• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.58-63
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• 1995

The effects of substrate temperature, RF power, and $NH_{3}/SiH_{4}$ gas flow ratio on the dielectric constant and optical bandgap of amorphous silicon nitride (a-SiNx:H) thin films prepared by PECVD method using RF glow discharge decomposition of $SiH_{4}$ and $NH_{3}$ gas mixtures have been studied. The dielectric constant and optical bandgap of a-SiNx:H thin films were greatly exchanged as by increasing substrate temperature, RF power, and $NH_{3}/SiH_{4}$ gas flow ratio. The dielectric constant of a-SiNx:H films was increased and optical bandgap of a-SiNx:H films was decreased as the substrate temperature was increased. When the substrate temperature, RF power, gas pressure, $NH_{3}/SiH_{4}$ gas flow ratio, and thickness were $250^{\circ}C$, 20 W, 500 mTorr, 10 and $1500\;{\AA}$, respectively, the dielectric constant, breakdown field and optical bandgap of a-SiNx:H film were 4.3, 1 MV/cm, and 2.9 eV, respectively.

• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.176-183
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• 2010

It is considered that the urea injection DeNOx SCR(selective catalytic reduction) system is the only promising method to satisfy the worldwide NOx emission standards. As for the theoretical aspect, reactants of NO and $NO_2$ with $NH_3$ produce $H_2O$, $N_2$ and $O_2$ which do not harm human beings and environmental as well. The realization of maximum NOx conversion (without using a post oxidation catalyst) is only possible with closed loop controlled urea dosing. It means built-in $NH_3$ gas sensor have to be developed for detecting accurate $NH_3$ concentration for the feedback system. Using YSZ(yttria-stabilized zirconia) as a solid state electrolyte and $In_2O_3$ as a sensing material, this paper aims to study dependable $NH_3$ gas sensor for the promising solution of DeNOx technology, which have a reproducible electric output signal, a high sensitivity and fast response.

• Journal of the Microelectronics and Packaging Society
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• v.11 no.4 s.33
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• pp.29-35
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• 2004

We have deposited the W-N diffusion barrier on Si substrate with $NH_3$ pulse plasma enhanced atomic layer deposition (PPALD) method by using $WF_6$ and $NH_3$ gases. The $WF_6$ gas reacts with Si that the surface corrosion occurs severely, but the $NH_3$ gas incorporated with pulse plasma and $WF_6$ gas are easily deposited W-N thin film without Si surface corrosion. Because the $NH_3$ with pulse plasma can be active species dissociated and chemisorbed on Si. Thus the Si surface are covered and saturated with nitrogen, which are able to deposit the W-N thin film. We also examine the deposition mechanism and the effect of $NH_3$ pulse plasma treatment.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.6
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• pp.782-785
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• 2013

Multi-walled carbon nanotubes were synthesized on Ni catalyst using thermal chemical vapor deposition. By introducing ammonia gas during the CNT synthesis process, clean and vertically aligned CNTs without impurities could be prepared. As the ammonia gas increased a partial pressure of hydrogen in the mixed gas during the CNT synthesis process, we could control the CNT synthesis rate appropriately. As the ammonia gas has an etching ability, amorphous carbon species covering the catalyst particles were effectively removed. Therefore catalyst particles could maintain their catalytic state actively during the synthesis process. Finally, we could obtain clean and vertically aligned CNTs by introducing $NH_3$ gas during the CNT synthesis process.

• Clean Technology
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• v.14 no.2
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• pp.117-122
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• 2008

Theoretical analysis was conducted on the combustion and the NOx formation characteristics of the coal-derived synthetic gases with medium-BTU heating value. The synthetic gas was assumed to contain the major species of CO, $H_2,\;CO_2$, and $N_2$ and the minor species of $CH_4$ and $NH_3$. Through thermochemical analysis on the combustion of the synthetic gas, the flame temperature, major and minor species of exhaust gas, and thermal and fuel NOx emissions were computed. In addition, the effects of the $CH_4$ and the $NH_3$ components in syngas fuel on combustion and NOx emission were investigated. Based on the computed results on the synthetic gases, basic direction and guidelines were provided fur the low NOx design of gas turbine combustor.

• Proceedings of the Korea Society of Poultry Science Conference
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• 2001.11a
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• pp.86-88
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• 2001

An experiment was conducted to determine how broiler performance, feces and litter concentration of N can be maintained and whether NH3 gas concentration can be reduced with reducing dietary CP, adding ALUM(AL2(SO4)3.14H20) in litter and supplementing with amino acid and vitamin D in feed. The experiment was divided into a starter period(1 to 21d) and grower period(22 to 42d), each having three different CP with 90 birds per treatment of 3 replications. The CP treatments consisted of a mean CP of 23.0(control 71), 20.4 (72) and 18.0 (73) % for starter and 21.0(control 71),19.3 (72) and 17.0 (73) % for grower, respectively, but with similar amino acid levels as the control. Alum was mixed in each treatment except control treatment with 200g in kilogram litter(rice bran) weight. Results suggested that reducing CP below control in the diets fed during 3wks and 6wks slightly increased feed gain and slightly decreased feed intake and weight gain. However, there were no significant difference among treatments. Reducing CP caused NH3 gas concentration to decline by 74.8 - 80.9% when Alum was mixed in litter(P < 0.05). Litter N concentration did not show any difference(P > 0.05) among treatments. These results suggest that dietary manipulation with adding Alum in litter show for significant reducing NH3 gas concentration while maintaining acceptable Production performance from broiler.

