• 제목/요약/키워드: Multilayer structure

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Hardness and Oxidation Resistance of Ti0.33Al0.67N/CrN Nano-multilayered Superlattice Coatings

  • Ahn, Seung-Su;Oh, Kyung-Sik;Chung, Tai-Joo;Park, Jong-Keuk
    • 한국세라믹학회지
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    • 제56권1호
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    • pp.49-55
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    • 2019
  • $Ti_{0.33}Al_{0.67}N/CrN$ nano-multilayers, which are known to have excellent wear resistance, were prepared using an unbalanced magnetron sputter to have various periods of 2-5 nm. $Ti_{0.33}Al_{0.67}N$ had a hexagonal structure in a single layer, but converted to a cubic structure by forming a multilayer with CrN, which has a cubic structure. Thus, $Ti_{0.33}Al_{0.67}N$ formed a superlattice in the multilayer. The $Ti_{0.33}Al_{0.67}/CrN$ multilayer with a period of 2.5 nm greatly exceeded the hardness of the $Ti_{0.33}Al_{0.67}N$ and the CrN single layer, reaching 39 GPa. According to the low angle X-ray diffraction results, the $Ti_{0.33}Al_{0.67}N/CrN$ multilayer maintained its as-coated structure to a temperature as high as $700^{\circ}C$ and exhibited hardness of 30 GPa. The thickness of the oxide layer of the $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating was less than one-tenth of those of the single layers. Thus, $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating had hardness and oxidation resistance far superior to those of its constituent single layers.

PLD법으로 제작된 Phosphorus를 도핑한 ZnO 박막의 다층 구조 도입에 따른 영향 (The Effects of Phosphorus Doped ZnO Thin Films with Multilayer Structure Prepared by Pulsed Laser Deposition Method)

  • 임성훈;강홍성;김건희;장현우;김재원;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.127-130
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    • 2005
  • The properties of phosphorus doped ZnO multilayer thin films deposited on (001) sapphire substrates by pulsed laser deposition (PLD) were investigated by using annealing treatment at various annealing temperature after deposition. The phosphorus doped ZnO multilayer was composed of phosphorus doped ZnO layer and two pure ZnO layers on sapphire substrate. The structural. electrical and optical properties of the ZnOthin films were measured by X-ray diffraction (XRD). Hall measurements and photoluminescence (PL). As the annealing temperature optimized. the electrical properties of the ZnO multilayer showed a electron concentration of $1.56{\times}10^{16}/cm^3$, a resistivity of 17.97 ${\Omega}cm$. It was observed the electrical property of the film was changed by dopant activation effect as thermal annealing process

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고품질 적층형 인덕터를 이용한 이중 대역 GSM/DCS 대역 분리용 다이플렉서의 설계 및 제작 (Design and fabrication of Diplexer for Dual-band GSM/DCS Application using High-Q Multilayer Inductors)

  • 심성훈;강종윤;최지원;윤영중;윤석진;김현재
    • 한국전자파학회:학술대회논문집
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    • 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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    • pp.294-298
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    • 2003
  • In this paper, the modeling and design of high-Q multilayer passives have been investigated, and multilayer diplexer for GSM/DCS applications has been designed and fabricated using the passives. To minimize the system, the configuration of a multilayer inductor has involved a square spiral structure. Modeling of a multilayer inductor was performed by the subsystems of distributed components, and using the modeling the optimal structures of the high-Q multilayer inductor could be designed by analyzing parasitics and couplings which affect their frequency characteristics. Multilayer diplexer for GSM/DCS application has been designed and fabricated using LTCC technology. LPF for GSM band had the passband insertion loss of less than 0.55 dB, the return loss of more than 12 dB, and the isolation level of more than 26 dB by locating attenuation pole at 1800 MHz. HPF for DCS band had the passband insertion loss of less than 0.82 dB, the return loss of more than 11 dB, and the isolation level of more than 38 dB by locating attenuation pole at 930 MHz.

