• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• Solar Energy
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• v.11 no.3
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• pp.53-61
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• 1991

In this research, Octacosane($C_{28}H_{58}$) and Sodium Acetate Trihydrate($CH_3COONa{\cdot}3H_2O$) were selected as latent heat storage materials to store off-peak electricity or waste heat of an industrial plant. Experimental analyses were performed in terms of the variation of phase change temperature and latent heat, phase change stability for the long term utilization. The results were as follows. 1. The phase change temperatures of industrial grade Octacosane and Sodium Acetate Trihydrate were $60.7^{\circ}C$ and $57.4^{\circ}C$, the latent heat were 60.6kcal/kg and 51.1kcal/kg respectively. 2. The latent heat quantity of Octacosane was decreased with the increasing number of phase change cycles. It decreased from 60.6kcal/kg to 47.2kcal/kg upto 200 cycles and then no variation was observed after 200 cycles. 3. To prevent the supercooling of Sodium Acetate Trihydrate, the nucleating agent, Sodium Pyrophosphate Decahydrate of 3 wt% was added, and then the supercooling temperature (Tm-Tsc) was decreased from $25.7^{\circ}C$ to $1^{\circ}C$. The phase separation was disappeared by the addition of CMC-Na of 3 wt% as a thickener. It was found that the optimal quantity of nucleating agent and thickener was 4wt% considering the stability of SAT as a latent heat storage material. 4. The phase change temperature of Sodium Acetate Trihydrate($CH_3COONa{\cdot}3H_2O$) was adjusted from 57.4 to $46.2^{\circ}C$ by the addition of UREA. And then the latent heat quantity was decreased from 51.1 to 38.3kcal/kg. 5. When the heat storage capacities between the sensible and latent heat storage materials were analyzed and compared in heating process from 30 to $90^{\circ}C$, the heat storage capacity of Octacosane was 2.45 times larger than water and 12.5 times than granite at $60.7^{\circ}C$, and the heat storage capacity of Sodium Acetate Trihydrate was 2.53 times larger than water and 12.91 times than granite at $57.4^{\circ}C$.

• Archives of Pharmacal Research
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• v.21 no.4
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• pp.458-464
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• 1998

Search for a new $\alpha$-methylene-$\gamma$-butyrolactone-bearing 6-substituted purine as a potental antitumor agent has led to synthesize seven, hitherto unreported, $5^1$-Methyl-$5^1$-[(6-substituted-9H-purin-9-yl)methyl]-$2^1$-oxo-$3^1$- methylenetetrahydrofurans (H, Cl, l, $CH_3$, $NH_2$, SH, >C=O) (6a-g). These include $5^1$-Methyl-$5^1$-[(9H-purin-9-yl)methyll-$2^1$-oxo-$3^1$ -methylenetetrahydrofurans (6a), $5^1$-Methyl-$5^1$-[(6-chloro-9H-purin-9-yl)methyl]-$2^1$-oxo-$3^1$-methylenetetrahydr ofurans (6b), $5^1$-Methyl-$5^1$-[(6-chloro-9H-purin-9-yl) methyl]-$2^1$-oxo-$3^1$-methylenetetrahydrofurans (6c), $5^1$-Methyl-$5^1$-[(6-methyl-9H-purin-9-yl) methyl]-$2^1$-oxo-$3^1$-methylenetetrahydrofurans (6d), $5^1$-Methyl-$5^1$-[(9H-adenin-9-yl)methyll-$2^1$-oxo-$3^1$-methylenetetrahydrofurans (6e), $5^1$-Methyl-$5^1$-[(6-mercapto-9H-purin-9-yl) methyl]-$2^1$-oxo-$3^1$-methylenetetrahydrofurans (6f) and $5^1$-Methyl-$5^1$-[(9H-hypoxanthin-9-yl)methyll-$2^1$-oxo-$3^1$-methylenetetrahydrof urans (6g) which were made by the Reformatsky-type reaction of ethyl $\alpha$-(bromomethyl) acrylate with the corresponding (6-substituted-9H-purin-9-yl)-2-propanone intermediates (5a-g). These ketone intermediates 5a-g, 1-(9H-purin-9-yl)-2-propanone (5a), 1-(6-chloro-9H-purin-9-yl)-2-propanone (5b), 1-(6-iodo-9H-purin-9-yi)-2-propanone (5c), 1-(6-methyl-9H-purin-9-yl)-2-propanone (5d), 1-(9H-adenin-9-yl)-2-propanone (Se), 1-(6-mercapto-9H-purin-9-yl)-2-propanone (5f), and 1-(9H-hypoxanthin-9-yl)-2-propanone (5g) were directly obtained by the alkylation of the 6-substituted purine bases with the chloroacetone in the presence of $K_2$$CO_3$ (or NaH) under DMF (or DMSO). The preliminary in vitro cytotoxcity assay for the synthetic .alpha.-methylene-y-butyro-lactone compounds (6a-g) were determined against three cell lines (PM-3A, P-388, and K-562) and showed the moderate antitumor activity ($IC_50$ ranged from 1.4 to 4.3 $\mu\textrm{g}$/ml) with the compound $5^1$-methyl-$5^1$ -[(9H-hypoxanthin-9-yl)methyl]-$2^1$-oxo-$3^1$-methylenetetrahydrofuran (6g) showing the least antitumor activity.

