrow line width and low Si consumption. Generally, metal silicides are formed through physical vapor deposition (PVD) of metal film, followed by annealing. Nanoscale devices require formation of contact in the inside of deep contact holes, especially for memory device. However, PVD may suffer from poor conformality in deep contact holes. Therefore, Atomic layer deposition (ALD) can be a promising method since it can produce thin films with excellent conformality and atomic scale thickness controllability through the self-saturated surface reaction. In this study, Ni thin films were deposited by thermal ALD using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)2] as a precursor and NH3 gas as a reactant. The Ni ALD produced pure metallic Ni films with low resistivity of 25 $\mu{\Omega}cm$. In addition, it showed the excellent conformality in nanoscale contact holes as well as on Si nanowires. Meanwhile, the Ni ALD was applied to area-selective ALD using octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer. Due to the differences of the nucleation on OTS modified surfaces toward ALD reaction, ALD Ni films were selectively deposited on un-coated OTS region, producing 3 ${\mu}m$-width Ni line patterns without expensive patterning process.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2001.02a
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• pp.14-28
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• 2001

As basic study for purpose bioremedation in oil-contaminated environment, Primarily, we isolated biosurfactant producer- strains utilized of oil-agar plate, and measured surface tension and emulsifying activity. We investigated in oil-contaminated soil and sea water. In this laboratory, Pseudomonas sp. EL-012S strain isolated from oil-contaminated soil was able to product novel biosurfactant under the optimal culture condition. Its condition was n-hexadecane 2.0%, NH$_4$NO$_3$0.4%, Na$_2$HPO$_4$0.6%, KH$_2$PO$_4$0.4%, MgSO$_4$.7$H_2O$ 0.02%, CaCl$_2$.2$H_2O$ 0.001%, FeSO.7$H_2O$ 0.001%, initial pH 7.0 and aeration at 3$0^{\circ}C$, respectively. This biosurfactant was produced in both late-exponential and early-stationary phase. The biosurfactant from Pseudomonas sp. EL-012S was composed of carbohydrate, lipid and protein. The purified-biosurfactant was examined two (biosurfactant type I, II) with the silica gel G60 column chromatography and the purified biosurfactant confirmed thin layer chromatography, high performed liquid chromatography and gas chromatography. The biosurfactant type I involved in carbohydrate-lipid-protein characteristics lowered surface tension of water to 27dyne/cm and interfacial tension 4.5dyne/cm aginst to n-hexadecane and the biosurfactant type B involved in carbohydrate lipid characteristics lowered surface tension of water to 30dyne/cm and interfacial tension 8dyne/cm against to n-hexadecane. Specially type I had the properties such as strong emulsifying activity, emulsion stability, pH-stability, thermo-stability, high cleaning activity and forming ability.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.64-64
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• 2000

Since its discovery in 1991, the carbon nanotube has attracted much attention all over the world; and several method have been developed to synthesize carbon nanotubes. According to theoretical calculations, carbon nanotubes have many unique properties, such as high mechanical strength, capillary properties, and remarkable electronical conductivity, all of which suggest a wide range of potential applications in the future. Here we report the synthesis in the catalytic decomposition of acetylene at ~65 $0^{\circ}C$ over Ni deposited on SiO2, For the catalyst preparation, Ni was deposited to the thickness of 100-300A using effusion cell. Different approaches using porous materials and HF or NH3 treated samples have been tried for synthesis of carbon nanotubes. It is decisive step for synthesis of carbon nanotubes to form a round Ni particles. We show that the formation of round Ni particles by heat treatment without any pre-treatment such as chemical etching and observe the similar size of Ni particles and carbon nanotubes. Carbon nanotubes were synthesized by chemial vapour deposition ushin C2H2 gas for source material on Ni coated Si substrate. Ni film gaving 20~90nm thickness was changed into Ni particles with 30~90nm diameter. Heat treatment of Ni fim is a crucial role for the growth of carbon nanotube, High-resolution transmission electron microscopy images show that they are multi-walled nanotube. Raman spectrum shows its peak at 1349cm-1(D band) is much weaker than that at 1573cm-1(G band). We believe that carbon nanotubes contains much less defects. Long carbon nanotubes with length more than several $\mu$m and the carbon particles with round shape were obtained by CVD at ~$650^{\circ}C$ on the Ni droplets. SEM micrograph nanotubes was identified by SEM. Finally, we performed TEM anaylsis on the caron nanotubes to determine whether or not these film structures are truly caron nanotubes, as opposed to carbon fiber-like structures.