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RF/DC 마그네트론 스퍼터로 제조한 NiInZnO/Ag/NiInZnO 다층박막의 Ag 금속 삽입층 두께 변화에 따른 특성 연구 (A Study on the Characteristics of NiInZnO/Ag/NiInZnO Multilayer Thin Films Deposited by RF/DC Magnetron Sputter According to the Thickness of Ag Insertion Layer)

  • 김남호;김은미;허기석;여인선
    • 전기학회논문지
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    • 제65권12호
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    • pp.2014-2018
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    • 2016
  • Transparent, conductive electrode films, showing the particular characteristics of good conductivity and high transparency, are of considerable research interest because of their potential for use in opto-electronic applications, such as smart window, photovoltaic cells and flat panel displays. Multilayer transparent electrodes, having a much lower electrical resistance than widely-used transparent conducting oxide electrodes, were prepared by using RF/DC magnetron sputtering system. The multilayer structure consisted of three layers, [NiInZnO(NIZO)/Ag/NIZO]. The optical and electrical properties of the multilayered NIZO/Ag/NIZO structure were investigated in relation to the thickness of each layer. The optical and electrical characteristics of multilayer structures have been investigated as a function of the Ag and NIZO film thickness. High-quality transparent conductive films have been obtained, with sheet resistance of $9.8{\Omega}/sq$ for Ag film thickness of 8 nm. Also the multilayer films of inserted Ag 8 nm thickness showed a high optical transmittance above 93% in the visible range. The electrical and optical properties of the new multilayer films were mainly dependent on the thickness of Ag insertion layer.

낸드플래시 메모리의 냉각효과에 관한 수치적 연구 (A Numerical Study of NAND Flash Memory on the cooling effect)

  • 김기준;구교욱;임효재;이혁
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2011년 춘계학술대회논문집
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    • pp.117-123
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    • 2011
  • The low electric power and high efficiency chips are required because of the appearance of smart phones. Also, high-capacity memory chips are needed. e-MMC(embedded Multi-Media Card) for this is defined by JEDEC(Joint Electron Device Engineering Council). The e-MMC memory for research and development is a memory mulit-chip module of 64GB using 16-multilayers of 4GB NAND-flash memory. And it has simplified the chip by using SIP technique. But mulit-chip module generates high heat by higher integration. According to the result of study, whenever semiconductor chip is about 10 $^{\circ}C$ higher than the design temperature it makes the life of the chip shorten more than 50%. Therefore, it is required that we solve the problem of heating value and make the efficiency of e-MMC improved. In this study, geometry of 16-multilayered structure is compared the temperature distribution of four different geometries along the numerical analysis. As a result, it is con finned that a multilayer structure of stair type is more efficient than a multilayer structure of vertical type because a multi-layer structure of stair type is about 9 $^{\circ}C$ lower than a multilayer structure of vertical type.

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구축함에 탑재되는 통합마스트의 RCS 저감 구조 설계 (Design of RCS Reduction Structure of Integrated Mast on the Destroyer)

  • 이종학;라영은;이건민;장주수
    • 전기전자학회논문지
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    • 제24권1호
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    • pp.238-242
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    • 2020
  • 본 논문에서는 구축함에 탑재되는 통합 마스트의 RCS(Radar Cross Section) 값을 저감시키기 위해 다층 구조로 되어있는 유전체 코팅을 이용한 기법을 제시한다. 제시된 다층 구조는 특별히 고유전율을 요구하거나 전자기파 흡수 차단에 많이 사용되는 자성체성분을 포함하지 않은 일반적인 유전체를 사용할 수 있도록 유전율의 범위를 정했기 때문에 제작에 용이하다는 장점이 있다. 제시된 다층 유전체 구조를 통합 바스트 형상에 적용시킨 후 시뮬레이션을 진행한 결과 다층 구조가 없는 구조물과 비교하여 6GHz에서 10.9dB, 12GHz에서 11.95dB, 18GHz에서 11.63dB의 RCS 저감 성능이 있는 것을 확인하였다.

