• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.465-466
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• 2006

A single-wall carbon nanotube (SWCNT) has been studied as a material of Nano-Eletro-Mechanical-System (NEMS) device together with various nanowires. In order for oscillation of a multi-wall carbon nanotube (MWCNT) or a single-walled carbon nanotube (SWCNT) on plane surface, it needs suspension of a CNT across trench electrodes. So we propose fabrication method of a MWCNT resonator using dielectrophoresis and show successful results of suspeneded MWNT. Thin electrodes with large gaps could not suspend small diameter MWNT but thicker electrodes could. Thin MWNT could be suspended only when the electrode gap was reduced.

• Structural Engineering and Mechanics
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• v.82 no.5
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• pp.629-641
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• 2022

This study deals with the spinning impact on flap-wise vibration characteristics of nonlocal functionally graded (FG) cylindrical beam based on the Hyperbolic shear deformation beam theory. The nonlocal strain gradient theory is used to investigate the small-scale impact on the nonlocal motion equation as well as corresponding nonlocal boundary conditions. Based on the mathematical simulation and according to the Hamilton principle, the computerized modeling of a rotating functionally graded nanotube is generated, and then, via a numerical approach, the obtained mathematical equations are solved. The calculated outcomes are helpful to the production of Nano-electro-mechanical-systems (NEMS) by investigating some designed parameters such as rotating speed, hub radius, length-scale parameters, volume fraction parameters, etc.

• Advances in concrete construction
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• v.15 no.1
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• pp.47-61
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• 2023

This paper examines the dynamic response of rotating nanodevices under the external harmonic load. The spinning nanosystem is made of nanoscale tubes that rotate around the central nanomotor and is mathematically modeled via high-order beam theory as well as nonclassical nonlocal theory for the size impact. According to the Hamilton principle, the dynamic motion equations are derived, then the time-dependent results are obtained using the Newmark Beta technique along with the generalized differential quadratic method. The presented results are discussed dynamic deflection, resonant frequency, and natural frequency in response to the different applicable parameters, which help develop and produce nanoelectromechanical systems (NEMS) for various applications.

• Computers and Concrete
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• v.31 no.2
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• pp.139-149
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• 2023

This article investigates the statically analysis regarding the thermal buckling behavior of a nonuniform small-scale nanobeam made of functionally graded material based on classic beam theories along with the nonlocal Eringen elasticity. The material distribution of functionally graded structures is composed of temperature-dependent ceramic and metal phases in axial and thickness directions, called two-dimensional functionally graded (2D-FG). The partial differential (PD) formulations and end conditions are extracted by using to the conservation energy method. The porosity voids are assumed in the nonuniform functionally graded (FG) structure. The thermal loads are in the axial direction of the beam. The extracted nonlocal PD equations are also solved by employing generalized differential quadrature method (GDQM). Last but not least, the information acquired is used to produce miniature sensors, providing a unique perspective on the growth of nanoelectromechanical systems (NEMS).

• Journal of Sensor Science and Technology
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• v.16 no.6
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• pp.457-461
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• 2007

This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on $SiO_{2}$ and AlN substrates, respectively. The crystallinity and the bonding structure of poly 3C-SiC grown on each substrate were investigated according to various growth temperatures. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD and FT-IR by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_{2}$ and AlN were not different. However, their electron mobilities were $7.65{\;}cm^{2}/V.s$ and $14.8{\;}cm^{2}/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_{2}$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

• Ceramist
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• v.7 no.3
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• pp.15-20
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• 2004

일반적으로 정보 저장장치라고 하면 컴퓨터의 하드디스크나 음악을 듣기 위해 이용되는 컴팩트디스크(compact disk- read only memory, CD-ROM)를 생각하게 된다. 1956년 미국 캘리포니아주의 산호세에 위치한 IBM의 한 연구소에서 자성체를 이용한 정보저장장치(hard disk, HD) RAMAC 이 처음 개발된 이래 지난 50년간 HD는 매년 60～100%의 저장용량의 능력을 증가시키며 컴퓨터 산업과 더불어 눈부시게 성장해 오고 있다. (중략)

• Smart Structures and Systems
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• v.25 no.2
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• pp.219-228
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• 2020

This work presents a modified continuum model to explore and investigate static and vibration behaviors of perforated piezoelectric NEMS structure. The perforated nanostructure is modeled as a thin perforated nanobeam element with Euler-Bernoulli kinematic assumptions. A size scale effect is considered by included a nonlocal constitutive equation of Eringen in differential form. Modifications of geometrical parameters of perforated nanobeams are presented in simplified forms. To satisfy the Maxwell's equation, the distribution of electric potential for the piezoelectric nanobeam model is assumed to be varied as a combination of a cosine and linear functions. Hamilton's principle is exploited to develop mathematical governing equations. Modified numerical finite model is adopted to solve the equation of motion and equilibrium equation. The proposed model is validated with previous respectable work. Numerical investigations are presented to illustrate effects of the number of perforated holes, perforation size, nonlocal parameter, boundary conditions, and external electric voltage on the electro-mechanical behaviors of piezoelectric nanobeams.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.194-194
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• 2009

3C-SiC thin films are widely used in extreme environments, radio frequency (RF) environments, and bio-materials for micro/nano electronic mechanical systems (M/NEMS). The mechanical properties of 3C-SiC thin films need to be considered when designing M/NEMS, so Young's Modulus and the hardness need to be accurately measured. Young's Modulus and the hardness are influenced by N-doping. In this paper, we show that the mechanical properties of poly (polycrystalline) 3C-SiC thin films are influenced by the N-doping concentration. Furthermore, we measure the mechanical properties of 3C-SiC thin films for N-doping concentrations of 1%, 3%, and 5%, by using nanoindentation. For films deposited using a 1% N-doping concentration, Young's Modulus and the hardness were measured as 270 GPa and 30 GPa, respectively. When the surface roughness of the thin films was investigated by using atomic force microscopy (AFM), the roughness of the 5% N-doped 3C-SiC thin film was the lowest of all the films, at 15 nm.

• Smart Structures and Systems
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• v.8 no.1
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• pp.53-67
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• 2011

Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.

• Journal of Sensor Science and Technology
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• v.16 no.6
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• pp.462-466
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• 2007

Aluminum nitride (AlN) thin films were deposited on Si substrates by using polycrystalline (poly) 3C-SiC buffer layers, in which the AlN film was grown by pulsed reactive magnetron sputtering. Characteristics of grown AlN films were investigated experimentally by means of FE-SEM, X-ray diffraction, and FT-IR, respectively. The columnar structure of AlN thin films was observed by FE-SEM. X-ray diffraction pattern proved that the grown AlN film on 3C-SiC layers had highly (002) orientation with low value of FWHM (${\Theta}=1.3^{\circ}$) in the rocking curve around (002) reflections. These results were shown that almost free residual stress existed in the grown AlN film on 3C-SiC buffer layers from the infrared absorbance spectrum. Therefore, the presented results showed that AlN thin films grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.