• Journal of the Korean institute of surface engineering
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• v.40 no.4
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• pp.175-179
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• 2007

An Fe-Ni-Co based superalloy Incoloy 909 (Incoloy 909) has been used for gas turbine engine component material. This alloy is susceptible to high temperature oxidation and corrosion because of the absence of corrosion resistant Cr. For the improvement of durability of the component of Incoloy 909 aluminizing-chromate coating by pack cementation process has been investigated at relatively low temperature of about $550^{\circ}C$ to protect the surface microstructure and properties of Incoloy 909 substrate. As a previous study to aluminizing-chromate coating by pack cementation of Incoloy 909, the optimal aluminizing process has been investigated. The size effects of source Al powder and inert filler $Al_O_3$ powder and activator selection have been studied. And the dependence of coating growth rate on aluminizing temperature and time has also been studied. The optimal aluminizing process for the coating growth rate is that the mixing ratio of source Al powder, activator $NH_4Cl$ and filler $Al_O_3$ are 80%, 1% and 19% respectively at aluminizing temperature $552^{\circ}C$ and time 20 hours.

• Journal of the Korean Chemical Society
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• v.38 no.3
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• pp.200-207
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• 1994

A biosensor for the measurement of L-glutamine has been constructed by immobilizing the slice of Wistar rat kidney and it's organelle on $NH_3$ gas-sensing electrode. The effects of pH, buffer solution, temperature and thickness of slice were investigated in order to optimize electrode response. The tissue sensor had the linearity in the range of L-glutamine concentration $8.0{\times}10^{-5}{\sim}1.0{\times}10^{-2} M$ with a slope of 53.8 mV/decade in 0.05 M phosphate buffer solution, pH 7.8 at $30^{\circ}C$, and optimum thickness of slice and response time were 30 ${\mu}m$ and 3∼5 min, respectively. The organelle sensor showed the linearity within L-glutamine concentration range of $1.2{\times}10^{-4}{\sim}5.0{\times}10^{-3} M$ with a slope of 54.0 mV/decade in 0.05 M phosphate buffer solution, pH 7.8 at $30^{\circ}C$, and response time was 6∼7 min, respectively. Thus, it is clear that the tissue and organelle sensor will be useful for L-glutamine measurements.

• Journal of Korean Society on Water Environment
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• v.34 no.6
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• pp.621-631
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• 2018

In this study, catalyst was made through incipient wetness method using palladium (Pd) as noble metal, indium (In) as secondary metal, and montmorillonite (MK10) and Al pillared montmorillonite (Al-MK10) as supporters. The nitrate reduction rate of the catalysts was measured by batch experiments where H2 gas was used as reducing agent and formic acid as pH controller. Transmission electron microscopy (TEM) equipped with energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) were all used to determine the elemental distribution of Pd, In, Al, and Si on catalysts. It was observed that Al pillaring increased the Al/Si elemental composition ratio and point of zero charge of MK10, but decreased its BET specific surface area and pore volume. The nitrate reduction rate of Al-MK10 Pd/In was 2.0 ~ 2.5 times higher than that of MK10 Pd/In using artificial groundwater (GW) in ambient temperature and pressure. Nitrate reduction rates in GW were 1.2 ~ 1.7 times lower than those in distilled deionized water (DDW). Nitrate reduction rates in acidic conditions were higher than those in neutral condition in both GW and DDW. The amount of produced NH3-N over degraded NO3- at acid conditions was lower than that of neutral condition. Even though the leaching of Pd after reaction was measured in DDW it was not detected when both Al-MK10 Pd/In and MK10 Pd/In were used in GW. The modification of montmorillonite as a supporter significantly increased the reductive catalytic activities of nitrates. However, the ratio of producing ammonia by-products to degraded nitrates in ambient temperature and pressure was similar.

• Korean Journal of Metals and Materials
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• v.50 no.4
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• pp.331-337
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• 2012

Electrical properties as a function of composition in silicon nitride ($SiN_x$) films grown at low temperatures ($<200^{\circ}C$) were studied for applications to photonic devices and thin film transistors. Both silicon-rich and nitrogen-rich compositions were successfully produced in final films by controlling the source gas mixing ratio, $R=[(N_2\;or\;NH_3)/SiH_4]$, and the RF plasma power. Depending on the film composition, the dielectric and optical properties of $SiN_x$ films varied substantially. Both the resistivity and breakdown field strength showed the maximum value at the stoichiometric composition (N/Si = 1.33), and degraded as the composition deviated to either side. The electrical properties degraded more rapidly when the composition shifted toward the silicon-rich side than toward the nitrogen-rich side. The composition shift from the silicon-rich side to the nitrogen-rich side accompanied the shift in the photoluminescence characteristic peak to a shorter wavelength, indicating an increase in the band gap. As long as the film composition is close to the stoichiometry, the breakdown field strength and the bulk resistivity showed adequate values for use as a gate dielectric layer down to $150^{\circ}C$ of the process temperature.