• Journal of The Korean Society of Grassland and Forage Science
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• v.32 no.3
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• pp.309-316
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• 2012

This study was performed to investigate the effects of forage cropping system and cattle slurry on productivity of whole crop rice, whole crop barley and Sorghum-Sudangrass hybrid and environmental pollution in paddy land. Forage cropping system used in this study was consisted of double-cropping whole crop barley followed by whole crop rice applied with cattle slurry (DWBRC) and double-cropping whole crop barley followed by Sorghum-Sudangrass hybrid applied with cattle slurry (DSSBC). The field experiments were conducted on the clay loam at Backsanmyun, Kimje, Chunlabukdo province in Korea for three years (May 2006 to Apr. 2009). This study was arranged in completely randomized design with three replicates. The field had been sown with whole crop rice 'Nampyung', Sorghum-Sudangrass hybrid 'Sordan79' and whole crop barley 'Younyang'. The yields of whole crop barley in DWBRC and DSSBC were 7,515 kg/ha and 8,515 kg/ha, respectively. The yields of whole crop barley in DSSBC significantly increased as compared with that of DWBRC (p<0.05). The contents of crude protein, neutral detergent fiber (NDF), acid detergent fiber (ADF), total digestible nutrient (TDN) of whole crop barley in DWBRC were not difference as compared with those of DSSBC. The pH, and contents of total nitrogen and organic matter in soil samples collected at the end of the experiment increased as compared with those at the beginning of the experiment (p<0.05). However, The content of phosphate in DWBRC was no difference as compared with DSSBC. In addition, after the end of experiment, the concentrations of exchangeable cations (Ca, Na, Mg and K) in soil samples collected at the end of the experiment were remarkably higher than those at the beginning of the experiment (p<0.05). The concentrations of $NH_4$-N, $NO_3$-N, $PO_4$-P, Cl, Ca, K, Mg and Na in leaching water were hardly influenced by the cropping system and application of cattle slurry.

• Journal of Korean Society of Environmental Engineers
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• v.33 no.1
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• pp.39-46
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• 2011

NO oxidation is an important prerequisite step to assist the selective catalytic reduction (SCR) at low temperatures ($<200^{\circ}C$). Therefore, we conducted the lab- and bench-scales experiments appling the sodium chlorite powder ($NaClO_2(s)$) for the oxidation of NO to $NO_2$ and the carbon-based catalyst for the reduction of $NO_x$ and $SO_2$; the lab- and bench-scales experiments were conducted in laboratory and iron-ore sintering plant, respectively. In the lab-scale experiment, known concentrations of $NO_x$ (200 ppm), $SO_2$ (75 ppm), $H_2O$ (10%) and $NH_3$ (400 ppm) in 2.6 L/min were introduced into a packed-bed reactor containing $NaClO_2(s)$, then gases produced by the reaction with $NaClO_2(s)$ were fed into the carbon-based catalyst (space velocity = $2,000hr^{-1}$) at $130^{\circ}C$. In the bench-scale experiment, flue gases of $50Nm^3/hr$ containing 120 ppm NO and 150 ppm $SO_2$ were taken out from the duct of iron-ore sintering plant, then introduced into the flow reactor; $NaClO_2(s)$ were injected into the flow reactor using a screw feeder. Gases produced by the reaction with $NaClO_2(s)$ were introduced into the carbon-based catalyst (space velocity = $1,000hr^{-1}$). Results have shown that, in both lab- and bench-scales experiments, NO was oxidized to $NO_2$ by $NaClO_2(s)$. In addition, above 90% of $NO_x$ and $SO_2$ removal were obtained at the carbon-based catalyst. These results lead us to suggest that the combination of $NaClO_2(s)$ with the carbon-based catalyst has the potential to achieve the simultaneous removal of $NO_x$ and $SO_2$ at low temperature ($<200^{\circ}C$).

