Effect of Composition on Electrical Properties of Multifunctional Silicon Nitride Films Deposited at Temperatures below 200℃ |
Keum, Ki-Su
(Department of Nano Science and Technology, University of Seoul)
Hwang, Jae Dam (Department of Nano Science and Technology, University of Seoul) Kim, Joo Youn (Department of Physics, University of Seoul) Hong, Wan-Shick (Department of Nano Science and Technology, University of Seoul) |
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