• Analytical Science and Technology
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• v.20 no.1
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• pp.1-9
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• 2007

The BOD (biochemical oxygen demand) sensor was fabricated by covering a dissolved oxygen (DO) probe with a microbe-impregnated membrane and a dialysis membrane. Various microorganisms isolated from the soils, water and activated sludge have been evaluated for measuring biochemical oxygen demand (BOD); Bacillus species HN24 and HN93 were selected as they exhibited rapid oxygen consumption and fast recovery. Improved BOD sensor could be prepared by using mixed microbes (Bacillus subtilis, Bacillus sp. HN24 and Bacillus sp. NH93) and silicon rubber gas-permeable membrane for DO probe, and by bubbling 50% $O_2$ ($N_2$ valence) through background buffer solution. This system exhibited excellent analytical performance resulting in good linearity ($r^2=0.9986$) from 0 to 100 mg/L level of BOD.

• Animal Bioscience
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• v.35 no.10
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• pp.1592-1605
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• 2022

Objective: The objective of this study was to select an effective in vitro digestion-fermentation model to estimate the effect of decreasing dietary crude protein (CP) on odor emission during pig production and to suggest potential prediction markers through in vitro and in vivo experiments. Methods: In the in vitro experiment, three diet formulations with different CP contents (170 g/kg, 150 g/kg, and 130 g/kg) but containing the same standardized ileal digestible essential amino acids (SID-EAA) were assessed. Each diet was evaluated by two different in vitro gastric-intestinal phase digestion methods (flask and dialysis), combined with fresh pig feces-ferment inoculation. Eighteen growing barrows (31.9±1.6 kg) were divided into three groups: control diet (180 g CP/kg, without SID-EAA adjustment), 170 g CP/kg diet, and 150 g CP/kg diet for 4 weeks. Results: The in vitro digestion results indicated that in vitro digestibility was affected by the gastric-intestinal phase digestion method and dietary CP level. According to the gas kinetic and digestibility results, the dialysis method showed greater distinguishability for dietary CP level adjustment. Nitrogen-related odor compounds (NH₃-N, indole, p-cresol, and skatole) were highly correlated with urease and protease activity. The feeding study indicated that both EAA-adjusted diets resulted in a lower odor emission especially in p-cresol and skatole. Both protease and urease activity in feces were also closely related to odor emissions from nitrogen metabolism compounds. Conclusion: Dialysis digestion in the gastric-intestinal phase followed by fresh fecal inoculation fermentation is suitable for in vitro diet evaluation. The enzyme activity in the fermentation and the fecal samples might provide a simple and effective estimation tool for nitrogen-related odor emission prediction in both in vitro and in vivo experiments.

• Journal of Climate Change Research
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• v.10 no.3
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• pp.237-242
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• 2019

Ammonia is main precursor gas of secondary particulate matter and contributes almost 78% of total ammonia emission from the agricultural sector in Korea. The current method of estimating ammonia emission from fertilizer application, which contributes 7% of the total emission, has high uncertainty and needs to be improved to better predict PM2.5 concentration. In this study, we suggest an improvement method for ammonia emission quantification from fertilizer application. The first improvement was in the emission factor of NPK fertilizer by conducting a field study to verify the currently used factor. The improved NPK emission factor of 52.2 kg NH ton-1N was confirmed by comparing with the value from the EEA (European Environment Agency) and adjusting the value for the Korean climate and soil conditions. We also improved the amount of fertilizer usage by including the sales amount to the fertilizer supply amount of the Korean Farmers Association, increasing total fertilizer usage by 39.8%. As the statistical data on fertilizer supply and sales are compiled yearly, we estimated monthly emission of ammonia by considering cultivated areas and timing of fertilization for each crop. In summary, we suggest a novel and practical method to improve estimation methodology of ammonia emission from the field of fertilizer application: 1) emission factor of NPK fertilizer was reconfirmed; 2) total amount of fertilizer use was revised considering fertilizer sales; and 3) monthly emission of ammonia was realized by considering different crop practices. A bottom-up approach to compile activity data is needed to increase the estimation accuracy of monthly emission of ammonia, which is very helpful for predicting PM2.5 concentration.