• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.508-508
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• 1996

;The growth of films have considerable interest in the field of superlattice structured multi-layer epitaxy led to realization of new devices concepts. Molecular beam epitaxy (MBE) with in situ observation by reflection high-energy electron diffraction (RHEED) is a key technology for controlled layered growth on the atomic scale in oxide crystal thin films. Also, the combination of radical oxygen source and MBE will certainly accelerate the progress of applications of oxides. In this study, the growth process of single crystal films using by MBE method is discussed taking the oxide materials of Bi-Sr-Ca-Cu family. Oxidation was provided by a flux density of activated oxygen (oxygen radicals) from an rf-excited discharge. Generation of oxygen radicals is obtained in a specially designed radical sources with different types (coil and electrode types). Molecular oxygen was introduced into a quartz tube through a variable leak valve with mass flowmeter. Corresponding to the oxygen flow rate, the pressure of the system ranged from $1{\;}{\times}{\;}10^{-6}{\;}Torr{\;}to{\;}5{\;}{\times}{\;}10^{-5}$ Torr. The base pressure was $1{\;}{\times}{\;}10^{-10}$ Torr. The growth of Bi-oxides was achieved by coevaporation of metal elements and oxygen. In this way a Bi-oxide multilayer structure was prepared on a basal-plane MgO or $SrTiO_3$ substrate. The grown films compiled using RHEED patterns during and after the growth. Futher, the exact observation of oxygen radicals with MBE is an important technology for a approach of growth conditions on stoichiometry and perfection on the atomic scale in oxide. The oxidization degree, which is determined and controlled by the number of activated oxygen when using radical sources of two types, are utilized by voltage locked loop (VLL) method. Coil type is suitable for oxygen radical source than electrode type. The relationship between the flux of oxygen radical and the rf power or oxygen partial pressure estimated. The flux of radicals increases as the rf power increases, and indicates to the frequency change having the the value of about $2{\times}10^{14}{\;}atoms{\;}{\cdots}{\;}cm^{-2}{\;}{\cdots}{\;}S^{-I}$ when the oxygen flow rate of 2.0 seem and rf power 150 W.150 W.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2018년도 춘계학술논문요약집
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• pp.57-57
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• 2018

The electrorefining process is generally composed of two recovery steps in pyroprocessing - the deposit of uranium onto a solid cathode and the recovery of the remaining uranium and TRU elements simultaneously by a liquid cadmium cathode. The liquid cathode processing is necessary to separate cadmium from the actinide elements since the actinide deposits are dissolved or precipitated in a liquid cathode. Distillation process was employed for the cathode processing. It is very important to avoid a splattering of cadmium during evaporation due to the high vapor pressure. In this study, a multi-layer porous round cover was proposed and examined to develop a splatter shield for the Cd distillation crucible. Cadmium vapor can be released through the holes of the shield, whereas liquid drops can be collected in the multiple hemisphere. The collected drops flow on the round surface of the cover and flow down into the crucible. The crucible cover was fabricated and tested in the Cd distiller. The cover was made with three stainless steel round plates with a diameter of 33.50 mm. The distance between the hemispheres and the diameter of the holes are 10 and 1 mm, respectively. About 40 grams of Cd and about 4 grams of Bi was distilled at a reduced pressure for two hours at $470^{\circ}C$. After the Cd distillation experiment, cadmium was not detected and more than 90 % of Bi remained in the ICP-OES analysis. Therefore the crucible cover can be a candidate for the splatter shield of the Cd distillation crucible. Further development of the crucible cover is necessary for the decision of the optimum cover geometry and the operating conditions of the Cd distiller.

• 대한지하수환경학회지
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• 제6권1호
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• pp.42-47
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• 1999

층간 교차유동이 일어나는 다층 대수층에 존재하는 부분 관통정에서의 유사정상상태 유동에 대하여 연구하였다. 본 논문에서는 부분관통에 의해 발생하는 압력 감소를 나타내는 유사표피인자를 계산할 수 있는 간단한 해법을 제시하였다. 이 해법은 기존에 제시되었던 방법들이 가진 기하학적 또는 계산시간 상의 한계성을 극복한 것이다. 본 계산을 위하여 폐쇄 대수층에서의 장기 압력 거동을 나타내는 간략화된 유사정상상태 확산방정식을 방사형 시스템에 적용하고 그 해를 이용하였다. 다양한 형태의 원통좌표계 시스템에서 본 해법의 적용성을 검토하고 그 결과를 그래프로 제시하였다. 기존의 결과와 비교해볼 때 본 해법을 이용할 경우 최소의 계산량으로 매우 정확한 유사표피인자 값을 계산할 수 있음을 나타내었다. 특히 본 해법은 기하학적으로 복잡한 시스템에 매우 유용함을 보여주었다.

