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고밀도 반응성 이온 식각을 이용한 IrMn 자성 박막의 식각

  • Lee, Tae-Yeong;So, U-Bin;Kim, Eun-Ho;Lee, Hwa-Won;Jeong, Ji-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.168-168
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    • 2011
  • 정보화 사회가 도래함으로 개인별 정보 이용량이 급격히 증가하였고 스마트폰과 같은 모바일 기기의 개발로 정보 이용량이 최고치를 갱신 중이다. 이러한 흐름 속에 사람들은 빠른 처리 속도와 고도의 저장 능력을 요구하게 되고 이에 따라 새로운 Random Access Memory에 대한 연구가 활발히 진행되고 있다. 현재 Dynamic Random Access Memory (DRAM)가 눈부신 발전과 성과를 이룩하고 있지만 전원 공급이 중단 될 경우 저장된 내용들이 지워진다는 단점을 가지고 있다. DRAM의 장점에 이러한 단점을 보완할 수 있는 차세대 반도체 소자로 주목 받고 있는 것이 Magnetic Random Access Memory (MRAM)이다. DRAM에서 Capacitor와 유사한 기능을 하는 MTJ stack은 tunneling magnetoresistance (TMR) 현상을 나타내는 자기저항 박막을 이용하여 MRAM 소자에 집적된다. 본 연구에서는 MRAM의 자성 재료로 구성된 MTJ stack을 효과적으로 식각하고 우수한 식각 profile을 얻는 동시에 재증착의 문제를 해결하는데 목적을 둔다. 본 IrMn 자성 박막의 식각 연구는 유도결합 플라즈마 반응성 이온 식각 (Inductively Coupled Plasma Reactive Ion Etching: ICPRIE)법을 이용하여 진행되었다. 특히 본 연구에서는 종래의 $Cl_2$, $BCl_3$ 그리고 HBr과 같은 부식성 가스가 아닌 부식성이 없는 $CH_4$가스를 선택하여 그 농도를 변화시키면서 식각하였고 더 나아가 $O_2$를 첨가하면서 그 효과를 극대화하려고 시도하였다. IrMn 자성 박막의 식각 속도, TiN 하드 마스크에 대한 식각 선택도 그리고 profile 등이 조사되었고 최종적으로 X-ray photoelectron spectroscopy (XPS)를 이용하여 식각 메카니즘을 이해하려고 하였다.

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Effects of Partially Distributed Loads on Dynamic Response of Plane Parabolic Arch (부분분포하중이 평면 포물선아치의 동적응답에 마치는 영향)

  • Cho, Jin-Goo;Park, Keun-Soo
    • Journal of The Korean Society of Agricultural Engineers
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    • v.46 no.6
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    • pp.21-28
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    • 2004
  • This study aims to investigate the effects of partially distributed loads on the dynamic behaviour of steel parabolic arches by using the elasto-plastic finite element model based on the Von Mises yield criteria and the Prandtl-Reuss How rule. For this purpose, the vertical and the radial load conditions were considered as a distributed loading and the loading range is varied from 40% to 100% of arch span. Normal arch and arch with initial deflection were studied. The initial deflection of arch was assumed by the sinusoidal motile of ${\omega}_i\;=\;{\\omega}_O$ sin ($n{\pi}x/L$). Several numerical examples were tested considering symmetric initial deflection when the maximum initial deflection at the apex is fixed as L/1000. The analysis resluts showed that the maximum deflection at the apex of arch was occurred when 70% of arch span was loaded. The maximum deflection at the quarter point of arch span was occurred when 50% of arch span was loaded. It is known that the optimal rise to span ratio between 0.2 and 0.3 when the vertical or radial distributed load is applied. It is verified that the influence of initial deflection of radial load case is more serious than that of vertical load case.