• Korean Journal of Environmental Agriculture
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• v.27 no.1
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• pp.1-9
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• 2008

The main purpose of this study is to accumulate the fundamental data representing groundwater of plastic film houses by means of water quality and its multivariate statistical analysis. Groundwater samples were collected in every two years since 2000 to 2004 from total 211 sites. According to the result of water quality analysis, ground water quality was suitable for irrigation purpose averagely. Correlation analysis showed that EC was highest positively correlated with $Mg^{2+}$ to 0.810(p<0.01), 0.776(p<0.01) in April and July, respectively. $NO_3-N$ was highest positively correlated with T-N to 0.794(p<0.01) in October. This result shows that it can lead to a different result even in similar case sometimes. Four factors were extracted through factor analysis in April and July, but five factors were extracted in October. The proportions of cumulative variance by the factor were 64.9, 60.2, and 70.7 in April, July, and October, respectively. The first factor was highly related to anions and cations such as $Ca^{2+},\;Mg^{2+},\;Cl^-,\;{SO_4}^{2-}$, and EC in contrast to that of stream water. According to the cluster analysis, 211 sites are classified into four groups. Common type of ground water quality was shown in group A. The pH and $PO_4-P$ were highest in Group B. The anions and cations were highest in Group C. $COD_{Cr}$ was highest in Group D.

• Applied Biological Chemistry
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• v.22 no.2
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• pp.123-134
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• 1979

For the purpose of developing a microbial insecticide utilizing Bacillus thuringiensis Berliner, research was done and the following results were obtained. 1) As the freeze-dried matter of the cocoon-cooked water discarded from the filature contains much crude protein(51.825%) and a lot of inorganic salts, it can make a good nutrition source for the culture cf B. thuringiensis Berliner. 2) Based on the suspensibility, formula F-5 turned out to be the most suitable for insecticidal use. Its composition includes 0.2 g of the cell-spore-crystal mixture, 25 g of 200-mesh kaolin, 2.5 g of New Kalgen-NX-150, and 2.5 g of glycerine admixed with 8 ml of distilled water and granulated in 80-mesh size. 3) All the components of F-5, F-6 and F-7 are identical except that the amounts of cell-spore-crystal mixture of F-5, F-6, and F-7 are 0.2 g, 0.4 g, and 0.6 g, respectively. Accordingly, their physical properties are almost all the same. 4) Formulas F-5, F-6, and F-7 exhibited an excellent toxicity to Anomis mesogona Walker, Dendrolimus spectabilis Butler, and Margaronia perspectalis Walker at the concentration of 5%. 5) Formulas F-8 and F-9 which contain $NaHCO_3$ as one of their components showed a remarkably reduced toxicity to Anomis mesogona Walker and Dendrolimus spectabilis Butler than F-6 which does not contain $NaHCO_3$. 6) A maximum of $2.97{\times}10^9$ spores per ml was obtained by incubating B. thuringiensis in M-3 which has a pH of 7.05 and comprises 0.2% of ammonium sulphate and 0.8% of glucose dissolved in the cocoon-cooked water, with aeration for 96 hours. 7) Formula F-6 exhibited a somewhat reduced toxicity to Anomis mesogona Walker and Dendrolimus spectabilis Butler, when stored at room temperature for 70 days after formulation and it is desirable to keep it in a dark and cold place. 8) In held applications, formula F-6 showed a good activity in controlling Monema flavescens Walker. Margaronia perspectalis Walker, and Macrosiphum ibarae Matsumura.

• Korean Journal of Soil Science and Fertilizer
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• v.3 no.1
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• pp.55-59
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• 1970

