• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.689-691
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• 2002

Well-aligned multi-wall carbon nanotubes (MWCNTs) have been grown on both Coming glass and silicon substrates at about 400 $^{\circ}C$ by a modified plasma - enhanced chemical vapor deposition system. We have investigated laser irradiation effect on carbon nanotube surface by using an ultra - violet laser. The laser operated to modify structural defect of was carbon nanotube and to ablate possible contamination of carbon nanotube surface. The morphology and surface transformation of MWCNTs as analyzed by a SEM. In addition, the field emission measurement was also carried out in a vacuum chamber with a $10^{-7}$ Torr base pressure by applying bias voltages up to 1000V.

• Journal of Electrical Engineering and Technology
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• v.6 no.2
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• pp.233-238
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• 2011

In the present work, a new approach is proposed for via interconnects of semiconductor devices, where multi-wall carbon nanotubes (MWCNTs) are used instead of conventional metals. In order to implement a selective growth of carbon nanotubes (CNTs) for via interconnect, the buried catalyst method is selected which is the most compatible with semiconductor processes. The cobalt catalyst for CNT growth is pre-deposited before via hole patterning, and to achieve the via etch stop on the thin catalyst layer (ca. 3nm), a novel 2-step etch scheme is designed; the first step is a conventional oxide etch while the second step chemically etches the silicon nitride layer to lower the damage of the catalyst layer. The results show that the 2-step etch scheme is a feasible candidate for the realization of CNT interconnects in conventional semiconductor devices.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.134-139
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• 2007

We report the suspension of individual multi-walled carbon nanotubes (MWNTs) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but large-diameter MWNTs can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for a MWNT suspension based on a theoretical approach.

• Journal of the Korean Applied Science and Technology
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• v.22 no.1
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• pp.35-42
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• 2005

Aligned multi-wall carbon nanotubes (MWNTs) were synthesized through the catalytic decomposition of hydrocarbons in a quartz tube reactor. In this study, we investigated the influence of gas flow rate of feedstock on the structure and growth rate of vertically aligned carbon nanotubes produced by the floating catalyst method. As the flow rate of feedstock increased, the nanotube diameter became smaller and the length became longer. Although the growth rate also increased with the raise of flow rate, the optimum flow rate of feedstock existed for the crystallinity of carbon nanotubes.

• Carbon letters
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• v.22
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• pp.14-24
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• 2017

Carboxylated multi-wall carbon nanotubes (MWCNTs-COOH) have been used as efficient adsorbents for the removal of picric acid from aqueous solutions under stirring and ultrasound conditions. Batch experiments were conducted to study the influence of the different parameters such as pH, amount of adsorbents, contact time and concentration of picric acid on the adsorption process. The kinetic data were fitted with pseudo-first order, pseudo-second-order, Elovich and intra-particle diffusion models. The kinetic studies were well described by the pseudo-second-order kinetic model for both methods. In addition, the adsorption isotherms of picric acid from aqueous solutions on the MWCNTs were investigated using six two-parameter models (Langmuir, Freundlich, Tempkin, Halsey, Harkins-Jura, Fowler-Guggenheim), four three-parameter models (Redlich-Peterson, Khan, Radke-Prausnitz, and Toth), two four-parameter equations (Fritz-Schlunder and Baudu) and one five-parameter equation (Fritz-Schlunder). Three error analysis methods, correlation coefficient, chi-square test and average relative errors, were applied to determine the best fit isotherm. The error analysis showed that the models with more than two parameters better described the picric acid sorption data compared to the two-parameter models. In particular, the Baudu equation provided the best model for the picric acid sorption data for both methods.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.127.1-127.1
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• 2009

• 한국생물공학회:학술대회논문집
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• 2005.10a
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• pp.736-736
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• 2005

• Carbon letters
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• v.17 no.1
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• pp.45-52
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• 2016

The attachment of 2-aminobenzamide to carboxylated multi-wall carbon nanotubes (MWCNTs)-COOH was achieved through the formation of amide bonds. Then, the functionalized MWCNTs, MWCNT-amide, were treated by phosphoryl chloride to produce MWCNT-quin. The products were characterized by Fourier transform infrared spectroscopy, Raman spectroscopy, scanning electron microscopy, thermogravimetric analysis, derivative thermogravimetric, steady-state fluorescence spectroscopy, and solubility testing. MWCNT-quin showed photo-electronic properties, which is due to the attachment of the 4-hydroxyquinazoline groups to them as proved by steady-state fluorescence spectroscopy. This suggests intramolecular interactions between the tubes and the attached 4-hydroxyquinazoline. The toxicity of the samples was evaluated in human embryonic kidney HEK293 and human breast cancer SKBR3 cell lines, and the viable cell numbers were measured by 3-(4,5-dimethyl-2-thiazolyl)-2,5-diphenyltetrazolium bromide (MTT) after the cells were cultured for 24 h. Cellular investigations showed that the modified MWCNTs, particularly MWCNT-quin, have considerably significant toxic impact on SKBR3 as compared to HEK293 at the concentration of 5 µg/mL.

• Journal of Microbiology and Biotechnology
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• v.15 no.2
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• pp.234-238
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• 2005

Glucose oxidase was immobilized on the carboxylated multi-wall carbon nanotubes (MWNT-COOHs) in the presence of a coulping reagent, 1-ethy1-3-(3-dimethylaminopropy1) carbodiimide. Significant amounts of glucose oxidase were also immobilized on MWNT-COOHs without the coupling reagent. Various conditions for the immobilization of glucose oxidase were optimized. Optimal pH for the maximal activity of the immobilized glucose oxidase shifted to 7 from the optimal pH of 6 for the maximal activity of free enzyme due to the carboxy1 groups on the surface of MWNT-COOHs. An electrode of graphite rod with a diameter of 6 mm was fabricated using the immobilized glucose oxidase. The cyclic voltammetry study of the enzyme electrode revealed that the oxidation of glucose and subsequent transfer of electrons from the oxidation of glucose to the electrode were possible by the immobilized glucose oxidase without a mediator, implying that the enzyme electrode can be utilized for the development of biofuel cells.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.4
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• pp.55-60
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• 2002

This paper presents a technique for the preparation of vertically grown CNTs by ICPHFCVD(inductively coupled plasma hot filament chemical vapor deposition) below $580^{\circ}C$. Purification of the CNTs(carbon nanotubes) using RE(radio frequency) plasma in a one step process, based on the different etching property of the Ni-tip, amorphous carbon and carbonaceous materials is also discussed. After purifying the grown materials. CNTs shown the multi walled and hollow typed structure. The typical outer and inner diameters or CNT were 50 nm and 25 nm, respectively. The graphitic wall was composed of 82 layers and the distance between wall and wall was 0.34 nm. From the results of TEM observation, the Ni catalyst at the tip of the carbon nanotubes were effectively removed by using a RF plasma etching, continuously.