Myofascial Pain Syndrome in Chronic Back Pain Patients

  • Chen, Chee Kean;Nizar, Abd Jalil
    • The Korean Journal of Pain
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    • v.24 no.2
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    • pp.100-104
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    • 2011
  • Background: Myofascial pain syndrome (MPS) is a regional musculoskeletal pain disorder that is caused by myofascial trigger points. The objective of this study was to determine the prevalence of MPS among chronic back pain patients, as well as to identify risk factors and the outcome of this disorder. Methods: This was a prospective observational study involving 126 patients who attended the Pain Management Unit for chronic back pain between 1st January 2009 and 31st December 2009. Data examined included demographic features of patients, duration of back pain, muscle(s) involved, primary diagnosis, treatment modality and response to treatment. Results: The prevalence of MPS among chronic back pain patients was 63.5% (n = 80). Secondary MPS was more common than primary MPS, making up 81.3% of the total MPS. There was an association between female gender and risk of developing MPS ($x^2$ = 5.38, P = 0.02, O.R. = 2.4). Occupation, body mass index and duration of back pain were not significantly associated with MPS occurrence. Repeated measures analysis showed significant changes (P < 0.001) in Visual Analogue Score (VAS) and Modified Oswestry Disability Score (MODS) with standard management during three consecutive visits at six-month intervals. Conclusions: MPS prevalence among chronic back pain patients was significantly high, with female gender being a significant risk factor. With proper diagnosis and expert management, MPS has a favourable outcome.

Study of Nasalance for Normal Korean Adults using Nasometer II (비음측정기를 사용한 정상 성인의 비음도에 관한 연구)

  • Kim, Seong-Il;Baik, Jin-Ah;Shin, Hyo-Keun;Kim, Oh-Hwan
    • Speech Sciences
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    • v.7 no.3
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    • pp.219-228
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    • 2000
  • Assessment of speech nasality provides important information for the treatment of velopharyngeal incompetence. Objective procedures may be used to assess velopharyngea1 function, in examples Nasometer, Aerodynamics, x-ray, Electromyography, Nasoendoscopy and Videofluoroscopy etc. The aim of this study was to obtain comprehensive nasalance data for Korean adults, aged 20 years and to investigate any gender differences within that age group using Nasometer II. The results were as follow: (1) The nasalance of the vowels(/a/, /i/, /e/, /o/, /u/, /ja/, /je/, /wi/) in the group of adults was higher in females than in males (p<0.05). (2) The nasalance of the plosives (/p/, /$p^h$/, /p'/, /t/, /$t^h$/, /t'/, /k/, /$k^h$/, /k'/) in the group of adults was higher in females than in males (p<0.05). (3) The nasalance of the affricatives (/c/, /$c^h$/, /c'/) in the group of adults was higher in females than in males (p<0.05). (4) The nasalance of the fricatives (/s/, /s'/, /$\int$/) in the group of adults was higher in female than in males (p<0.05). (5) There was no statistically significant effect for the nasalance of nasal consonants (/m/, /n/, /$a{\eta}$/).

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Effect of thermo-mechanical treatment on fabrication of Ag tapes for YBCO coated conductor (차세대 선재 기판용 Ag 테이프의 제조공정에서 가공 열처리가 집합조직에 미치는 영향)

  • Lee, N.J.;Oh, S.S.;Park, C.;Song, K.J.;Ha, D.W.;Kwon, Y.K.;Ryu, K.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.04a
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    • pp.46-49
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    • 2002
  • The aim of this paper is to investigate the influence of various deformation ratio on texture of Ag tapes that can be used as a RE-$Ba_2Cu_3O_{7-{\delta}}$ coated conductor tapes without any buffer layer. We fabricated as-rolled Ag substrate with various deformation ratio per step. Thickness and total deformation ratio of Ag tapes were $100{\mu}m$ and >98%, respectively. And as-rolled Ag substrate was annealed at $750^{\circ}C$ for 30min. The as-rolled and recrystallization textures were measured using x-ray pole figures and orientation distribution function (ODF) analysis. With the increase of rolling ratio from 5 to 20%, deformation texture are changed from {1l0}<311> to {1l0}<112>, {032}<100>, {051}<211>. After recrystallization by annealing, main texture was observed to {013}<100> under present condition.

