• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.689-691
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• 2002

Well-aligned multi-wall carbon nanotubes (MWCNTs) have been grown on both Coming glass and silicon substrates at about 400 $^{\circ}C$ by a modified plasma - enhanced chemical vapor deposition system. We have investigated laser irradiation effect on carbon nanotube surface by using an ultra - violet laser. The laser operated to modify structural defect of was carbon nanotube and to ablate possible contamination of carbon nanotube surface. The morphology and surface transformation of MWCNTs as analyzed by a SEM. In addition, the field emission measurement was also carried out in a vacuum chamber with a $10^{-7}$ Torr base pressure by applying bias voltages up to 1000V.

• Journal of Electrical Engineering and Technology
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• 제6권2호
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• pp.233-238
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• 2011

In the present work, a new approach is proposed for via interconnects of semiconductor devices, where multi-wall carbon nanotubes (MWCNTs) are used instead of conventional metals. In order to implement a selective growth of carbon nanotubes (CNTs) for via interconnect, the buried catalyst method is selected which is the most compatible with semiconductor processes. The cobalt catalyst for CNT growth is pre-deposited before via hole patterning, and to achieve the via etch stop on the thin catalyst layer (ca. 3nm), a novel 2-step etch scheme is designed; the first step is a conventional oxide etch while the second step chemically etches the silicon nitride layer to lower the damage of the catalyst layer. The results show that the 2-step etch scheme is a feasible candidate for the realization of CNT interconnects in conventional semiconductor devices.

• 한국정밀공학회지
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• 제24권3호
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• pp.134-139
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• 2007

We report the suspension of individual multi-walled carbon nanotubes (MWNTs) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but large-diameter MWNTs can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for a MWNT suspension based on a theoretical approach.

• 한국응용과학기술학회지
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• 제22권1호
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• pp.35-42
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• 2005

Aligned multi-wall carbon nanotubes (MWNTs) were synthesized through the catalytic decomposition of hydrocarbons in a quartz tube reactor. In this study, we investigated the influence of gas flow rate of feedstock on the structure and growth rate of vertically aligned carbon nanotubes produced by the floating catalyst method. As the flow rate of feedstock increased, the nanotube diameter became smaller and the length became longer. Although the growth rate also increased with the raise of flow rate, the optimum flow rate of feedstock existed for the crystallinity of carbon nanotubes.

• Carbon letters
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• 제22권
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• pp.14-24
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• 2017

Carboxylated multi-wall carbon nanotubes (MWCNTs-COOH) have been used as efficient adsorbents for the removal of picric acid from aqueous solutions under stirring and ultrasound conditions. Batch experiments were conducted to study the influence of the different parameters such as pH, amount of adsorbents, contact time and concentration of picric acid on the adsorption process. The kinetic data were fitted with pseudo-first order, pseudo-second-order, Elovich and intra-particle diffusion models. The kinetic studies were well described by the pseudo-second-order kinetic model for both methods. In addition, the adsorption isotherms of picric acid from aqueous solutions on the MWCNTs were investigated using six two-parameter models (Langmuir, Freundlich, Tempkin, Halsey, Harkins-Jura, Fowler-Guggenheim), four three-parameter models (Redlich-Peterson, Khan, Radke-Prausnitz, and Toth), two four-parameter equations (Fritz-Schlunder and Baudu) and one five-parameter equation (Fritz-Schlunder). Three error analysis methods, correlation coefficient, chi-square test and average relative errors, were applied to determine the best fit isotherm. The error analysis showed that the models with more than two parameters better described the picric acid sorption data compared to the two-parameter models. In particular, the Baudu equation provided the best model for the picric acid sorption data for both methods.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제36회 동계학술대회 초록집
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• pp.127.1-127.1
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• 2009

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2005년도 생물공학의 동향(XVII)
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• pp.736-736
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• 2005

• Carbon letters
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• 제17권1호
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• pp.45-52
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• 2016

The attachment of 2-aminobenzamide to carboxylated multi-wall carbon nanotubes (MWCNTs)-COOH was achieved through the formation of amide bonds. Then, the functionalized MWCNTs, MWCNT-amide, were treated by phosphoryl chloride to produce MWCNT-quin. The products were characterized by Fourier transform infrared spectroscopy, Raman spectroscopy, scanning electron microscopy, thermogravimetric analysis, derivative thermogravimetric, steady-state fluorescence spectroscopy, and solubility testing. MWCNT-quin showed photo-electronic properties, which is due to the attachment of the 4-hydroxyquinazoline groups to them as proved by steady-state fluorescence spectroscopy. This suggests intramolecular interactions between the tubes and the attached 4-hydroxyquinazoline. The toxicity of the samples was evaluated in human embryonic kidney HEK293 and human breast cancer SKBR3 cell lines, and the viable cell numbers were measured by 3-(4,5-dimethyl-2-thiazolyl)-2,5-diphenyltetrazolium bromide (MTT) after the cells were cultured for 24 h. Cellular investigations showed that the modified MWCNTs, particularly MWCNT-quin, have considerably significant toxic impact on SKBR3 as compared to HEK293 at the concentration of 5 µg/mL.

• Journal of Microbiology and Biotechnology
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• 제15권2호
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• pp.234-238
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• 2005

Glucose oxidase was immobilized on the carboxylated multi-wall carbon nanotubes (MWNT-COOHs) in the presence of a coulping reagent, 1-ethy1-3-(3-dimethylaminopropy1) carbodiimide. Significant amounts of glucose oxidase were also immobilized on MWNT-COOHs without the coupling reagent. Various conditions for the immobilization of glucose oxidase were optimized. Optimal pH for the maximal activity of the immobilized glucose oxidase shifted to 7 from the optimal pH of 6 for the maximal activity of free enzyme due to the carboxy1 groups on the surface of MWNT-COOHs. An electrode of graphite rod with a diameter of 6 mm was fabricated using the immobilized glucose oxidase. The cyclic voltammetry study of the enzyme electrode revealed that the oxidation of glucose and subsequent transfer of electrons from the oxidation of glucose to the electrode were possible by the immobilized glucose oxidase without a mediator, implying that the enzyme electrode can be utilized for the development of biofuel cells.

• 마이크로전자및패키징학회지
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• 제9권4호
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• pp.55-60
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• 2002

본 연구는 $580^{\circ}C$의 저온에서 ICPHFCVD(inductively coupled plasma hot filament chemical vapor deposition)를 이용하여 탄소나노튜브를 수직성장 시키는 것을 나타낸 것이다. 또한, 탄소나노튜브의 끝단에 존재하는 Ni-tip을 비성질 탄소같은 탄소질 물질등의 서로 다른 에칭특성에 기초하여 RF plasma를 이용하여 일회 공정으로 불순물을 정제하고, 고찰하였다. 정제된 이후의 탄소나노튜브는 속이 비어있는 다중벽 탄소나노튜브로 나타났으며, 성장된 탄소나노튜브는 외경과 내경은 50 nm와 25 nm였다. 또한, 탄소나노튜브의 graphite 층의 총수는 약 82개 층으로 구성되었으며, 층과 층간의 거리는 0.34nm였다. 그리고 TEM 관찰 결과, 탄소나노튜브 tip의 Ni촉매는 계속적인 에칭 공정에 의해 효과적으로 제거 되었다.