대향 타겟 스퍼터링 법을 이용한 투명전극용 AZO/Ag/AZO 다층 박막의 제작 (Preparation of AZO/Ag/AZO multilayer for transparent electrode by using facing targets sputtering method)

  • 조범진;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.290-291
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    • 2006
  • We prepared the multilayer with Al doped ZnO (AZO)/Ag/AZO structure. The multilayer were deposited with various thickness of Ag layer on glass substrates at room temperature by using facing targets sputtering (FTS) method. To investigate the electrical, optical and structural properties, we used Hall Effect measurement system, four-point probes. UV-VIS spectrometer with a wavelength of 300 - 100nm, X-ray Diffractometer(XRD) and scanning electron microscopy (SEM). We obtained multilayer thin film with the low resistivity $5,9{\times}10^{-5}{\Omega}cm$ and the average transmittance of 86% m the visible range (400 - 800nm).

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적층형 압전소자를 이용한 이중증폭 메커니즘 (Double Amplification Mechanism Using Multilayer Piezoelectric Actuator)

  • 김준형;김수현;곽윤근
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집B
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    • pp.754-758
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    • 2001
  • A new kind of piezoelectric actuation structure named double amplified multilayer actuator is proposed. Double amplified multilayer actuator combines both dimentional and flextensional amplification concepts. As a result the displacement of the actuator can be more than one hundred times larger than the displacement of multilayer actuator and can be used in in-pipe locomation robot such as an endoscope actuator. This paper studied the dependence of displacement on actuator parameters theoretically and experimentally.

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Rosen type 적층형 압전변압기의 제작 및 전기적 특성 (Fabrication and electrical properties of Rosen-type multilayer piezoelectric transformer)

  • 이창배;윤중락;이경민;우병철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.250-250
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    • 2007
  • In this paper, multilayer piezoelectric transformer for high power is presented. This piezoelectric transformer, with a multilayered construction in the thickness direction, was fabricated at the sintering temperature of $1055^{\circ}C$. The electrical properties of multilayer piezoelectric transformer as a function of Internal electrode structure, with same size, were investigated. Also, the multilayer piezoelectric transformer with different layer number of 5, 10, 15 layers, were investigated.

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단자속 양자 디지털 회로의 접지면을 위한 YB$_{a2}Cu_3O_{7-{\delta}}/SrTiO_3/YB_{a2}Cu_3O_{\7-{\delta}}$ 다층 구조의 제작 (Fabrication of YB$_{a2}Cu_3O_{7-{\delta}}/SrTiO_3/YB_{a2}Cu_3O_{7-{\delta}}$ multilayer structure for ground plane of single flux quantum digital circuit)

  • 장주억;김영환;김창훈;이종민;박종혁;강준희
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.71-74
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    • 1999
  • 접지면을 가지는 정사형 조셉슨 결합을 제작하기 위한 기본 단계로 YBCO/STO/YBCO 구조의 다층 박막을 제작하였다. 상하부 YBCO 박막은 그 사이에 존재하는 STO 절연층에 형성된 홀을 통해 서로 연결되어 있으며 이것의 저항-온도 특성을 측정한 결과 임계 온도가86 K로 나타났다. 이 결과는 시편을 매우 장시간동안 열처리한 후 얻은 결과로서 YBCO/STO/YBCO 다층 구조의 박막 제작시 하부 YBCO 박막의 특성이 많이 저하되고 이를 복원하기 위해서는 열처리 공정이 매우 중요함을 알 수 있었다. 현재 우수한 특성을 가지는 YBCO/STO/YBCO 다층 구조의 제작 공정을 최적화하기 위한 연구를 계속 수행 중에 있다.

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