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The Single Crystal Growth Method of undoped and Co-doped $Zn_4SnSe_6$ ($Zn_4SnSe_6:Co^{2+}$ 단결정의 성장방법에 관한 연구)

  • Kim, D.T.;Park, K.H.;Hyun, S.C.;Bang, T.H.;Kim, N.O.;Kim, H.G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.05a
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    • pp.27-30
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    • 2006
  • In this paper, the undoped and Co-doped $Zn_4SnSe_6$ single crystals grown by the chemical transporting reaction(CTR) method using iodine as a transporting agent are investigated. For the crystal growth, the temperature gradient of the CTR furnace was kept at $680^{\circ}C$ for the source zone and at $780^{\circ}C$ for the growth zone for 7days. It was found from the analysis of x-ray diffraction that the $Zn_4SnSe_6$ and $Zn_4SnSe_6Co^{2+}$ compounds have a monoclinic structure. The direct optical energy band gap of the $Zn_4SnSe_6$ and $Zn_4SnSe_6Co^{2+}$ single crystals at 300K were found to be 2.146eV and 2.042eV.

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전자빔 조사에 따른 Flexible ITO Film의 특성 향상에 대한 연구

  • Hwang, Jin-Ye;Nam, Sang-Hun;Kim, Yong-Hwan;Song, Gi-Mun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.581-581
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    • 2013
  • ITO (Indium Tin oxide)는 비화학 양론적 조성을 띄는 n-type 반도체 특성이 있으며 가시광 영역(380~780 nm)의 파장에 대한 높은 광 투과도(>85%)를 가지며 비교적 높은 전도도(${\sim}10^4/{\Omega}-cm$)를 갖고 화학적 안정성이 우수하여 투명전극 박막으로 많이 사용되어왔다. 또한, PET film은 전기절연성, 내후성이 우수하고, 85%의 투과율을 보이는 특성에 의하여 Flexible display의 기판으로 많은 연구가 진행되고 있다. 이와 같은 PET film에 ITO를 증착하여 광 투과도와 전기전도도가 우수한 Flexible display의 투명전극으로 많은 연구 개발이 이루어지고 있다. Flexible ITO 박막의 특성을 향상하기 위해서는 $200^{\circ}C$ 이상의 열처리 공정이 필요하지만, PET는 약 $200^{\circ}C$ 이상에서 열 변형이 일어나므로 열처리 공정이 어렵고 이러한 문제점을 해결하기 위해 ITO/PET film에서 PET film의 변형 없이 ITO 박막의 표면에 전자빔 형태로 조사하여 박막의 물성을 개선하는 연구가 진행되고 있다 [1]. 본 연구에서는 ITO/$SiO_2$가 증착된 PET film에 전자빔을 조사하여 ITO 박막의 물성 변화를 관찰하였고, 전자빔 에너지 변화 및 전자빔 조사 시간에 따라 ITO film의 전기적, 광학적 특성 변화를 분석하였다. 구조적 특성은 XRD (X-ray diffraction), 전기적 특성은 4-point probe, Hall measurement를 이용하였으며, 가시광영역의 광 투과도는 UV-Vis spectrometer로 측정하였다. 전기 광학적 특성 변화는 Figure of Merit (FOM) 수치로 분석하였다. 이 실험으로 PET film에 직접적인 열을 가하지 않으면서 ITO 박막의 표면에 전자빔을 조사 하여, 박막의 전기전도도 및 광 투과율, 결정성 향상 등을 관찰할 수 있었다.