• KIEAE Journal
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• 제9권3호
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• pp.61-68
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• 2009

Gwangju Metropolitan Government & Ministry of Environment have signed a model city in response to Climate Change agreement. The agreement calls for Gwangju to cut greenhouse gas emissions 10% below 2005 levels by 2015. Gwangju has seen this agreement as an opportunity to cut pollution and conserve the environment as well as to reinvigorate local economy. According to policy of Gwangju, Gwangju held design competition for Gwangju City Arboretum on march, 2009. The purpose of design competition was to give a wide publicity to Gwangju as Hub City of Asian Culture and construct carbon-neutral arboretum in accordance with the policy of 'Low-Carbon and Green Growth'. First of all, a design concept of arboretum is 'winding, round, overlay 'to reflect the landscape of Nam-do which is surrounded by mountains and river flows through the village. Second, the arboretum has five different places with these themes - Forest of Festivals, Health, Nature, Nostalgia, Education and Future. Each place has a symbolic theme park and different flow planning respectively. Third, the most critical point is that the arboretum is a carbon-neutral park. Gwangju arboretum will soon be developed in metropolitan sanitary landfill and constructed as the O2 arboretum based on low carbon strategy. Fourth, the O2 arboretum suggests specialized issue : 'Energy Saving', 'Recycling System', 'Green Network', 'Water System(rainwater maintenance and wetland development)'. Besides, main buildings(greenhouse, visitor center, Nam-do experience exhibition hall, and forest museum) is designed in consideration of harmony with topography character, surroundings. Also, planting will be a multilayer plant based on native landscape trees in consideration of function and the growth characteristics.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.285-285
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• 2011

EUVL (Extreme Ultra Violet Lithography) is one of competitive lithographic technologies for sub-30nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance since the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• 정보저장시스템학회논문집
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• 제2권4호
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• pp.224-229
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• 2006

There has been studied flow to minimize the spot size to increase data capacity. Optical data storage devices are being developed near practical limits with wavelength and NA of 405nm and 0.85. There has been studied many types of next generation storage devices such as blu-ray multilayer system, probe based data storage and holographic data storage. Among these data storage devices, solid immersion lens(SIL) based near field recording (NFR) has been widely studied. In this system, SIL is the key component that focuses the laser beam with a very small size which enables ultra high data capacity. Therefore, optical performance evaluation system is required for SIL assembly. In this dissertation, a simple and accurate SIL assembly measurement method is proposed with wedge plate lateral shearing interferometer(LSI). Wedge plate LSI is cheaper than commercialized interferometer, robust to the vibration and the moving distance for phase shifting is large that is order of micrometer. We designed the thickness, wedge angle, material, surface quality and wavelength of wedge plate as 1mm, 0.02degree, fused silica, lamda/10(10-5) and 405nm, respectively. Also, we confirmed simulation and experimental results with quantitative analysis. This simple wedge plate LSI can be applied to different types of SIL such as solid immersion mirror(SIM), hemispherical, super-hemispherical and elliptical SIL.

• 한국전자파학회논문지
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• 제28권6호
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• pp.452-458
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• 2017

배기관 및 급수관에 사용되는 다층 구조 도파관은 공정의 이점 및 유속 손실을 줄이는 장점을 가진다. 또한, 겹치는 층의 수를 증가시켜 차폐효과를 보상할 수 있다. 하지만 다층 구조 도파관의 차폐효과를 기존의 차폐효과 방정식으로는 예측할 수 없음에서 발생하는 적용 한계를 극복하기 위해, 수정된 차폐효과 방정식을 제안하였다. 수정된 차폐효과 방정식은 다층 구조 도파관 내부가 공기로 채워진 경우와 특정 매질이 채워졌을 경우로 나누어서 2층 구조에서부터 64층 구조까지 증가시켜 결과를 얻어냈다. 또한, 결과의 타당성을 증명하기 위하여 시뮬레이션 결과와 비교하여 제안된 차폐 효과 방정식이 일치하는 것을 확인하였다.

• 한국대기환경학회지
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• 제24권1호
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• pp.91-99
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• 2008

