• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.9
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• pp.771-775
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• 2007

In this study, in order to develop low temperature sintering ceramics for thickness vibration mode multilayer piezoelectric transformer, $PbTiO_3$ system ceramics were fabricated using $Na_2CO_3,\;Li_2CO_3,\;MnO_2\;and\;Bi_2O_3$ as sintering aids and their dielectric and piezoeletric properties were investigated according to the amount of $Bi_2O_3$ addition. At the sintering temperature of $900^{\circ}C\;and\;Bi_2O_3$ addition of 0.1 wt%, density, grain size, thickness vibration mode eletromechanical coupling factor($k_t$), thickness vibration mode mechanical quality factor($Q_{mt}$) and dielecteic constant(${\varepsilon}_r$) showed the optimum value of $6.94g/cm^3,\;2.413{\mu}m$, 0.497, 3,162 and 209, respectively, for thickness vibration mode multilayer piezoelectric transformer application.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.425-430
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• 2004

In this paper, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformer, PMN-PZT ceramics were manufactured with the variations of sintering times, and their microstructural, piezoelectric and dielectric properties were investigated. To manufacture multilayer piezoelectric transformer, the low temperature sintering composition is need, hence, $Li_2CO_3$ and $Bi_2O_3$ were used as sintering aids and the specimens were sintered during 30, 60, 90, 120, 150 and 180 minutes, respectively. At the specimen sintered during 90 minute, mechanical quality factor(Qm), electromechanical coupling factor(kp) and dielectric constant were showed the optimum values of 2356, 0.504 and 1266, respectively. All the specimens showed tetragonality phase, and pyrochlore phase was not shown.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.66-67
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• 2005

In this study, in order to develop multilayer piezoelectric actuator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3-Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated with the function of PNN substitution. With increasing PNN substitution, dielectric constant(${\varepsilon}r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased at 10~12[mol%] PNN substitution and then decreased at all sintering temperature. With increasing PNN substitution, phase changed from tetragonal to rhombohedral at [10~12mol%] PNN substitution. At the 12[mol%] PNN substituted PMN-PZT composition ceramic sintered at 950[$^{\circ}C$], density, ${\varepsilon}r$, kp, $d_{33}$ and Qm showed the optimum value of 7.79[$g/cm^3$], 1160, 0.599, 419[pC/N) and 894, respectively for multilayer piezoelectric actuator application.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.292-293
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• 2007

In the study, in order to develop low temperature sintering ceramics for multilayer piezoelectric transformer, $(Pb,Ca,Sr)Ti(Mn,Sb)O_3$ ceramics were fabricated using $Na_2CO_3$, $Li_2CO_3$, $MnO_2$ and $Bi_2O_3$ as sintering aids and their dielectric and piezoelectric properties were investigated according to the amount of $Bi_2O_3$ addition. At the sintering temperature of $900^{\circ}C$, density, thickness vibration mode electromechanical coupling factor ($k_t$), thickness vibration mode mechanical quality factor ($Q_{mt}$) and dielecteic constant (${\varepsilon}_r$) showed the optimum value of $6.94[g/cm^3]$, 0.497, 3,162 and 209, respectively, for multilayer piezoelectric transformer application.

• Transactions on Electrical and Electronic Materials
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• v.10 no.4
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• pp.121-124
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• 2009

In this study, in order to develop compositions of ceramics suitable for piezoelectric actuator and ultrasonic vibrator applications using low temperature sintering, multilayer, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$ and $Na_2CO_3$ as sintering aids. Their structural, piezoelectric and dielectric characteristics were investigated according to the Zr/Ti ratio. As the Zr/Ti ratio increased, the electromechanical coupling factor $k_p$, and piezoelectric constant $d_{33}$ and the mechanical quality factor $Q_m$ all increased with Zr/Ti ratio and then decreased after the ratio exceeded 50/50. At the ratio of Zr/Ti =49/51 and sintering temperature of $900^{\circ}C$; the density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$ piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ all showed the optimum values of 7.900 $g/cm^3$, 0.576, 856, 312 pC/N, 1,326, respectively. These property values are very suitable for multilayer ceramics actuator applications.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.254-259
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• 2005

In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential 3$\omega$ method. Also, verification of differential 3$\omega$ method has been accomplished with various proposed criteria. The target film for measurement is 300 nm silicon dioxide and this thin film is covered with various thicknesses of upper protective layer. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. However, the verification of differential 3$\omega$ method has not been conducted. Thus we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential 3$\omega$ method is verified to be reliable as long as the proposed preconditions are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between upper protective layer thickness and width of the heater line due to heat spreading effect.

• Transactions of the Society of Information Storage Systems
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• v.2 no.1
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• pp.85-90
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• 2006

In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential $3\omega$ method. Also, verification of differential $3\omega$ method has been accomplished with various proposed criteria. The target film for the measurement is 300 nm thick silicon dioxide which is covered with upper protective layer of various thicknesses. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. Since the verification of differential $3\omega$ method has not been conducted yet, we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential $3\omega$ method is verified to be reliable as long as the proposed preconditions of the samples are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between thickness of the upper protective layer and width of the heater line due to heat spreading effect.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.33-34
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• 2008

Barium titanate (BaTiO3) is one of the most important dielectric materials for the electronic devices, such as MLCC (Multilayer Ceramic Capacitor). The thickness of the dielectric thin film in MLCC has become thinner and reached about 0.8 ${\mu}m$. Further down sizing is required for the higher performance. For this reason, we should take into account for the size effect of Barium titanate powders. In this study, we demonstrated that size effect for BaTiO3 (0.2 ~ 0.5 ${\mu}m$, hydrothermal BT) could be estimates by using dielectric properties analysis together with the powder properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.32-33
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• 2006

In this study, in order to develop multilayer ceramic actuator for ultrasonic nozzle and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$. $Na_2CO_3$ and ZnO as sintering aids. And then, their piezoelectric and dielectric properties according to the amount of ZnO addition were investigated. The addition of ZnO improved density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant of PMN-PNN-PZT ceramics due to the increase of sinterability and accepter doping effect. Electromechanical coupling factor and mechanical quality factor of PMN-PNN-PZT ceramics increased with ZnO amount up to 0.4wt% and then decreased. At the sintering temperature of $900^{\circ}C$ and 0.4wt% ZnO addition, density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant showed the optimum value of 7.876g/$cm^2$, 1299, 0.612, 1151 and 369pC/N, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.3
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• pp.232-235
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• 2008

In this study, in order to develop the composition ceramics for multilayer piezoelectric actuator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$, $Na_2CO_3$, ZnO as sintering aids and their piezoelectric and dielectric properties were investigated according to the Bi substitution, Bi substitution induced grain growth and increase of sinterablity, And also, Bi substitution suppress secondary phase due to the liquid phase sintering effect. Bi substitution enhanced electromechanical coupling factor ($k_p$) and dielectric constant ($\varepsilon_r$), However, mechanical quality factor($Q_m$) was deteriorated, At the sintering temperature of 870 $^{\circ}C$ and Bi substitution of 1 mol%, density, electromechanical coupling factor ($k_p$), mechanical quality factor ($Q_m$), Dielectric constant ($\varepsilon_r$) and piezoelectric constant ($d_{33}$) of specimen showed the optimum values of 7,878 $g/cm^3$, 0,608, 835, 1603 and 397 pC/N, respectively for multilayer piezoelectric actuator application.