In an effort to determine the bio-synthesis in the soybean as investigate to the variance of each substance: Glutamic acid, Aspartic acid and its amides during the growth of younger soybean plants. 1. The variance-curve of Gultamic acid and Aspartic acid as the acidic amino acids in the cotyledons was appeared the peak the first half period at Glutamic acid and the latter half at Aspartic acid in the growth of soybeans, and was received the symmetrical impression centering around the stage of adult leaf-development. But, in the embryonic organ, it appears the peak at both part, in the developmental stage of adult leaf and also appears near phenomena of increase and decrease in the variation-curve of metabolites. 2. It's amides-Gultamine and Asparagine-appears the peak at the developmental stage of adult leaf in the both cotyledons and embryonic organ, and rapid increase in the cotyledons were very impressed compare with the decrease at fallen stage of cotyledons in the embryonic organs. 3. In the relation of variance at Glutamic acid and Aspartic acid, both substance were discovered the fact of translocation from cotyledon to embryonic organ, and Glutamic acid could supposed that bear the charges of outrider substance in other amino acid as the Glutamic acid-self and major basic function for receiving the ammonia as the nitrogen contain constituent of plant. In the case of Glutamine, formation-mechanism of ammonia which develops due to its hydrolysis in the latter period of soybean growth, suggested that was forfeit its function till instance of fallen cotyledons. 4. In the relation the Aspartie acid and Asparagine, Aspartic acid which begins to decrease from seed-state was supposed that bear sufficiently the charge of outrider substance in the formation of Asparagine other than translocated to embryonic organ from cotyledon. And, formation-theory of Aspartic acid which suppose as formational substance from Kreb's cycle were recognized from latter period of soybean growth, and then, rapid accumulation of Asparagine's amounts were supposed that adapt to two theory: Theory which consider to transformation as Asparagine state for pressing to less than noxious weight the concentration of ammonia developing from the cells, and was formate and accumulate as ammonia or carbohydrates containing excess in the cotyledons.

• Korean Journal of Soil Science and Fertilizer
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• v.39 no.5
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• pp.292-297
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• 2006

A research was carried out to investigate the release pattern of slow release nitrogen fertilizer compound(SRNC) that is latex coated urea(LCU) and to recommend the application rate of the fertilizer at dry seeding rice culture in Honam plain area. The experiment was conducted at experimental field(Jeonbug series, fine silty, mixed, nonacid, mesic family of Fluvaquentic Endoaquepts) of National Honam Agricultural Research Institute. A medium late maturing rice variety (Dongjinbyeo) was seeded at the rate of $60kg\;ha^{-1}$ by drill seeder on April 1, 1997 and March 30, 1998. Fertilizer application rate was $160-90-110kg\;ha^{-1}$ for $N-P_2O_5-K_2O$. Soil ammonium nitrate($NH_4-N$) contents remained higher in all SRNC plots than conventional ones and higher with the increase of SRNC application rate until panicle formation stage, but the contents was higher in the conventional than NRNC plots at the heading stage. The plant hight was taller in SRNC than conventional plots until maximum tiller stage, but became similar in both conventional and SRNC plots at heading stage. The culm and panicle number was greater in SRNC than conventional plots throughout all growth stage, but the effective tiller rate was higher in conventional ones. Nitrogen efficiency was higher in the SRNC than conventional plots, but the efficiency was decreasing with the higher SRNC level. The spikelet number per unit area was greater in SRNC than conventional plots, and increased with higher SRNC level. The more spikelet number with higher NRNC level resulted in lower 1,000-grain weight. The rice yield in conventional plot was similar with only 60% SRNC level, but lower than 80% and 100% SRNC levels. However, slight lodging was observed in 100% SRNC level. In conclusions, we recommend NRNC application level as 80% of standard nitrogen application for early dry seeding culture of rice Honam plain area.

• Journal of Animal Environmental Science
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• v.16 no.3
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• pp.227-236
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• 2010

This study was conducted to develop an measuring system and method for fermentation degree of liquid swine manure by visible ray. The constituent changes of liquid swine manure were examined. pH gradually increased with time, but EC gradually decreased. Malodor strength decreased gradually with aeration treatment with time. Control needed more time to decrease malodor strength than aeration treatment. In aeration treatment, there was no germination of seeds (radish, chinese cabbage) up to 6 weeks and germination rate at 15th week was over 50%. However, in control, there was no germination up to end of experiment. Circular chromatography method showed that there was change after 10th week in aeration treatment but there was no change up to end of experiment in control. As a result, the fermentation degree of liquid swine manure would have relations among pH, EC, germination rate, malodor concentration, and reaction of circular chromatography. The simple analytical instrument for liquid swine manure consisted of a tungsten halogen and deuterium lamp for light source, a sample holder, a quartz cell, spectrometer for spectrum analyzer, a malodour measuring device, a software, etc. Results showed that the simple analytical instrument that was developed can approximately predict the fermentation degree of liquid swine manure by visible ray. Generally, the experiment proved that the simple analytical instrument was reliable, feasible and practical for analyzing the fermentation degree of liquid swine manure.