A multilayer tower-type photoreactor, in which $TiO_2$-coated glass-tubes were installed, was used to measure the vapor-phase BTEX removal efficiencies by ozone oxidation ($O_3$/UV), photocatalytic oxidation ($TiO_2$/UV) and the combination of ozone and photocatalytic oxidation ($O_3/TiO_2$/UV) process, respectively. The experiments were conducted under various relative humidities, temperatures, ozone concentrations, gas flow rates and BTEX concentrations. As a result, the BTEX removal efficiency and the oxidation rate by $O_3/TiO_2$/UV system were highest, compared to $O_3$/UV and $TiO_2$/UV system. The $O_3/TiO_2$/UV system accelerated the low oxidation rate of low-concentration organic compounds and removed organic compounds to a large extent in a fixed volume of reactor in a short time. Therefore, $O_3/TiO_2$/UV system as a superimposed oxidation technology was developed to efficiently and economically treat refractory VOCs. Also, this study demonstrated feasibility of a technology to scale up a photoreactor from lab-scale to pilot-scale, which uses (i) a separated light-source chamber and a light distribution system, (ii) catalyst fixing to glass-tube media, and (iii) unit connection in series and/or parallel. The experimental results from $O_3/TiO_2$/UV system showed that (i) the highest BTEX removal efficiencies were obtained under relative humidity ranging from 50 to 55% and temperature ranging from 40 to $50^{\circ}C$, and (ii) the removal efficiencies linearly increased with ozone dosage and decreased with gas flow rate. When applying Langmuir-Hinshelwood model to $TiO_2$/UV and $O_3/TiO_2$/UV system, reaction rate constant for $O_3/TiO_2$/UV system was larger than that for $TiO_2$/UV system, however, it was found that adsorption constant for $O_3/TiO_2$/UV system was smaller than that for $TiO_2$/UV system due to competitive adsorption between organics and ozone.

• 한국터널지하공간학회 논문집
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• 제21권5호
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• pp.587-609
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• 2019

본 연구에서는 고준위폐기물 처분장 내 완충재 로 제시되고 있는 벤토나이트의 재료적인 측면에서 장 단기 처분 안정성을 분석하였으며, 처분효휼 향상을 위한 완충재 디자인 관련 대안개념에 대해 연구동향을 분석하였다. 일반적으로 $150{\sim}250^{\circ}C$ 사이에서 온도증가 및 증기발생 등으로 인해 완충재의 수리전도도와 팽윤능에 비가역적인 변화가 발생한다고 보고된다. 하지만 완충재의 최고온도가 최소한 $150^{\circ}C$를 초과하지 않는다면 온도가 벤토나이트 완충재의 재료적, 구조적 그리고 광물학적 안전성에 미치는 영향은 크지 않는 것으로 분석되었다. 완충재 최고온도 제한은 심층처분장 단위면적에 처분할 수 있는 폐기물의 양을 제한하여 처분효율을 결정하며, 나아가 처분부지의 확보 가능성에까지 영향을 미치는 중요한 설계 인자이다. 따라서 고온이 완충재의 성능에 미치는 영향을 규명함으로써 완충재의 최고온도 제한을 완화하고, 이를 통해 심층처분장의 처분밀도 향상과 처분장 설계의 최적화를 도모할 필요가 있다. 이와 더불어 처분효율을 극대화하기 위해서는 복합소재(흑연, 실리카 등) 및 다중구조(전도층, 절연층 등)의 고기능성 공학적방벽재 개발과 다층처분장(multilayer repository)으로 처분장 레이아웃을 변경하는 방법 등을 병행하여 검토할 필요가 있다. 이는 처분사업의 신뢰성 및 국민 수용성 확보에 큰 기여를 할 수 있을 것으로 판단된다.

• 방사성폐기물학회지
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• 제17권1호
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• pp.1-13
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• 2019

후쿠시마 원자력 발전소의 사고로 인해 일본 동부 지역에 다량의 방사성 핵종이 축적되었다. 이러한 방사성 물질은 숲, 도시, 하천, 호수를 포함한 넓은 범위에서 관측되고 있다. 방사성 세슘의 토양 입자에 강하게 흡착하는 특성 때문에 방사성 세슘은 침식된 토사와 함께 이동하여, 인구가 밀집한 하천 하류지역으로 그리고 연안으로 서서히 이동한다. 본 연구에서는 수생환경의 오염된 토사의 이동을 재현하기 위한 수치모델을 개발하고, 그 성과의 일부를 한국원자력연구원 내에 위치한 침식된 토사 관측 장비에서 관측된 결과와 비교하였다. 수집된 토사 시료의 입경 특성을 분석하기 위해서 표준 체분석과 이미지 분석법을 적용하였다. 수치 모델은 초기 포화도, 강우의 토사 침투율, 멀티 레이어, rain splash 등을 고려하여 현실의 강우에 따른 토사의 이동을 시뮬레이션 할 수 있도록 개발하였다. 2019년 연구에서는 수치모델에 나무에 의한 강우 쉴드 효과, 증발효과, 표면물의 쉴드 효과 등이 추가될 계획이다. 토사 유실 관측 장비를 2018년부터 월성 원전 인근에 설치해 지속적으로 관측 자료를 수집하고 있다. 이러한 관측자료를 기반으로 방사성 핵종의 강우, 하천, 연안으로 이동하는 장기 영향 평가 수치모델을 개발할 계획이다.