• Journal of the Korean Ceramic Society
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• v.48 no.2
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• pp.200-204
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• 2011

Increase of surface area and decrease of band gap in $TiO_2$ semiconductors are significant to improve the efficiency of water splitting by photoelectrolysis. In this study $TiO_2$ nanotube arrays with ~7 um length and ~100 nm diameter were fabricated by an anodizing technique of titanium foils using DMSO (dimethyl sulfoxide)-based electrolytes. Then to control the band gap of the $TiO_2$ arrays, they were annealed at $550^{\circ}C$ for up to 180 min in $NH_3$ gas ambient. The samples annealed in $NH_3$ gas for 30 min and 60 min showed superior photo-conversion efficiency for water splitting under white and visible light. A $TiO_2$ nanotube annealed in $NH_3$ gas ambient for a period longer than 120 min showed 1 order higher leakage current. It is believed that the decrease of band gap and increase of conductivity in $TiO_2$ nanotube arrays due to $NH_3$ gas treatments result in the superior water-splitting performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.406-409
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• 1999

Experimental Investigations were carried out to remove NOx, SOx simultaneously from simulated flue gas[NO(0.02%)-SO$_2$(0.08%)-$CO_2$-Air-$N_2$] by using a plasma chemical reaction. Ammonia gas(14.81%) balanced by argon was diluted by all and was Introduced to mall simulated flue gas duct through NH$_3$ Injection system which is in downstream of reactor. The NH$_3$ molecular ratio(MR) was determined based on (NH3) to [NO+S0$_2$]. MR is 1, 1.5, 2.5. The NOx removal rate significantly increased with increasing NaOH bubble quantity. The SO$_2$ removal rate was not significantly effected by applied voltage, however it fairly Increased with increasing NH$_3$ molecule ratio. By-product aerosol particle was observed by XRD(X-ray diffraction) after sampling, The NOx, SOx removal rates, when H2O vapour bubbled by dry all was injected to plasma reactor, were better than those of other cases. When aqueous NaOH solution(20%) bubbled by 2.5( ι /min) of $N_2$ and 0.5 ( ι /min) NH$_3$(MR=1.5) were injected to simulated flue gas, The NOx. SOx removal rate was 95 ~ 100[%]

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.11 no.6
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• pp.123-132
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• 2012

Gas sensors has been used very differently that depending on following purposes; Automotive (exhaust gas, fuel mixture gas, oxygen, particulates), agriculture / food industry (fresh, stored, CO2, humidity, NH3, nitrogen oxide gas, organic gas, toxic gas emitted from pesticides and insecticides), industrial / medical (chemical gas, hydrogen, oxygen and toxic gases), military (chemical weapon), environmental measurements (CO and other air pollution consisting of sulfur and nitrogen gas), residential (LNG, LPG, butane, indoor air, humidity). The types of industrial toxic substances are known about 700 species and many of these exist in gaseous form under normal conditions. he multi-gas detection sensors will be developed for casualties that detect the most important and find easy three kinds of gases in marine plant; carbon dioxide(CO2), carbon(CO), ammonia(NH3). Package block consists of gas sensing device minor ingredient, rf front end, zigbee chip. Develope interworking technology between the sensor and zigbee chip inside a package. Conduct a performance test through test jig about prototype zigbee sensor module with rf output power and unwanted emission test. This research task available early address when poisonous gas leaked from large industrial site and contribution for workers' safety at the enclosed space.

• Korean Journal of Materials Research
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• v.16 no.6
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• pp.367-372
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• 2006

Polytetrafluoroethylene (PTFE) surface was modified for improving hydrophilicity by ion irradiation in environmental gas of $N_2$ and $NH_3$, respectively. The water contact angle onto the PTFE surface increased from $104{\circ}$ to over $140{\circ}$ by Ar ion irradiation in $N_2$ gas. In the case of $NH_3$ as environmental gas, there were a slight increase of contact angle from ion dose of $1{\times}10^{15}\;to\;5{\times}10^{15}\;ions/cm^2$, and its dramatic decrease to the value of 35o at the conditions of ion dose higher than $1{\times}10^{16}\;ions/cm^2$. It was found from SEM results that the surface morphology of PTFE was changed into one with filament structure after Ar ion irradiation in $N_2$ gas environments. On the contrary, Ar ion irradiation in $NH_3$ gas condition induced the PTFE surface with network structure. Hydrogen ion irradiation resulted in a little change of PTFE surface morphology, comparing with the case of Ar ion irradiation. The water contact angle of hydrogen ion irradiated PTFE surface in reactive gas decreased with increment of ion dose. Hydrogen ion irradiation could improve hydrophilicity with little change of surface morphology. It might be considered from FT-IR results that the improvement in wettability of PTFE surface by ion irradiation in $N_2$ and $NH_3$ gases could be due to the hydrophilic groups of NHx bonds.