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Dynamics of Air Pollutants during the Yellow Sand Phenomena (黃砂現象의 大氣汚染物質 動態에 關한 硏究)

  • 李敏熙;黃奎浩;金恩植;平井英二;丁子哲治;宮崎元一
    • Journal of Korean Society for Atmospheric Environment
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    • v.6 no.2
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    • pp.183-191
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    • 1990
  • To check the possible transportation of gaseous air pollutants with the particles of yellow sand in the movement of air masses during the Yellow Sand Phenomenon, the concentrations of such air pollutants as TSP, $SO_2, CO, NO_x, O_3 and N-CH_4$, and wind wpeed were measured during the Yellow Sand Phenomenon (April 8 $\sim 10, 1990) and they were compared with those during the normal times in Korea. Meanwhile dust color of the samples during the Yellow Sand Phenomenon was the color of sand, that during the normal times was dark-brown. The concentrations of dusts; water soluble components, and metallic components of soil-originated elements during the Yellow Sand Phenomenon were higher than those during the normal times. While the metallic components in the dusts during the Yellow Sand Phenomenon were from soil-originated elements, those during the normal times were of both soiloriginated and sea-originated elements. The change of hourly concentrations of air pollutants showed bi-modal distribution during the two periods. Generally, the concentration levels of air pollutants during the Yellow Sand Period were higher than those during the normal times. Although similarity was observed in the primary sources, differences were observed in the dynamics of the secondary sources due to chemical reactions of the air pollutants during the two periods.

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Proton Transfer Reactions and Ion-Molecule Reactions of Ionized XCH2CH2Y (X and Y = OH or NH2)

  • Choi, Sung-Seen;So, Hun-Young
    • Bulletin of the Korean Chemical Society
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    • v.27 no.4
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    • pp.539-544
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    • 2006
  • Proton transfer reactions and ion-molecule reactions of bifunctional ethanes of $H_2NCH_2CH_2NH_2$, $H_2NCH_2CH_2OH$, and $HOCH_2CH_2OH$ were studied using Fourier transform mass spectrometry (FTMS). The rate constants for proton transfer reactions between the fragment ions and neutral molecules were obtained from the temporal variation of the ion abundances. The rate constants were consistent with the heats of reaction. The fastest proton transfer reactions were the reactions of $CH_2N^+$, $CHO^+$, and $CH_3O^+$ for $H_2NCH_2CH_2NH_2$, $H_2NCH_2CH_2OH$, and $HOCH_2CH_2OH$, respectively. The $[M+13]^+$ ion was formed by the ion-molecule reaction between $H_2C=NH_2 ^+$ or $H_2C=OH^+$ and the neutral molecule. The major product ions generated from the ion-molecule reactions between the protonated molecule and neutral molecule were $[2M+H]^+$, $[M+27]^+$, and $[M+15]^+$.

RELATIONSHIP BETWEEN PROBING POCKET DEPTH AND TRYPSIN-LIKE ACTIVITY IN SUBGINGIVAL PLAQUE (치주낭 탐침깊이와 치은연하치태내 Trypsin-like activity와의 관계)

  • Park, Jea-Han;Han, Kyung-Yoon
    • Journal of Periodontal and Implant Science
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    • v.23 no.3
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    • pp.442-453
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    • 1993
  • In order to determine the relationship between probing pocket depth and trypsin-like activity in subgingival plaque, probing pocket depth and loss of attachment were measured by Michigan-O probe on mandibular incisors of 30 patients with adult periodontitis. And the trypsin-like activity of Treponema denticola, Porphyromonas gingivalis, and Bacteroides forsythus was evaluated by the hydrolysis of N-Benzoyl-DL-Arginine-2-Naphthyla-mide (BANA) using PerioScan reagent cards(Oral-B Laboratories, Redwood City, CA). The obtained data were statistically analyzed by Microstat program. The results were as follows. 1. The number of teeth showing negative trypsin-like activity was more in shallow periodontal pocket groups, but the number of teeth showing positive trypsin-like activity was more in deep periodontal pocket groups. 2. There was a significant positive correlation between probing pocket depth and trypsin-like activity in subgingival plaque(y=0.413X - 0.955, r = 0.7024, p<0.001). 3. There was no consistent relationship between loss of attachment and trypsin-like activity in subgingival plaque(p>0.01).

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